Semiconductor Environmental Safety and Health Boot Camp
Creighton, Susan
(.S. Creighton Consulting)

1.Class Purpose: To instruct students on the basic EHS issues found in a semiconductor fab by describing facilities and equipment functionality and conducting an exercise allowing students to arrange their own fab layout 2.Objectives – Understand the design and features of a semiconductor wafer fabrication plant (DeGiorgio) – Know the basics steps in producing a silicon chip (Creighton) – Identify hazards associated with various semiconductor processing equipment (Creighton/Tyrell) – Recognize the compliance and risk issues with installing, operating, maintaining and decommissioning semiconductor processing equipment 3. Course Length 8 hours

SESHA 2017 Symposium — PDC2

Silane Safety

Eugene Ngai

Air Products and Chemicals,Allentown,PA

Silane is an electronic specialty gas that has widespread use in the semiconductor fabrication industry. It has been used in commercial quantities since the mid 1960’s, when the first Integrated Circuit (IC) manufacturers began operations. Within the last 10 years, LCD and PV manufacturing has expanded significantly. In 2008, these manufacturers will use more silane than the IC companies. Recently, significant incidents occurred with the use of silane, highlighting the need to reinforce safe handling procedures. This course will review all aspects of silane handling, bringing together many acknowledged experts to reinforce silane standards and regulations. Topics covered will include: 1. Incidents and Learnings 2. Regulations 3. Safety Standards 4. Bulk Packages 5. Release Testing 6. Risk Assessments 7. Emergency Response 8. System Design. This PDC is sponsored by Air Products. For more information on this PDC, please see the pdf file posted at the following location: http://seshaonline.org/meetings/2008/SESHA%20Silane%20Safety%20Seminar%20Flyer.pdf

SESHA 2017 Symposium — PDC4

Electric Power Consumption in Fabs and Tools: Understand It and Reduce It

McEachern, Alex
(Power Standards Lab)
A practical, hands-on discussion of fab electric power (including power factor, harmonics, and transformer selection) and straightforward ways to reduce losses and improve energy consumption. Rules of thumb for energy in tools, distribution wiring, connections, UPS, and facility supplies (CDA, PCW, etc.). How harmonics affect power losses, and simple low-cost and free solutions. How to select and interpret energy measurement devices. Future tool designs and how they will reduce power consumption. The course will be taught by Alex McEachern, who is known world-wide throughout the semiconductor industry as the ultimate expert on electric power at fabs and in tools. He is the principal author of many SEMI, IEC, and IEEE standards, and has consulted for 30 years at fabs in Asia, Europe, and North America. He is known for his cheerful, practical teaching style with lots photos and stories.

SESHA 2008 Symposium Abstract

Loving Mondays…Only a Dream?

Pollock, Alex
(Dow Chemical)

Sadly for many of us loving Monday’s is only a dream. The good news is that this need not be the case. The conditions found in great workplaces will be shared along with ways we can get them rooting and flourishing where we work. The benefits that come from the alignment of the hearts and minds of our colleagues to the aspirations of our employers will be discussed.

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SESHA 2008 Speaker Biography

Alex Pollock
Director of EH&S Expertise, Dow Chemica

Alex Pollock, director of EH&S Expertise will retire effective June 30, 2008 after 32 years with Dow. Pollock has held a variety of positions in Research and Development, Public Affairs, and EH&S during his career. He joined Dow Canada in 1976 at the Sarnia Site, and was the face and issue manager for the public situation in Sarnia concerning chlorinated solvents in the nearby river (commonly known as “the blob”). Following that highly visible Public Affairs role, Pollock moved to Midland in 1989. In his most recent role, he had responsibility for the Industrial Hygiene, Personal Safety, EH&S Auditing and EH&S Systems Services Expertise Centers. Pollock has been a key leader in the development of the 2005 and 2015 Sustainability goals. He also provided critical leadership for the EH&S function during the Dow/Union Carbide integration. Pollock was the recipient of the distinguished, Dow Genesis Award for excellence in people development in 2006. “Externally and within Dow, Pollock is known for his professionalism, integrity, and passion for the professional development of his colleagues. He is leaving a legacy at Dow of strengthened and more satisfied coworkers, and his contributions to Dow people will remain his hallmark,” says Dana Mathes, corporate director, EH&S for Operations. Pollock obtained a Bachelor of Science in Applied Chemistry from the University of Waterloo in 1976 and a master’s degree in Environmental Engineering from the University of Western Ontario in 1980. He is certified in the practice of Industrial Hygiene by the American Board of Industrial Hygiene and the Canadian Board of Occupational Hygiene and is a Chartered Chemist in the province of Ontario.

SESHA 2008 Symposium Abstract

NFPA400, The New Hazardous Materials Standard

Eugene Ngai
Director of ER and Disposal Technology, Air Products and Chemcials, Allentown, PA

This presentation will summarize the ongoing efforts to develop one comprehensive Hazardous Materials standard by merging the existing NFPA standards. This standard will cover, pyrophoric liquids, water reactive liquids, corrosive, etc as well as incorporate NFPA 55 Industrial and Medical Gases.

SESHA 2008 Speaker Biography

Eugene Ngai
Director of ER and Disposal Technology, Air Products and Chemcials, Allentown, PA

Eugene has a BS in Chemical Engineering and an MS in Environmental Engineering, all from New Jersey Institute of Technology. He has over 30 years of Specialty Gas Experience in Production, Laboratory, R&D, Engineering, Safety positions at Matheson, Exxon Research, Solkatronic Chemicals and Scientific Gas Products. Had increasing management responsibilities during his career and held an Executive Management position as Vice President of Corporate Development and Technology for Solkatronic Chemicals for 10 years prior to the Air Products acquisition in 1999. He had responsibility for EHS, Engineering, Information Technology, Research and Development, and Quality. Most recently he was Director of Compound Semiconductor Technology in the Electronics Division and is now Director of ER and Disposal Technology in the Product Safety Group. He is active in a number of industry associations, Compressed Gas Association (CGA), Asia Industrial Gas Association (AIGA), National Fire Protection Association (NFPA), International Standards Organization (ISO) and the Semiconductor Environmental Health and Safety Association (SESHA)

SESHA 2008 Symposium Abstract

E-Waste Recycling, Rules, Regulations and Resource Conservation:

Ditter, Phillip
(Veolia Environmental Services)

A discussion of the current regulatory status and how the laws and regulations vary from state to state. A look at upcoming rules and how they might impact the recycling of e-waste. A look at some of the barriers and challenges facing the recycling industry. And a discussion of how a generator of e-waste can control future liability, protect intellectual property and still conserve resources.

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SESHA 2008 Speaker Biography

Phillip Ditter, CHMM
Veolia Environmental Services

Mr. Phillip Ditter is currently the Environmental Health and Safety Manager for the Electronics Recycling Branch of Veolia ES Technical Solutions. Mr. Ditter graduated from Silver Lake College with a Bachelor of Science Degree. Mr. Ditter is a Certified Hazardous Materials Manager with over 21 years of experience working with Veolia ES Technical Solutions with the past 7 years as Environmental Health and Safety Manager for the Electronics Recycling Branch. As Environmental Health & Safety Manager, Mr. Ditter is responsible for overseeing the environmental and safety programs for four processing facilities and two transfer facilities. Mr. Ditter has worked with state agencies and on the review and development of universal and hazardous waste rules.

SESHA 2008 Symposium Abstract

Measuring the Energy Consumption of a Semiconductor Processing Tool and Ways to Reduce Costs and Conserve Energy

J. Castile, M.Alaoui, P.Kryska
Measuring the Energy Consumption of a Semiconductor Processing Tool and Ways to Reduce Costs and Conserve Energy

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SESHA 2008 Speaker Biography

Jeremy Castile, Mohamed Alaoui
Electrical Systems Engineer, Novellus Systems, Inc., Tualatin, OR

Jeremy Castile is an electrical systems engineer at Novellus. As part of the Product Safety and Environmental Engineering group, he works on characterizing the energy footprint of Novellus products in an effort to improve energy performance. He is a recent graduate of George Fox University where he received his B.S. in Electrical Engineering. Mohamed Alaoui is currently a Member of Technical Staff at Novellus Systems, responsible for abatements qualifications and energy reduction program. Prior to joining Novellus in 2005, Mohamed was a product manager for 6 years at the Environmental Solutions Product Division at Applied Materials. Mohamed holds a BS from New York Polytechnic University and MS from San Jose State University both in Chemical Engineering.

SESHA 2008 Symposium Abstract

Life Cycle Assessment Approach to Water Conservation

Bates, Wayne; Clark, Daniel
(Analog Devices, Cambridge, MA)

Evaluating opportunities for water conservation is much like conducting a life cycle assessment for a manufactured product. Both procedures require a close review of the system inventory, impacts, and improvements. This paper will provide an overview as to how life cycle assessment techniques can be applied when evaluating water conservation opportunities in the semiconductor manufacturing industry. Water use metrics for the semiconductor industry will be presented and discussed. Building on industry water use metrics and life cycle techniques, several water conservation projects completed at Analog Devices, Inc. will be presented. These success stories will include direct benefits such as, water and cost savings, as well as, indirect benefits such as, increased production, corporate stewardship, and reduced permitting requirements.

SESHA 2008 Speaker Biography

Wayne E. Bates, PhD, PE
Manager, Engineering Group, Analog Devices, Cambridge, MA

Wayne manages the firm’s engineering group and is responsible for industrial and commercial treatment design, permitting, operation and maintenance, and operator training, as well as, the preparation of engineering design reports, specifications and plans. Over his fifteen years of environmental engineering experience, he has assisted clients in managing production assets while minimizing the risks associated with industrial activities through pollution prevention, waste minimization, and design. His doctoral dissertation involved the development of a life cycle assessment screening model for manufactured products, which focused on the cradle-to-grave impacts products have on the environment and socio-economic issues. Wayne is a registered Professional Engineer (P.E.) and holds engineering degrees from the UMass-Dartmouth (BS), Northeastern University (MS), and WPI (PhD). He also holds several licenses in the Commonwealth of Massachusetts including a Grade 4-I and 2-M Wastewater Treatment Operator License and a Grade 2-D Water Distribution System license.

SESHA 2008 Symposium Abstract

Practical EHS Approaches Related To The Use Of Engineered Nano-Scale Materials

McCulloch,Mark
(Hewlett-Packard, Corvallis OR)

Much of what we hear about EHS aspects of nanotechnology focuses on the future, such as unknown health effects of nano-scale materials, the need for more research, and the need for exposure standards. While these issues are important, EHS people tasked with ensuring a safe workplace TODAY are also interested in practical approaches that can be applied immediately. By understanding how these materials are formulated & used, basic EHS / industrial hygiene practices can be applied to the use of engineered nano-scale materials. The company’s EHS values can also address this area of emerging risk, similar to the ALARA principle in radiation safety. This “precautionary principle” is addressed in some of the latest ASTM (American Society for Testing and Materials) standards development work.

SESHA 2008 Speaker Biography

Mark McCulloch CIH
Staff Industrial Hygienist, Hewlett-Packard, Corvallis OR

Mark has been on the Hewlett-Packard EHS staff for 15 years. He is a Certified Industrial Hygienist.

SESHA 2008 Symposium Abstract

Eye Hazards From Light Sources

McCulloch , Mark
(Hewlett-Packard, Corvallis OR)

There are many different types of light sources: visible, invisible, laser, non-laser UV, IR, etc. Risk to the human eye depends on wavelength, power density at the eye, and other factors. The key objectives of this presentation are: (1) Understand how different wavelengths of light affect / interact with the human eye; (2) Understand the basic risk-assessment steps to evaluate exposure potential from various light sources (whether laser sources, or non-laser sources such as UV & IR lamps); (3) Understand some common control measures to protect against these light sources, such as how to specify correct eyewear.

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SESHA 2008 Speaker Biography

Mark McCulloch CIH
Staff Industrial Hygienist, Hewlett-Packard, Corvallis OR

Mark has been an Industrial Hygienist at the HP Corvallis Oregon site for 15 years. He has responsibility for laser & radiation safety at the site.

SESHA 2008 Symposium Abstract

Emerging International Regulatory and Policy Trends

Rallison, Todd; Harper, Stephen
(Intel Corporation)

This paper spots and summarizes key governmental regulatory and policy trends in the environment and energy realms that promise to have a big impact on the high tech industry. Particular focus will be on chemical, energy efficiency, and climate change policy developments.

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SESHA 2008 Speaker Biography

Todd Rallison
CS Counsel, Intel Corporation

Todd Rallison is CS Counsel with Intel Corporation with primary responsibility in the environmental, health and safety (EHS), real estate, construction, and product regulation areas. Prior to joining Intel in 2001, Todd was a shareholder in the Phoenix, Arizona law firm of Gallagher & Kennedy, P.C. and in-house counsel with Arizona Public Service Company and Motorola, Inc.

SESHA 2008 Symposium Abstract

New GWP Values – Affect on the 2010 PFC Emissions Goals

Van Gompel, Joe; Cottle, Steve
(Exhaust Gas Management)

The World Semiconductor Council has set a goal for the semiconductor idustry to reduce fluorocarbon (FC) emissions by 10% based on kg carbon based 1995 emissions. The original strategies devised by fabs were based on global warming potentials (GWPs) for individual FCs that were released by the IPCC in their Second Assessment Report in 1996. Some of the GWP factors have changed dramatically in the Third Assessment Report in 2001, most notably CHF3 (23% increase), CF4 (30% increase), and NF3 (115% increase). The Fourth Assessment Report (November 2007) will have more changes. The semiconductor industry has seen a dramatic shift to NF3 in chamber cleaning steps from C2F6. Even though it is a potent global warming gas in itself, NF3 is also very well utilized in the process chamber and realizes a net decrease in global warming emissions over C2F6. However, the higher GWP values of CHF3 and CF4 put added emphasis on the impact of etch processes on the global warming emissions of a fab. This presentation will present some scenarios and examine the effect of the different GWPs on simulated fab emissions.

SESHA 2008 Speaker Biography

Joe Van Gompel
Senior Poduct Specialist, Exhaust Management, Exhaust Gas Management

Dr. Joe Van Gompel is a Senior Product Specialist for Exhaust Management Systems at Edwards. He is based in Austin, Texas. Joe is a technical interface for his customers with Edwards, writes and presents papers, does training courses and seminars, reviews and approves scrubbers for new applications, and investigates “events” associated with scrubbers and abatement. Joe is very active with SESHA as well as related semiconductor and compound semiconductor safety issues. Steve Cottle received his BSc in Chemistry at Bristol University and joined Edwards in 1992 as a chemist developing exhaust management solutions for the semiconductor industry. Followed by a period working in the Edwards sales force, Steve is currently the Senior Applications Specialist responsible for marketing of exhaust management systems to Europe and the global OEMs.

SESHA 2008 Symposium Abstract

Sustainability and the EHS Professional

Klafter, Bruce
(Applied Materials)

While some definitions of “sustainability” are considerably broader than environmental responsibility, the EHS professional has a key role to play in advancing corporate sustainability initiatives. Seasoned EHS professionals are already well versed in the many “beyond compliance” initiatives that form the core of some sustainability programs, e.g. ISO 14001, recycling and waste minimization and design for environment. Repositioning or rebranding EHS programs as part of a larger sustainability initiative can bring added support to traditional EHS programs. This address will explore how and why EHS professionals should integrate sustainability into their short and long-term plans, including the types of skills and information EHS professionals should acquire in order to be successful in this growing practice area.

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SESHA 2008 Speaker Biography

Bruce S. Klafter
Sr. Director, Environmental, Health and Safety , Applied Materials

Bruce Klafter is Sr. Director, Environmental, Health and Safety (EHS) for Applied Materials, Inc. in Santa Clara, California. Bruce also serves as Head, Corporate Responsibility and Sustainability for the company. Bruce heads up Applied’s EHS department, which is responsible for assisting business units worldwide with compliance, industrial hygiene, product safety and various strategic initiatives. The Corporate Responsibility and Sustainability role encompasses a wide variety of reporting, employee engagement and other projects aimed at enhancing Applied’s global citizenship programs. Before assuming his current role, Bruce was EHS counsel for the Company. Prior to joining Applied in August, 2000, Bruce was Chair of the Environmental Group at Orrick, Herrington & Sutcliffe LLP (a top 100 U.S. law firm) in San Francisco. Bruce began his career in 1980 as a Deputy Attorney General for the State of California. For more information about Applied Materials, see http://www.appliedmaterials.com/ Bruce is a past Chair of the Association of Corporate Counsel America’s (ACC-A) national Environmental Committee as well as a past chair of the State Bar of California’s Environmental Law Section and the Bar Association of San Francisco’s Environmental Committee. Bruce presently serves as an Advisory Council member for Sustainable Silicon Valley. Bruce received his JD from the University of California-Davis School of Law in 1980 and served as an Editor of the UC-Davis Law Journal and as Editor of Environs (a publication of the Environmental Law Society). He earned a B.S. magna cum laude in Urban and Environmental Planning (interdisciplinary) from Tufts University in 1976.

SESHA 2008 Speaker Biography

Wayne E. Bates, PhD, PE
Manager, Engineering Group, Analog Devices, Cambridge, MA

Wayne manages the firm’s engineering group and is responsible for industrial and commercial treatment design, permitting, operation and maintenance, and operator training, as well as, the preparation of engineering design reports, specifications and plans. Over his fifteen years of environmental engineering experience, he has assisted clients in managing production assets while minimizing the risks associated with industrial activities through pollution prevention, waste minimization, and design. His doctoral dissertation involved the development of a life cycle assessment screening model for manufactured products, which focused on the cradle-to-grave impacts products have on the environment and socio-economic issues. Wayne is a registered Professional Engineer (P.E.) and holds engineering degrees from the UMass-Dartmouth (BS), Northeastern University (MS), and WPI (PhD). He also holds several licenses in the Commonwealth of Massachusetts including a Grade 4-I and 2-M Wastewater Treatment Operator License and a Grade 2-D Water Distribution System license.

SESHA 2008 Symposium Abstract

Sustainable Wafer Fabs – LEEDing the Way

Hill,Russell
(Texas Instruments, Dallas, TX)

In 2003, Texas Instruments began planning and designing its Richardson fab (RFAB) using the LEED (Leadership in Energy and Environmental Design) Green Building Rating System, which is a voluntary, consensus-based national standard for developing high-performance, sustainable buildings. LEED emphasizes five categories in its holistic approach to design: site selection, water efficiency, energy and atmosphere, materials and resources, and indoor environmental quality. RFAB significantly reduces energy and water use, and it cost 30 percent less to build than traditional facilities. The reduction in utility expenses means lower operating costs for the facility – approximately 20 percent less than a traditional facility would pay each year. Design challenges included energy modeling, working with vendors on source load reduction, and taking advantage of mini-environments for air filter coverage and personnel smocking reductions. RFAB’s mechanical systems include a split chiller plant, spray humidification, and heat recovery on the chillers. Optimizing their individual designs significantly reduced the number of boilers needed and their associated emissions. TI is also examining LEED-EB (LEED for existing buildings) to help improve the sustainability of its existing sites.

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SESHA 2008 Speaker Biography

Russell Hill
Environmental Specialist, Texas Instruments, Dallas, TX

Russell Hill graduated from the University of Nebraska-Lincoln with a B.S. in chemical engineering, with a subsequent master’s degree in Hazardous Waste and Materials Management from Southern Methodist University. He began his career at Texas Instruments as a process engineer, first in circuit board assembly, then in metal finishing processes. Russell is currently an environmental specialist working in TI’s first 300 mm wafer fab.

SESHA 2008 Symposium Abstract

The Applied Materials Program to Reduce Product Environmental Impact

Hughes, Stan
(Applied Materials)

This presentation describes Applied Materials’ program for reducing the environmental impact of its products by means of policies, design processes, development of low-impact sub-systems, training programs, and supplier involvement. The program’s targets are consistent with the company’s goal of reducing its own environmental footprint. The program includes the development of a quantitative model of the environmental impact of semiconductor manufacturing equipment. The characterization and reduction of product energy consumption is achieved through a program based on the SEMI S23-0705 guideline, which Applied Materials has extended to the company’s products used outside the semiconductor manufacturing arena. The integration of this program into a Product Life Cycle (PLC) process is discussed, including how market needs, engineering specifications, design, and planning for the future are addressed. The format for reporting characterization results, including the electrical data required by SEMATECH document #00043939A-ENG, is described.

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SESHA 2008 Speaker Biography

Stan Hughes
Senior Manager, Global Product Safety, Applied Materials

Stan Hughes is a Product Safety Manager at Applied Materials. He has over 27 years of product safety experience. He holds a PhD Industrial Engineering from the University of Massachusetts.

SESHA 2008 Symposium Abstract

Driving a Total EHS Culture

Lewman, Michael
(Applied Materials)

Developing a sustainable ESH culture has become more than just the latest enterprise jargon, it is now recognized as essential for ESH performance, and ultimately one measure of the overall health of the company. This presentation covers the current effort well underway at Applied Materials which integrates ESH into existing management systems and leverages the company EMS to make ESH a way of doing every day business. The net goal is to make ESH a “good habit”, “tops down and bottoms up” and winning over the “hearts and minds” of the greater employee base.

SESHA 2008 Speaker Biography

Michael Lewman
Manager EHS Compliance, Applied Materials

Mike has held ESH positions in several companies in Silicon Valley for the last 20 years. Most recently he manages compliance for Applied Materials Santa Clara operations.

SESHA 2008 Symposium Abstract

Why World Class EH&S Compliance Does not Need to Cost a Fortune

Beckel, Michael
(3E Company, Carlsbad, CA)

Most organizations do not have a comprehensive EH&S compliance plan in place, leaving them exposed to fines, or worse, not being prepared in the event of a spill or an emergency. Managing the information around their EH&S hazmat information is a critical aspect of any safety department. Companies need to be able to diagnose their Hazmat compliance information and requirements, to determine any shortcomings, and then determine how they will address them. Having the foundation of a good inventory of hazmat information will also ensure the safety and well-being of employees. This talk proposes to address – how to conduct an on-site assessment of hazmat compliance information; – the direct and indirect (often hidden) costs associated with compliance related tasks and omissions; and – the marshalling of resources to meet these challenges. The talk will present a series of analyses and tasks that need to be performed in order to face the challenges of hazmat compliance in a systematic manner. The talk will then discuss the many options organizations have in order to successfully manage hazmat data in the most cost-effective manner.

SESHA 2008 Speaker Biography

Michael Beckel
Director of product management, 3E Company, Carlsbad, CA

Mr. Beckel joined 3E Company in 1999, continuing a 19 year career in environmental science and safety management that included 10 years of practical experience managing the EHS programs of laboratory and manufacturing firms. Mr. Beckel is well versed in the development and implementation of employee safety and environmental compliance programs, is a professional trainer with extensive experience, and has published several technical articles in national EHS publications. Mr. Beckel is responsible for all hazardous materials inventory, training, and consulting services performed by 3E Company.

SESHA 2008 Symposium Abstract

eLearning and its Role in Semiconductor Safety Training

Austin, Shane; Reeves, Robert
(PureWorks, Inc. d/b/a PureSafety)

Each day, workers in the semiconductor industry encounter unique safety hazards, such as process and maintenance chemical exposures, radiation and other forms of hazardous energies. Delivering training on these and other important ESH topics can be a daunting task. Fluctuating headcounts, multiple facility locations, shift work and erratic travel schedules make it seemingly impossible to provide the consistent, high-quality training that your workforce deserves. Fortunately, today’s technology provides more training options than ever before. Gone are the days of taking large groups of people off-task so that they can be shuffled into a room to listen (or maybe not) to a speaker quickly address the do’s and don’ts of safety. Today’s industry professionals are looking for solutions that help them simplify and streamline training activities, while providing a high level of flexibility in a blended learning environment. This session will focus on how to deliver top-tier ESH training designed specifically for the semiconductor industry leveraging the Internet to save time and money, and meet compliance and learning objectives. This session will be presented by a Certified Safety Professional from PureSafety, a leading provider of online safety training and risk management software solutions, who is an expert in both training technology and worker safety. This session will: — Cover the benefits of implementing an eLearning solution in a semiconductor fabrication environment — Discuss eLearning and its role in a “blended” learning environment — Demonstrate how the specifics of a semiconductor environment can easily be incorporated into web-based training solutions — Share real-life customer success stories from organizations that have achieved bottom line business benefits since implementing eLearning

SESHA 2008 Speaker Biography

Shane Austin, CSP CSP, Director – Safety & Risk Management, PureWorks, Inc. d/b/a PureSafety

Mr. Austin is a Certified Safety Professional (CSP) and has over 13 years of industry experience in manufacturing, food service/distribution, and general industry safety. Most recently, Mr. Austin was the Nashville Operations Manager at PSC Safety & Health Services, Inc, a professional safety & health consulting firm that assists industrial and government facilities. Prior to PSC, Mr. Austin was the Safety, Health & Environmental Manager at Square D Company for over four years. Mr. Austin received his Masters of Business Association from Lipscomb University and his Bachelor of Science in Industrial Hygiene & Chemistry from the University of North Alabama

SESHA 2008 Symposium Abstract

Leveraging (M)SDS Content for Global Chemical Management

Kawar, Kal ; VanKeulen, Aad
(Actio, Portsmouth, NH and Atrion, Montreal, Canada)

This case study shows how the use of a relational database to house MSDS content facilitates the production of GHS compliant MSDS including the extended SDS with attached exposure scenarios. MSDS data can be further leveraged for a variety of regulatory reporting purposes as well as to screen and identify substances that require pre-registration under REACH or tracking under RoHS and WEEE. Computer technology is the only way to assemble, organize and unlock all of the secrets of your chemical footprint. The first step in this process is to have all raw material M(SDS) entered into a relational database. The more granular the database the better, but at the very least, the database fields should include: manufacturer, substance/component name, CAS number, percentage of component and location. More elaborate architectures have all of the M(SDS) data entered into unique, separate fields enabling sophisticated reports to analyze ranges of information: flash points, boiling points or UELs and to use this data to feed M(SDS) authoring systems. Planning for GHS requires an analysis of target markets. If your concern is the United States, then having all of your raw material M(SDS) in a relational database will speed up employee training and assist in authoring new M(SDS) by feeding data required to properly classify the hazards associated with the material. If you are authoring MSDS for Europe, you will need to have substance level information that can be used to build an Extended SDS, one that supports GHS but also includes exposure scenarios for product use, this is required under REACH. Whether you develop an in-house system or choose a third party provider, accurate raw material information can be leveraged for multiple purposes including: GHS M(SDS) creation; REACH substance identification; identifying materials of concern; and being able to rapidly respond to changes in the global regulatory environment.

SESHA 2008 Speaker Biography

Kal Kawar Executive Vice President, Actio, Portsmouth, NH and Atrion, Montreal, Canada

Kal Kawar, co-founder of Actio Corporation has 20 years of chemical engineering, industrial hygiene and environmental engineering experience. Kal’s specialization includes SEMI S2 compliance, radiation investigation, investigations in indoor air quality, compliance air sampling, ergonomics, asbestos, lead based paint, ventilation, noise and related audits for industrial managed health and safety. A former Industrial Hygiene Program Manager for IBM Corporation, Kal established the infrastructure for developing IBM’s industrial hygiene programs consistent with corporate safety and health policy. Kal’s experience with IBM includes serving as Staff Industrial Hygienist for IBM’s New York semiconductor manufacturing facility and also as Industrial Hygienist for their U.S. headquarters, where he managed the U.S. Field Asbestos program and participated in the management and implementation of field real estate safety and health programs. Kal has a BS in Chemical Engineering from Northeastern University and a MS in Industrial Hygiene from the University of Pittsburgh. He has published and presented before the American Institute of Chemical Engineers.

SESHA 2008 Symposium Abstract

Is Your Company Prepared for EICC: The Electronic Industry Code of Conduct?

Leet, Bob; Bennett, Brad
(Intel, Hillsboro, OR (for both authors))

The pressure to be “good corporate citizens” has increased dramatically over the past decade. Since the mid nineties, companies have been publicly identified and criticized for their supplier’s deficiencies. The natural reaction by a company under “attack” is to go into a “reactive” mode by addressing the specific allegations from their critics. A fundamental problem exists in that these critics: shareholders, social investment fund managers, non-government organizations, and the media often have differing corporate responsibility objectives and expectations. In reactive mode, often more time is spent producing data to satisfy these stakeholders, than is spent implementing effective and efficient policy, programs, and systems. Electronics companies and their suppliers that take the opportunity now, while it still exists, can be prepared for the ever-increasing corporate responsibility performance scrutiny that these socially-responsible external parties are demanding. Some of the largest companies in the electronics industry have formed a coalition to develop a common approach to policy, program and systems to manage suppliers to a common code of conduct. This coalition is formally known as the Electronics Industry Code of Conduct coalition, or as it is commonly referred to, the EICC coalition. This presentation will provide an update on where the EICC coalition is in their effort to introduce the common approach – tools, methods and systems. It will then review some of the highlights of the common code of conduct, and provide a status update on the industry’s Joint Auditing activities. Lastly, it will focus in on the process and what is expected of companies when they are audited to the EICC’s ‘code’. This paper will highlight to electronic industry suppliers how they will know if they are prepared for EICC, and how they might gain from aligning with the existing network of companies within the EICC coalition.

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SESHA 2008 Speaker Biography

Bob Leet
Sr. Materials Engineer, Intel, Hillsboro, OR (for both authors)

Bob has a BS and MS in chemical engineering from Arizona State University. Working for Intel for ~13 years, he has an EHS role within Intel’s procurement organization, and resides in Hillsboro, OR. He is a Materials and EHS business process and systems integration specialist, the Intel program manager and industry rep. for the PFOS Replacement program, the Intel rep to the EICC (Electronic Industry Code of Conduct) industry coalition’s Joint Audit & Extractives’ Working Groups, and is an internal TSCA regulatory specialist. He is the holder of 4 patents, with 3 patents pending in the fields of semiconductor devices, lithography and waste treatment systems.

SESHA 2008 Symposium Abstract

Moving towards and beyond carbon neutrality: Greenhouse Gas Emissions Trading for the Electronics Industry

Raoux, Sebastien
(Transcarbon International Corporation)

Climate change has become one of the most challenging problems facing humanity in the 21st century. The electronics industry can play a key role in being part of the solution by designing energy-efficient products, and implementing manufacturing processes with reduced carbon footprints. In the last ten years, the industry has made great progress in reducing the climate impact of manufacturing integrated circuits, in particular through reduction of fluorinated compounds (FCs) emissions, which are used for Etch and CVD chamber cleaning processes. In the first part of this presentation, we review the industry’s progress over the last decade in implementing manufacturing processes with lower carbon footprint. We identify the various sources of direct and indirect emissions of greenhouse gases (GHGs) in a typical Fab, and provide an overview of the technical solutions available for climate impact reduction. After providing a summary of the current state of affairs regarding FC emissions, we turn to the next decade and examine potential opportunities to further reduce the carbon footprint of Fabs, in particular through emissions trading schemes. Greenhouse gases emissions trading mechanisms are key components of nearly all legal regimes addressing climate change. The implementation of the Kyoto Protocol, the European Trading Scheme (ETS) and other legally-binding or voluntary agreements to reduce emissions of greenhouse gases has led to the development of a vibrant GHG emissions trading market, which is estimated to have reached 62 to 70 billion US$ in 2007. The electronics industry can participate in -and benefit from- this market, by reducing GHGs emissions from Fabs and sell carbon credits to other industries (where the cost-per-ton-CO2-equivalent-saved is higher). Through such mechanism, Fabs can fund implementation of emissions reduction technologies, generate additional revenues and contribute to tackling climate change. In the last part of the presentation, we will review the requirements for emissions trading, in particular related to the additionality of projects geared at reducing emissions of fluorinated compounds. Additionality is one the main requirements for participating in emission trading projects, requiring project proponents to demonstrate that the emission reduction would not have occurred in the absence of the project, under a business-as-usual scenario. After examining the additionality of various existing technical solutions, we review the barriers to implementation, and present the principles of the first proposed emissions trading methodology developed specifically for the electronics industry (SF6 abatement from LCD panels manufacturing).

SESHA 2008 Speaker Biography

Sebastien Raoux, Ph.D.
President & CEO, Transcarbon International Corporation

Dr. Raoux is the inventor of 20 patents, the author of 30 articles in technical journals and has presented over 100 communications at international conferences. His areas of expertise include environmental technologies, environmental impact valuation, design for sustainability, as well as environmental strategies and management systems. Prior to founding Transcarbon International, Dr. Raoux was a Distinguished Member of Technical Staff and the Director of Technology for Ecosys, a division of Applied Materials and a leading provider of environmental abatement systems and services to the electronics industry. Prior to his 12 years career at Applied Materials, Dr. Raoux was a postdoctoral fellow at the Lawrence Berkeley National Laboratory. Dr. Raoux has also lectured at numerous universities including UC Berkeley, Stanford, the Presidio School of Management and the universities of Orléans and Bordeaux. Dr. Raoux was a contributing author of the 2006 IPCC guidelines for national greenhouse gas inventories for the electronics industry. Dr. Raoux also served as a member of the executive technical committee on environmental health and safety for SEMI, and he was secretary of the AVS division on Technology for Sustainability. In 1999, Dr. Raoux was the recipient of an R&D 100 Award for the development of the Remote CleanTM. He also received, on behalf of Applied Materials, the Climate Protection Award from the US EPA for environmental leadership in the semiconductor industry. Sébastien Raoux received an MS in Electrical Engineering and a Ph.D. in Physics from the University of Bordeaux, France. He is currently completing a Juris Doctor degree at the University of Santa Clara School of Law where he specializes in International Environmental Law and Policy.

SESHA 2008 Symposium Abstract

The 2006 and 2007 Buidling, Fire and Mechanical Codes

Hanselka, Reinhard
(IES, Santa Clara, CA)

This presentation will deal with the “Law of the Land”. California has reentered the International Code Process. This has had a major Global effect on the Codes throughout the country. All of North America is now under the same Code Umbrella. This presentation will give attendees an overview of developement activities. Dis cussions and Illustrated examples of actual facility issues. We will also trancend into the future and discuss Codes and Standards to the year 2010.

SESHA 2008 Speaker Biography

Reinhard Hanselka
Chemical Engineer, IES, Santa Clara, CA

Same as the last two years

SESHA 2008 Symposium Abstract

Energy Efficiency Improvement for Air Coils in the Microelectronics Industries

Jenkins, Brian; Carroll, Barry ; Clarke, Stephen
(Nalco Company, Naperville, IL)

The coils in air handlers are the primary heat transfer interface between the air inside the fab (semiconductor fabrication facility), and the HVAC (heating, ventilation and air conditioning) system. Air temperature and relative humidity control inside the fab is essential to ensure a consistent manufacturing environment. Inconsistent control of the manufacturing environment puts production quality in jeopardy. The air handlers are also a large consumer of energy in the fab. Ensuring optimum energy efficiency of these systems also helps fabs control their total operating costs, keeps fabs competitive, and reduces the fabs’ carbon footprint. Getting and keeping air coils clean can be challenging and are tasks that often fall off a fab’s priority list. Commonly encountered challenges include staffing sufficient personnel to tackle the task; using improper cleaning products that may damage the air coil fins; excessive pressure from the coil cleaning equipment that also damages the fins; insufficient penetration of the air coil bank, resulting in an ineffective cleaning; and poor or non-existent measurement and documentation of improvement of energy efficiency. A new air coil cleaning and efficiency measurement / documentation package has been developed which provides a safe, effective cleaning process as well as thorough energy savings data capture. Before and after photos and ROI calculation based on energy savings and reduction in CO2 production are presented.

SESHA 2008 Speaker Biography

Brian V Jenkins
Global Industry Development Mgr., Microelectronics, Nalco Company, Naperville, IL

Brian’s current position at Nalco is Global Industry Development Manager for Microelectronics. He has been with Nalco for over 29 years, in a variety of technical sales and marketing positions including Marketing Manager of Nalco’s South African operations, District Manager in Northern California and Senior Product Manager in Cooling Water. He has published in several technical forums including the International District Energy Association, National Association of Corrosion Engineers, the International Water Conference, Ultra Pure Water, the CMP Users Group, Semiconductor International, and Semiconductor Fabtech. He has six patents issued, and two more in filing. This is his second paper for SESHA.

SESHA 2008 Symposium Abstract

A New Parts Cleaning Process for Porous Materials Used In Semiconductor Manufacturing Equipment

Makin, John; Fritz , Rob
(Ebara Technologies Inc , Sacramento, CA)

Semiconductor and microelectronics manufacturing companies are exploring ways to minimize the hazardous waste generated, decrease consumable usage while implementing cost saving measures. ThermaGas® is a revolutionary parts cleaning process developed by ASC²T (Advanced Semiconductor Cleaning Technology) that replaces the current industry wide practice of bead-blasting and/or chemical etching of ceramic, graphite and porous type parts to remove contamination so they may be re-used in various production tools. The process utilizes a new “Dry” technology that incorporates reactive gases, temperature and vacuum technologies to remove the contamination while producing a small fraction of the waste generated by today’s standard practices of cleaning or disposal. Not only does this process reduce the magnitude of the waste stream, it also is a non-contact technology that does not mechanically deform the parts like bead-blasting and chemical etching leading to many more recycling turns for each part. The new processing technology also allows the cleaning of previously un-cleanable parts either due to economic justification or the sensitivity of the parts to the current cleaning processes. Typical area of productions in which parts can use this technology include: Ion-Implant, EPI, CVD, PVD, RF & IR thermal, Molecular Beam Epitaxy, Flat Panel Display, Solar Cell Panel fabrication, Etch, Si Nitride, MOCVD, MBE, SIMOX, as well as other processes.

SESHA 2008 Speaker Biography

John Makin
Product & Strategic Marketing Manager, Ebara Technologies Inc , Sacramento, CA

John Makin is the Product & Strategic Marketing Manager for Ebara Technologies. John has a BS in Chemical Engineering from Northeastern University. John has had multiple positions at Ebara in applications, technical support and marketing. John has also worked at Centrotherm Technologies in sales & marketing.

SESHA 2008 Symposium Abstract

REACH Roundtable

Beu, Laurie; Speranza, Dawn; Majors, Mary
(Laurie S. Beu Consulting, Austin, TX; Intel Corporation, Albuquerque, NM; Air Products & Chemicals, Carlsbad, CA)

REACH Roundtable Laurie Beu, Consultant for ISMI Laurie S. Beu Consulting, Austin, TX Dawn Speranza Intel Corporation, Albuquerque, NM Mary Majors Air Products & Chemicals, Inc. Carlsbad, CA The European Union’s REACH (Registration, Evaluation and Authorization of Chemicals) regulation fundamentally changes the way that chemicals are regulated and used in the European Union. REACH places greater responsibility on all actors in the supply chain and, for the first time, requires upstream communications from the downstream users of chemicals (e.g., the electronics and IC manufacturers) to their suppliers. REACH requires that all new and existing substances manufactured or imported in quantities greater than 1 ton per year be registered. Registration is phased in over time depending on quantity and hazard. REACH also requires enhanced Safety Data Sheets for all substances and authorization for any quantity of substances of very high concern (SVHC). In addition to registration, REACH drives many other chemical regulatory topics such as basic MSDSs, authority notifications, label and packaging design. REACH has the potential to disrupt the supply chain, affecting the availability of critical manufacturing chemicals. This supply chain is related not only to process chemicals, but also the chemicals that may be required for equipment installation, maintenance and service.

SESHA 2008 Speaker Biography

Laurie Beu
Principal, Laurie S. Beu Consulting, Austin, TX

Laurie Beu is a consultant in the area of environmental policy, strategy and management. Ms Beu has extensive experience as an environmental professional including environmental program development and compliance management, integration of environmental solutions into manufacturing process development, and industry benchmarking. She has formulated company and industry environmental strategies, and has served as an industry representative in environmental policy negotiations with suppliers and government agencies. Ms Beu is a Lead Author on the United Nations Intergovernmental Panel on Climate Change (co-winner of the 2007 Nobel Peace Prize), developing estimating guidelines for electronics industry greenhouse gas emissions. She also serves on the technical working group responsible for developing the ESH portion of the International Technology Roadmap for Semiconductors. Ms Beu is a Registered Professional Engineer in Texas. Prior to starting her consulting business, she worked in the semiconductor industry for 22 years, employed by Motorola and Advanced Micro Devices. Dawn E. Speranza has held various positions if the EHS field and is currently the REACH program manager for the Intel Global Fab Materials EHS organization. Prior to this, Dawn was on assignment at International SEMATECH where she project managed various global chemical initiatives and ESH assessments of new materials and processes for the advanced technologies. She also worked at the Intel Hudson facility in Construction Safety, Mergers and Acquisitions, Industrial Hygiene and Occupational Safety. She has a B.S. degree from Tulane University and a M.S. degree from the University of Massachusetts at Amherst. Dawn is a certified Industrial Hygienist and Safety Professional. Dawn currently holds the position of president elect on the SESHA Board of Directors. Dawn enjoys the outdoors by skiing, camping, hiking, fishing, and snorkeling. Mary Majors is a Principal Safety Specialist in the Product Safety department of Air Products and Chemicals, Inc. She has over twenty years of experience in the chemical industry in both commercial and EH&S functions. Mary is on the Board of Directors of the Semiconductor Environmental Safety and Health Association, is a member of the American Chemistry Council’s Nanotechnology Panel, the Society for Chemical Hazard Communication, and participated on the 2005 ITRS Working Group for Environmental, Safety and Health. Mary has presented at various semiconductor industry conferences on product stewardship topics. Mary received a B.S. in Medical Technology from Fitchburg State College.

SESHA 2008 Symposium Abstract

The Health Implications of an Aging Workforce and What It Means to the Semiconductor Industry

Blink, Robert
(American College of Occupational and Environmental Medicine, Western Occupational and Environmental Medicine Association)

The number of workers 55 or older will increase almost 50 percent between 1998 and 2008, while those between 25 and 54 will increase only 5.5 percent. Physiological changes associated with aging that are likely to directly impact upon worker productivity include decreases in: –Sensory functions (auditory and visual); –Motor functions (musculoskeletal strength and endurance, reaction time); –Cardiorespiratory functions (aerobic power). As the worker population gets older, safety and personnel challenges arise due to both natural aging and the cumulative effects of medical problems. These physiologic changes increase risks of injury from ergonomic/ mechanical, chemical and other hazards. Productivity will be further impacted because of a greater disease burden affecting the workforce. In addition, although employees aged over 45 have accidents less frequently, when they do occur they are more severe and take longer to recover. A discussion is presented on the most important bodily systems affected and how these issues can be handled in a way that minimizes risk while maximizing productivity and protecting the legitimate interests of employers and employees alike. Participants in the Session will: –Learn to list the emergence of common health disorders that are increasingly prevalent with age –What wellness strategies to deploy to target this population –When and how to accommodate health issues for the older key employee –Learn how targeted health interventions can de-escalate work-related injuries

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SESHA 2008 Speaker Biography

Robert Blink
Vice President, American College of Occupational and Environmental Medicine, Western Occupational and Environmental Medicine Association

Dr. Robert C. Blink has 28 years experience in the practice of medicine and is currently medical director and vice president of WorkCare, Inc. After undergraduate study in biology at Northwestern University, he attended medical school at the University of Wisconsin. Following postgraduate surgical training in Dallas, TX, he attended the University of California – Berkeley where he received his MPH in Environmental Health Science. He is a diplomate of the American Board of Preventive Medicine, Board Certified in Occupational and Environmental Health. As a principal with WorkCare, Dr. Blink is responsible for providing clients nationwide a full menu of occupational and environmental health services including absence management, injury prevention and care, medical surveillance and health promotion.

SESHA 2008 Symposium Abstract

Non-Office Ergonomic Evaluations for Applied Materials Customer Engineers

Ratliff, John
(Applied Materials, Inc.)

Non-office ergonomic hazards constitute one of the top safety issues that our industry faces. This talk will discuss several ergonomics issues we have encountered, their evaluation, and measures taken to interveine to make these tasks less hazardous. In some cases, the hazards themselves remain, and tools needed were designed to reduce these hazards. The use of the Humantech Risk Priority Management database will also be discussed, as will a spreadsheet developed to automatically calculate the NIOSH Lifting Equation.

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SESHA 2008 Speaker Biography

John C. Ratliff, CIH, CSP
Industrial Hygienist, Applied Materials, Inc.

John Ratliff has worked in a number of industries as a safety professional since 1978. Ten years ago, John began working in the semiconductor industry with Applied Materials, Inc. John has been a Certified Safety Professional since 1985, and a Certified Industrial Hygienist since 2006. Ergonomics has been one of his interests for many years. John gave a presentation on the NIOSH Lifting Equation in 1990 to the ASSE Professional Development Conference in Washington D.C., and has continued to develop his Excel spreadsheet for the semiconductor industry.

SESHA 2008 Symposium Abstract

The Importance of Environmental Footprint definition and Life Cycle Assessments to your Sustainability Strategy

Reichelt, Ted
(Intel, Hillsboro, OR)

The Importance of Environmental Footprint definition and Life Cycle Assessemtns to your Sustainability Strategy Going beyond clean production is the concept of sustainability. While several definitions of sustainability exist, emphasis is commonly placed on the triple bottom line of environmental, economic and social impacts. Indeed, the proliferation of corporate sustainability indexes such as the Dow Jones Sustainability Index, illustrates the growing influence of environmental and social performance on a company’s reputation. As such, setting and meeting high standards for responsible business practices and environmental performance along with increasing shareholder value are among Intel’s top priorities. Intel has published extensively on its economic performance and social initiatives. Therefore, those two areas are not included this paper. Rather, the focus of this paper is on Intel’s Environmental Sustainability strategy: Sustainable Processes, Sustainable Buildings and Sustainable Products. The purpose is to provide an overview of Intel’s strategy and key initiatives. The paper will provide a focus on the importance of clearly defining environmental footprint along with identifying opportunities for future research and collaboration – especially in the area of Life Cycle Assessments (LCA) – to allow better decisions in optimizing the entire footprint.

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SESHA 2008 Speaker Biography

Theodore (Ted) Reichelt
Principal Engineer, Intel, Hillsboro, OR

Ted has more than 25 years of experience in facilities planning, energy management and environmental engineering. He has had a variety of engineering and management roles with Deere & Co., Puget Energy, and Intel Corp. The last 20 years have been with Intel in nearly all aspects of environmental engineering with a particular focus on international initiatives and business activities. He is a principal engineer and sustainability strategies manager in Intel’s Global Environmental Group. His focus is on product stewardship business strategies and regulatory development, green buildings, climate change strategy, and sustainable development regulations and policy in China. Current work in China includes working with officials on new product stewardship standards, circular economy policy, and national environmental regulations for semiconductor manufacturing. Ted has a B. S. in Industrial Engineering from Montana State University, graduate work in Architecture/ Environmental Design at Arizona State University, MBA studies at Idaho State University, and graduate work in Environmental Engineering at the University of Washington.

SESHA 2008 Symposium Abstract

Managing Environmental Compliance Challenges in R&D Facilities

Schiller, Dina; Botic, Steven; Dinh, Phong
(Applied Materials, Santa Clara, CA)

The Environmental Health and Safety (EH&S) professionals of a semiconductor research and development (R&D) facility are continuously faced with the challenges of managing increasing hazardous substances in R&D processes as well as the ever-changing regulatory requirements. Applied Materials EH&S is implementing comprehensive measures to address these challenges and ensure workers’ safety, regulatory compliance, environmental protection and business operations continuity. This paper discusses our robust approach to increase the effectiveness and efficiency of various environmental programs such as hazardous materials and waste handling and storage, exhaust management, air emission inventory, spill management, tiered permitting, industrial wastewater treatment systems, and stormwater pollution prevention. This paper also provides guidance on how to achieve environmental compliance through an environmental management system, compliance calendar, management of change program, and self-auditing.

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SESHA 2008 Speaker Biography

Dina C. Schiller
Senior Environmental Engineer, Applied Materials, Santa Clara, CA

Dina works as a Senior Environmental Engineer in Applied Materials, and serves as the Environmental Group Leader in Santa Clara Region. She has more than 10 years of EH&S experience in semiconductor industry, government sector, consulting and academe. Dina holds a Bachelor of Science degree in Chemical Engineering (Cum Laude) and a Master of Science degree in Environmental Engineering. She is a licensed Professional Engineer (Chemical PE), a Board Certified Safety Professional (CSP), and a Registered Environmental Assessor (REA). She\\\’s also an active member of the Chemical PE Exam Committee of the National Council of Examiners for Engineering and Surveying (NCEES). Dina has successfully presented in the past two SESHA Conferences.

SESHA 2008 Symposium Abstract

Safe Handling of Nanoscale Particulate Matter in R&D Environments

Kelly, Rick
(Lawrence Berkeley National Laboratory, Berkeley, CA)

The potential toxicity of engineered nanoscale particulate matter is is still largely unknown, although limited data suggest that some nanoscale materials may be more toxic that microscale materials of the same composition. First generation nanoparticles are already appearing in commercial products aimed at consumers such as sunscreens, sporting equipment and clothing. Second and third generation nanomaterials, many with intended biological activity, are being developed in R&D labs around the world. EH&S personnel are often called upon to establish safe handling procedures for nanoscale work in R&D environments, despite the paucity of guidance or data on toxicity, air sampling procedures, exposure limits and efficacy of exposure control strategies. The five Department of Energy-sponsored Nanoscale Science Research Centers have developed a best practices guide for managing the safety of nanomaterials that has been adopted by many organizations outside of the DOE. Policy is proposed for minimizing exposure, evaluating exposure potential, filtering exhaust air, managing wastes, storing materials and medical surveillance.More information to follow.

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SESHA 2008 Speaker Biography

Rick Kelly
Facility and Environment, Health and Safety Mgr, Lawrence Berkeley National Laboratory, Berkeley, CA

Rick Kelly is the Facility and Environment, Health and Safety Manager for the Materials Sciences Division at the Lawrence Berkeley National Laboratory in Berkeley California. Rick and his staff recently managed the transition to operation of the Molecular Foundry, one of the five Department of Energy Nanoscale Science Research Centers (NSRCs). He is Chair of the DOE ES&H committee that developed comprehensive guidance for the safe handling of nanoscale materials of uncertain toxicity. Rick is certified in the comprehensive practice of industrial hygiene and has a Masters Degree in Industrial Hygiene from the University of Cincinnati.

SESHA 2008 Symposium Abstract

Nanotechnology and Occupational Safety and Health: What Do We Know?

Geraci, Charles L.
(NIOSH)

Nanotechnology has been described as one of the fastest growing technological areas in history and has the potential to revolutionize global industry by changing and improving products in many sectors. The segment of nanotechnology that leads to the creation of new materials at the nanometer scale continues to move rapidly into active commercialization. These ‘nano-based’ materials and products will become more widely used and more complex in the coming years. As with any new technology, there are a number of unknowns which generate awareness and concern in the occupational safety and health community. Recent studies have indicated that there may be new and unique hazards associated with nanomaterials. The rapid growth of this technology presents a challenge to those charged to protect worker and public health. The National Institute for Safety and Health (NIOSH) has played a leading role in conducting research on the potential implications and applications of nanotechnology on workplace safety and health, and is committed to ensuring worker protection as this technology evolves.
NIOSH has developed a strategy to address and manage the risks of nanotechnology that applies existing knowledge gained from the study of ultra fine particles, and new data developed from a strategic plan of research to generate new knowledge. The Institute has developed and posted on its web site the document Approaches to Safe Nanotechnology: An Information Exchange with NIOSH to raise awareness of potential safety and health concerns from exposure to nanomaterials. In the absence of complete hazard data, this document promotes a risk-based approach to managing nanomaterials in the workplace.

This talk will present an overview of the NIOSH Nanotechnology Research program; summarize results and experiences; and cover some of the practical lessons learned from NIOSH field studies of nanomaterial processes. NIOSH maintains an interdisciplinary nanotechnology field team that will visit and assess various nanotechnology operations. The primary objective of the team is to develop evidence-based information to support experience-based recommendations that have been made for the safe handling of nanomaterials. A focus for the team is to characterize materials, processes, potential worker exposures, work practices, control procedures, and medical monitoring in operations where nanomaterials are developed, manufactured, or used. The information and insight obtained by this team will be shared.

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SESHA 2008 Speaker Biography

Charles L. Geraci, Ph.D., CIH
Coordinator, Nanotechnology Program and Chief, Document Development Branch, NIOSH

Dr. Charles Geraci is overall Coordinator of the NIOSH Nanotechnology Research Center and is also Chief of the Document Development Branch. He has over 30 years of Industrial Hygiene practice experience that has included the federal government, consulting, and private industry. Dr. Geraci earned a B.S. in chemistry from the University of Cincinnati and a Ph.D. in chemistry from the Michigan State University. He is Board Certified in both the Comprehensive Practice and the Chemical Aspects of Industrial Hygiene and is a Fellow of the American Industrial Hygiene Association. Dr. Geraci manages a number of nanotechnology projects in the Institute and is responsible for the development of workplace guidelines, including the document “Approaches to Safe Nanotechnology”. He sponsors the NIOSH nanotechnology field team that is conducting visits to nanomaterial producers and users to characterize exposures, evaluate controls, and develop best practices. As Chief of Document Development, Dr. Geraci manages projects dealing with the development of recommendations to address worker health and safety in new or emerging technologies. Dr. Geraci has made numerous presentations on nanotechnology at national and international meetings; has served on the planning and organizing committees for many of those same meetings; and has served as co-author on several publications dealing with risk management of nanomaterils. His research interests include development of exposure monitoring methods, evaluating the effectiveness of training, developing effective methods for risk characterization and management, and assessing the hazards and risks of new technologies. Contact Information: Charles L. Geraci, Ph.D., CIH Coordinator, Nanotechnology Program and Chief, Document Development Branch Education and Information Division National Institute for Occupational Safety & Health Centers for Disease Control and Prevention 4676 Columbia Parkway, C-32 Cincinnati, OH 45226 Voice: 513-533-8339 FAX: 513-533-8230 Email: CGeraci@cdc.gov

SESHA 2008 Symposium Abstract

Comparison of Risk Management Operations from the Semiconductor and Solar Industries

Goss, Dale*; Creighton, Susan

Semiconductor research, development, and manufacturing has evolved and matured as an industrial leader for EHS business operations. Now with the advent of global environmental awareness, the landscape and expectations for EHS professionals are evolving further. Sustainable business practices are becoming more recognized by both customers and value based management investors. Leading the sustainable initiative effort is energy reduction and use of renewable energy sources. To serve the global renewable energy demand, venture capital and businesses are investing in alternative energy companies at a rapid pace. Leading this market is the solar photovoltaic industry. A unique opportunity now exists for skilled EHS personnel to guide solar businesses’ EHS and sustainability strategies. Photovoltaic device manufacturing relies heavily on technologies similar to semiconductor processing, so semiconductor EHS standards and professionals are well positioned to provide needed guidance during this time of exponential growth. This presentation and paper will: 1) Compare semiconductor and solar industries; 2) Review lessons learned from the semiconductor industry; 3) Explain how top semiconductor companies are leading sustainable operations; 4) Explain how industry associations can assist individual businesses; and 5) Recommend strategies for both semiconductor and new solar industry players. The presentation will discuss the benefits achieved when Semiconductor and Solar EHS professionals collaborate to advance the science and technology regarding renewable energy sources. The goal is to demonstrate how EHS professionals can proactively steer both companies and/or entire industries to operate more safely; protecting employees, facilities, and community; yet providing continuous return on investments for businesses.

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SESHA 2008 Speaker Biography

Dale R. Goss, MBA, MPH
Senior EHS Management Consultant,

Dale Goss is a Senior EHS Management Consultant with Environmental and Occupational Risk Management (EORM). Dale has 8 years experience providing account management, project management, and high-value, strategically oriented environmental, health, and safety consulting to semiconductor, solar, biotechnology, and pharmaceutical clients. Dale graduated with a bachelor degree in Biology from the Arizona State University, Master’s in Public Health from the University of Arizona, and holds a Master’s in Business Administration / Global Management from the University of Phoenix.

SESHA 2008 Symposium Abstract

Globally Harmonized System (GHS) Update

Jamali, Jay
(Enviro Safetech, San Jose, CA)

This presentation will provide an update on the United Nations (UN) Globally Harmonized System (GHS) for chemical classification and labeling in the US and other countries. The presentation will review OSHA, EPA and DOT compliance with GHS in the USA.

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SESHA 2008 Speaker Biography

Jay Jamali
EHS Director, Enviro Safetech, San Jose, CA

Mr. Jay Jamali a Certified Safety Professional (CSP), Certified Hazardous Materials Manager (CHMM), and a Certified Hazard Control Manager (CHCM) is the Environmental Health and Safety (EHS) Director for Enviro Safetech an EHS consultation firm in San Jose, California. Jay has over 25 years of experience in EHS with a Bachelor of Science Degree in Safety Engineering and minor in Industrial Hygiene.He has been on the faculty of University of California Santa Cruz Hazardous Materials and Safety Management program for the past 18 years.

SESHA 2008 Symposium Abstract

Managing Emergency Response Incidents in Cost Sensitive R & D Facilities

Gilbaugh, Brian
(Applied Materials, Santa Clara, Ca.)

In a business environment that is becoming increasingly cost sensitive, ensuring effective response to emergency incidents at a semiconductor research and development (R & D) facility like Applied Materials presents a number of challenges. Achieving greater efficiencies in terms of time and cost savings while ensuring adequate response resources can at times appear to be irreconcilable. In 2000 the Santa Clara facility implemented a novel approach to emergency response which has not only improved response proficiency but also provided added benefits in the Environmental, Health and Safety (EHS) disciplines. Along with the typical use of volunteer members, Applied Materials SCLA has employed the use of a small nucleus of highly-trained, full-time responders to augment the Emergency Response Team (ERT). When not responding to emergencies, the “Core ERT” is tasked with additional EHS-related duties along with providing all ERT-related training internally. By working a 24/7 schedule the Core ERT is able to perform many of these EHS-related tasks outside normal business hours. This reduces business interruption while still ensuring regulatory compliance and effective utilization of our resources. The presentation will highlight lessons learned as this private industry emergency response model has evolved since its inception.

SESHA 2008 Speaker Biography

Brian Gilbaugh
Loss Control Manager, Applied Materials, Santa Clara, Ca.

Brian has been with Applied Materials since 2000. He has been a member of the Core ERT since it\’s inception and is currently working as a shift Supervisor in charge of day shift operations. He is responsible for managing the Core and Volunteer ERT training program and, more recently, has been tasked with ensuring compliance with the new Department of Homeland Security (DHS) Chemical Security Regulation. He has played key roles in developing new ERT programs at Applied Materials operations in Xi\’an, China and Bangalore, India. Brian has over twelve years of experience in the emergency response field and is currently certified as an Emergency Medical Technician (EMT) and California Specialized Training Institute (CSTI) Hazardous Materials Specialist and Incident Commander. He is a certified BLS instructor for the American Heart Association as well as a CSTI Outreach Instructor.

SESHA 2008 Symposium Abstract

Securing the Chemical Supply Chain

Koch, William
(Air Products & Chemicals, Inc.)

Today’s world seems less safe than ever before. Threats of terrorism and random acts of crime and violence make security more important than ever before – including in the chemical industry. Securing the chemical supply chain is necessary to protect employees, customers, contractors, first responders and the public. Following the events of 9-11 the American Chemistry Council (ACC) expanded its Responsible Care Code by adding a seventh code, the Security Code. This Code, which is a condition of membership contains 13 Management Practices to guide its 140 member companies through the complex process of accessing and strengthening the security of its operations. To date the 140 ACC companies have spent over three billion dollars on securing the manufacture, storage and transportation its chemical products. The ACC supported federal legislation to ensure that all chemical companies were taking security seriously. In October 2006 Congress passed legislation which gave the Department Of Homeland Security (DHS) regulatory authority for the security of the chemical industry in the United States. DHS published the new security regulation entitled the “Chemical Facility Anti-Terrorism Standard” (CFATS) in April of 2007. This paper will review the history of security in the chemical industry since 9-11 by looking at what Air Products has done to secure its global supply chain. It will also provide and overview of the new DHS CFATS regulation for site security and discuss what else the government is doing relative to securing the chemical supply chain.

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SESHA 2008 Speaker Biography

William R. Koch
Global Director of Process Safety Integrity, Air Products & Chemicals, Inc.

Mr. Koch has 32 years of engineering and technical experience at Air Products and has held numerous engineering management positions; including, Manager of Product Development/Advanced Separations Group, Manager of Liquid Bulk Engineering, Manager of Gas Systems Engineering and Manager of Hydrocarbon Engineering. He received his BSChE from Lafayette College (1968) and his MSChE from the University of Oklahoma (1972). His most recent promotion is to a position, newly created in response to the 9/11 incident, entitled, Global Director, Process Safety Integrity. In this new role, Mr. Koch is accountable for insuring that the company’s global operations and future designs are secure against acts of terrorism. He is also responsible for Air Products Global Crisis Management program and reports regularly to the company’s Environmental, Health and Safety Management Committee.

SESHA 2008 Symposium Abstract

Dell’s Facility Energy Efficiency Efforts

Gibson, Sarah
(Dell EHS & Facilities Sustainability Departments)

In June 2007, CEO Michael Dell announced that he wanted Dell Inc. to be the “greenest IT company in the world.” While Dell is already known environmentally for its electronics recovery and recycling programs, activities to reduce and offset the impact of the company’s carbon footprint have accelerated. Electricity usage accounts for about 98% of Dell’s operations-related emissions globally. This paper describes Dell’s short- and long-term strategies to reduce carbon emissions attributed to facility energy use, and some recent successes in improving energy efficiency in its operations.

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SESHA 2008 Speaker Biography

Sarah Gibson
Global Environmental Programs Manager, Dell EHS & Facilities Sustainability Departments

Sarah Gibson is the global environmental programs manager at Dell Inc., based in Round Rock, TX, supporting Dell’s facilities and manufacturing operations. Among her many hats, she manages the global ISO 14001 programs, EHS procedure and policy development and environmental reporting, while consulting internally and assisting with environmental and sustainability project and programs such as energy management and green building design. Prior to joining Dell in 2002, Sarah spent many years with Motorola’s semiconductor operations in Phoenix, AZ and Austin, TX in various environmental, health and safety technical and managerial roles.

SESHA 2008 Symposium Abstract

Demonstrating Sustainability Performance through LEED

Beasley, James
(International SEMATECH Manufacturing Initiative)

Manufacturers of electronics, and more recently the suppliers of manufacturing process equipment to the electronics industry, focus a great deal of attention on the “greenness” of their products. Green products are presumed to have reduced impact on the environment through innovative manufacturing techniques, or reduced energy or resources to operate. A focus on products and manufacturing processes is not enough to remain competitive in today’s environment of increased environmental awareness and operational cost sensitivity; manufacturers must also consider the impact of the manufacturing facilities they design, build and operate. The US Green Building Council’s (USGBC) Leadership in Energy and Environmental Design (LEED) rating system is the de facto method for advancing “best practices” of building design and construction practices. Based upon the “LEED” criteria, the USGBC defines a green building as one having the following characteristics: • Highly energy efficient • High indoor environmental quality • Water resource efficient • Sensitive to its effects on local and systemic surroundings. This presentation will describe the elements of LEED as a voluntary designation that may be sought by owners of new or existing buildings, with particular emphasis on high tech facilities. Case studies of semiconductor fabs which have successfully achieved LEED registration will be used to highlight strategies for satisfying LEED credit requirements and demonstrate exceptional sustainability performance.

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SESHA 2008 Speaker Biography

James Beasley, LEED AP
ESH Technology Manager, International SEMATECH Manufacturing Initiative

James Beasley is ISMI’s ESH Technology Manager, with responsibility for the consortium’s Supplier ESH Leadership and Green Fab sustainability initiatives. Beasley has over 25 years experience in semiconductor manufacturing, facilities equipment engineering, specialty gas and chemical management, and Environmental, Safety and Health, (ESH). Beasley is a LEED® Accredited Professional with the United States Green Building Council and a diplomat of the Institute of Safety and Systems Management at the University of Southern California.

SESHA 2008 Symposium Abstract

EHS Management Systems-Turning Information into Action

Dayalal, Milan
(Dakota Software, Rochester, New York)

Environmental performance measurement and risk evaluation are crucial requirements for today’s environmental, health and safety (EHS) professionals. Corporate executives must be able to identify potential areas of liability. Facility managers must be able to confirm consistent compliance with the regulations specific to their site. Sustainability initiatives are expected to be implemented across the organization. This presentation will present the benefits of working with software systems that provide the most effective and efficient way to be compliant and manage risk. Compliance assurance is evolving from a Corporate audit review process to a point-of-control model by bringing regulatory knowledge and risk awareness to the professionals at the site. Discussion will include how software provides a standardized approach that reduces regulatory research time, auditing program design time, analysis and corrective action tracking planning time and the overall risk of regulatory fines and penalties, thereby contributing to the bottom line of the organization. Different software platforms will also be described as many organizations are implementing the Software as a Service (Saas) model. SaaS lets you access software over the web for a low monthly subscription price instead of installing and maintaining software on your system, substantially reducing the investment and providing much greater flexibility. Installing environmental management systems by the SaaS model enables users to leverage a common framework and technology infrastructure. Presentation of active case studies will provide examples of implementation of EHS software systems across a wide variety of organizations. Arlene Davidson Marketing Director Dakota Software Corporation 95 Allens Creek Road Rochester, NY 14618 585-244-3300 ext. 16

SESHA 2008 Speaker Biography

Reginald Shiverick
Marketing Director, Dakota Software, Rochester, New York

Since 1992, Reg Shiverick has been President of Dakota Software Corporation. Under his vision and leadership, Dakota Software has become the industry standard for auditing, corrective action, and incident management software. In 1998, Mr. Shiverick was awarded the Extraordinary Service Award from The Auditing Roundtable, a professional organization dedicated to the development and professional practice of environmental, health, and safety (EHS) auditing, where he now serves on their Nominating Committee. Known as an industry expert on the structure and role of environmental, health and safety (EH&S) audits, Mr. Shiverick has written and made numerous presentations on the subject. Specifically, he has presented on the role of computerized EH&S audit programs at The Auditing Roundtable, the Energy and Environmental Quality Division of the American Society for Quality Control and for the American Society of Safety Engineers. He received a master’s degree in Business Administration from the Amos Tuck School of Dartmouth College and a bachelor’s degree in Geology from Bucknell University. Prior to Dakota Software, he served in executive positions with technology-based companies focusing on sales, marketing and strategic planning.

SESHA 2008 Symposium Abstract

Doubletree Hotel Green Peace Certification – Information & Discussion

Baird, Jenny
(Doubletree Hotel)

The steps and processes of the Portland Lloyd Center Doubletree Hotel accomplished to become Green Peace Certified.

SESHA 2008 Symposium Abstract

Chemical Security Anti-Terrorism Standards update: Current status of the regulation

Freeman, Craig
(Department of Homeland Security, Compliance Division, Washington, DC)

On April 9, 2007, the U.S. Department of Homeland Security (DHS) issued 6 CFR Part 27, the Chemical Facility Anti-Terrorism Standards (CFATS). Congress authorized this interim final rule (IFR) under Section 550 of the Department of Homeland Security Appropriations Act of 2007, directing the Department to identify, assess, and ensure effective security at high risk chemical facilities. To that end, the Department will require these facilities to conduct a security vulnerability assessment (SVA) and then develop and implement a site security plan (SSP), implementing site-specific security measures that meet the Risk Based Performance Standards (RBPS) that DHS identified in the IFR. Any facility, not statutorily exempted from the regulation, possessing a chemical of interest in amounts in excess of the screening threshold quantity (appendix A) will be required to comply with the CFATS regulation.

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SESHA 2008 Speaker Biography

Craig Freeman
Loss Control Manager, Department of Homeland Security, Compliance Division, Washington, DC

Inspector Freeman began his Homeland Security career in 1989 with his enlistment in the United States Coast Guard. In 2002, Chief Gunner\’s Mate Freeman left active duty to accept a position with the Federal Protective Service (FPS) as a uniformed law enforcement officer. In addition to the myriad of law enforcement duties associated with FPS, Inspector Freeman performed the physical security mission of conducting vulnerability assessments and developing risk-mitigating strategies for Federal facilities. In 2003 FPS, along with 22 other federal agencies, joined to create the Department of Homeland Security. Anticipating the release of the new Chemical Facility Anti-Terrorism Standards, the Chemical Security Compliance Division was formed as part of the DHS, Office of Infrastructure Protection. In the Federal Protective Service, DHS found a cadre of Inspectors who were Federal law enforcement officers, trained as physical security specialists and hazardous materials technicians. This unique skill set was the perfect fit for the mission of the Chemical Security Compliance Division in implementing the new Chemical Facility Anti-Terrorism Standards. Inspector Freeman and this cadre of inspectors detailed from FPS to CSCD became plank owners in the new Inspections and Enforcement Branch of the Chemical Security Compliance Division.

SESHA 2008 Symposium Abstract

DHS Chemical Security Roundtable Discussion

Freeman, Craig; Koch, William
(DHS)

How is DHS 6 CFR 27 impacting your organization? On April 9, 2007, the U.S. Department of Homeland Security (DHS) issued new Chemical Facility Anti-Terrorism Standards (CFATS) (6 CFR 27) that are likely to affect many chemical processing, manufacturing, and storage facilities. This includes all semiconductor manufacturing facilities in the United States that use certain hazardous chemicals. SESHA/TERF wants to help its members better understand and comply with these new regulations. This roundtable discussion will be hosted by a panel consisting of Craig Freeman, Department of Homeland Security and Bill Koch, head of security for Air Products and Chair of the NPRA Security Committee, Vice Chair of the CGA Security Committee, a member of the ACC Security Committee and an active participant on many DHS Task Forces.

SESHA 2008 Speaker Biography

Jeff Clark
ER Session Chair / Roundtable Moderator, DHS

Roundtable Moderator

SESHA 2008 Symposium Abstract

Reducing Your Carbon Footprint

Higgs, Tim
(Intel, Chandler, AZ)

Businesses and organizations everywhere are rushing to “go green”. Many are making commitments to become “carbon neutral” or at least substantially reduce their direct and indirect carbon emissions, due to concerns about global warming. A legitimate and well designed carbon reduction program should include a range of elements, including energy efficiency, direct emissions reductions, clean energy, and other innovative technologies. This paper will look at the carbon reduction efforts of Intel Corporation, which is a member of several influential climate programs and has met aggressive goals to reduce its carbon footprint. The paper will explain the actions taken across the range of climate impact areas, as well as discuss future opportunities

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SESHA 2008 Speaker Biography

Tim Higgs
Environmental Engineer, Intel, Chandler, AZ

Tim Higgs is an environmental engineer with Intel’s corporate environmental organization. He received his B.S. degree in chemical engineering from Michigan State University in 1983 and is a registered professional engineer (chemical) in the State of Arizona. Tim has been with Intel for 24 years in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency and climate change.

SESHA 2008 Symposium Abstract

Carbon Trading Benefits and Cautions

Trowbridge, Philip
(Kestrel Management Services)

Each day, there is more and more information about carbon trading and the carbon trading markets. Two U.S. trading entities, Cantor 2e and The Chicago Climate Exchange, are options being investigated by many companies. While there are certainly potential economic benefits associated with participation in trading schemes, making a well informed decision to offer or purchase credits will minimize economic and reputational risks. This presentation will review the pros and cons associated with carbon trading with particular focus on Cantor 2e and the Chicago Climate Exchange.

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SESHA 2008 Speaker Biography

Philip Trowbridge
Sr. Consultant, Kestrel Management Services

Philip Trowbridge is a senior consultant with Kestrel Management Services, LLC where he assists clients with developing and implementing integrated sustainability programs. Prior to Kestrel, Philip spent 12 years with Advanced Micro Devices most recently as their Manager of Corporate Responsibility. He has an engineering degree from the University of Texas and MBA from Texas State University.

SESHA 2008 Symposium Abstract

Managing EHS Compliance Globally: Challenges and Opportunities

McIntyre,Andrew
(EORM)

This paper will present an overview of the relevant challenges and opportunities in developing and maintaining an effective global EHS program. Included in the presentation will be a review of some of the key challenges being faced by multinational companies and some example approaches being used to overcome these challenges.

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SESHA 2008 Speaker Biography

Andy McIntyre, CIH
Managing Principal, EORM

Andy McIntyre has twenty-seven years of experience as an Environmental Health and Safety Professional in high technology industries and is a co-founder of Environmental and Occupational Risk Management, Inc (EORM). Prior to EORM, he worked for Hewlett Packard\’s Component Group and the Electronics Division of Xerox Corporation. Mr. McIntyre is a board certified industrial hygienist and is the second recipient of Peninsula Industry Business Association (PIBA) Health and Safety Professional of the Year Award (1999). He is an active member of the Semiconductor Environmental Safety and Health Association (SESHA) where he was elected a Fellow in 2001. Prior to that, he served as SESHA\’s president (\’96-\’97) and as a member of its Board of Directors (\’89-\’96).

SESHA 2008 Symposium Abstract

Overcoming multilingual issues in a global EH&S environment

Beckel, Michael
(3E Company, Carlsbad, CA)

Companies who expand their operations into foreign markets encounter a myriad of issues including EH&S and HazMat regulatory compliance requirements. There are several complex issues that go far beyond just simple language translation. These issues range from researching the various regulations and understanding each country’s level of enforcement, the complexity of international phone numbers and providing emergency response (not all countries have ‘911’), dealing with unique waste disposal requirements, the complexity of training and also accommodating MSDSs for products whose ingredients vary from country to country. This talk will address the multiple layers of issues companies face and the steps they need to be taking and considering when addressing multilingual issues.

SESHA 2008 Speaker Biography

Michael Beckel
Director of product management, 3E Company, Carlsbad, CA

Mr. Beckel joined 3E Company in 1999, continuing a 19 year career in environmental science and safety management that included 10 years of practical experience managing the EHS programs of laboratory and manufacturing firms. Mr. Beckel is well versed in the development and implementation of employee safety and environmental compliance programs, is a professional trainer with extensive experience, and has published several technical articles in national EHS publications. Mr. Beckel is responsible for all hazardous materials inventory, training, and consulting services performed by 3E Company.

SESHA 2008 Symposium Abstract

TERF Roundtable Discussion

Clark, Jeff
(TERF Co-chair)

TERF Round Table The Technology Emergency Response Forum (TERF) will review the current tools and resources available to the members. TERF currently has over 1200 registers users. Many of the tools TERF has developed such as an Email tool, Discussion Group, website and resource documents are available, but under utilized. In an effort to continue to support emergency response programs, we want to hear what you would like to see from TERF over the next year. Emergency Response professionals drive the actions of TERF. Tell us what you want and we’ll make it happen!

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SESHA 2008 Speaker Biography

Jeff Clark
TERF – Co-chair, TERF Co-chair

TERF Co-chair

SESHA 2008 Symposium Abstract

Lessons Learned Roundtable

SESHA BOD,
(TERF Co-chair)

During this Roundtable, we will discuss Lessons Learned from accidents and incidents that have occurred at various high tech facilities. Sharing these lessons learned will help others identify similar issues before they become their own incidents. Although several discussion topics will be prepared in advance, we would also like your input! What accidents/incidents/near misses have occurred at YOUR facility that you would like to share with other conference participants? We hope you will participate in our discussion! If you would like to share your experiences with others, come prepared to verbally present your accident or incident.

SESHA 2008 Speaker Biography

EHS Engineer, *
*

SESHA 2008 Symposium Abstract

Prevention Through Design – The Life Cycle Safety Program At Intel

Barrett, Michael; Mattos, Don; Karsnia, Andy
(Intel Corporation, Hillsboro, OR)

The Injury Free Environment (IFE) program implemented at Intel has produced world class construction recordable figures (0.2). This recordable rate however has been flat for some time. To reach the next level of injury reduction new approaches and thought processes are required. The traditional focus of the IFE program has been on means and methods, PPE, procedural development/mitigation, etc. To reach this next identified level of injury reduction, Intel has chosen to implement a Prevention through Design (PtD) program known as Life Cycle Safety (LCS) LCS is a “collaborative design” process the purpose of which is to address safety requirements during the design phase of a capital construction project. The aim is to prevent or minimize hazards and risks associated with the construction, manufacture, use, maintenance and decommissioning of facilities and equipment . Prevention through design is the result of the LCS process. The key to LCS effectiveness is to ensure that the right people collaborate at the right time to make the right decisions. The key players are: Designer, Owner Rep, CM/GC and Trade Contractors. Some key items to bear in mind: 1. Look at the design through the eyes of the construction and maintenance workers. 2. Eliminate “what were the designers thinking statements” 3. Provides opportunity for end user input. The process used at Intel includes • Dedicated LCS design reviews • LCS job walks where applicable • Post construction lessons learned • LCS design review logs and standard checklist o Checklists add a level of accountability The purpose of the checklist is to provide a series of questions to prompt the teams to think about key PtD areas for scrutiny. Examples of key areas include: • Accessibility • Confined Space • Ergo • Fall • Maintenance • Operations • Physical hazards • Emergencies In summary, the LCS program is a key ingredient in a successful IFE program. It provides maximum safety benefit at the right time. The collaborative nature of the process results in shared ownership of the outcome and it does not increase cost.

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SESHA 2008 Speaker Biography

Michael Barrett
I&C Engineer, Intel Corporation, Hillsboro, OR

Mr. Barrett has spent the previous 7 years working as a design engineer within Intel Corporation\’s construction engineering team. His experience includes design work on 3 world class 300mm semiconductor factories in Hillsboro, OR and Albuquerque, NM.

SESHA 2008 Symposium Abstract

Overview of Flat Panel Display Manufacturing

Fox, Stephen; Brown, Al
(Rushbrook, Portland, OR)

The market for flat panel displays has grown rapidly in recent years, but little has been discussed of the fire and safety risks associated with the manufacturing process. While flat panel displays are currently manufactured almost exclusively in Asia, a number of US and European companies are key participants. Flat panel display manufacturing utilizes photolithography, etch, deposition and assembly technologies very similar to semiconductor device manufacturing. As a result, the risks associated with flat panel display manufacturing therefore often mirror those associated with semiconductor device manufacturing while at the same time presenting unique safety considerations due to the scale of the fabrication activities. For example, one of the latest platforms, Gen8, measures 2.16 meters by 2.46 meters. While there are many recognized safety and risk engineering standards supporting the semiconductor device manufacturing industry, there are few specifically for flat panel display manufacturing. This paper provides an overview of the flat panel display manufacturing process and highlights many of the associated safety hazards, focusing on similarities with semiconductor device fabrication, while identifying the unique considerations including: • High on-board chemical quantities • High process gas consumption, including bulk silane • Manufacturing equipment with larger physical dimensions • Larger open cleanrooms and much higher ceilings • Potential for increased use of plastics in construction • Large-scale robotics • Fume exhaust and smoke control systems • Linear assembly line manufacturing versus modular • Management of MFLs This paper will familiarize delegates with the flat panel display manufacturing process and terminology while demonstrating the similarities and differences with respect to semiconductor device manufacturing. It will identify opportunities for standards development and encourage discussion. Building on its semiconductor industry risk engineering expertise and knowledge, Rushbrook has been providing advice to prominent flat panel display manufacturers for many years and in many cases interpreting and applying standards that were originally designed for other cleanroom manufacturing operations with much smaller substrate, cleanrooms and chemical usage. This paper will highlight areas where standards are inconsistent with current LCD fabrication practice and indicate areas for further development.

SESHA 2008 Speaker Biography

Stephen L Fox PE ARM
Director, Rushbrook, Portland, OR

Steve Fox is a registered PE with 16 years risk engineering and risk management experience covering semiconductor, flat panel display and high technology industries. Before joining Rushbrook, he was Principal Advisor for risk engineering and risk management to Samsung Semiconductor and Samsung LCD based on Korea. Previously Steve spent 10 years on Intel’s risk management staff; including assignments on wafer fab construction, process development, business continuity programming, and safety program support. Al Brown, Managing Director, formed Rushbrook in 1999 and lead the consultancy to become risk engineering partner of choice for many semiconductor and LCD manufacturers, equipment manufacturers, brokers and insurers. Al is a UK registered professional engineer with 22 years risk engineering experience. Both began their careers with FM, contributing to development of FM standards and training of engineers. They are active members of industry and national standards committees, including SEMI S14 Fire Protection Taskforce and NFPA 318 Cleanrooms.