SEMI Safety Guidelines: Design or Performance?

Sklar, Eric
(Safety Guru, Santa Clara, CA)

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One of the current critical issues regarding the SEMI Safety Guidelines is whether the criteria in those guidelines should pertain to the design of equipment (i.e., what the equipment is) or to the performance of the equipment (i.e., what the equipment does.) This presentation will describe the differences, in origin and form, between design-based and performance-based criteria. The perspective of someone whose work includes design support and equipment evaluation as to the advantages and disadvantages of each approach will be presented, along with examples from the current SEMI Safety Guidelines.

Back to SESHA 29th Annual Symposium (2007)