Assessing the Relative Global Warming Potentials of Various Activities in a Microelectronics Semiconductor Fabrication Plant (Fab)
Seif, Daniel; Seguin, Russell; Madden, William
(Advanced Micro Devices, Austin, TX)
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Climate change emissions inventories are being developed to understand sources and sinks within governmental and industrial entities. Advanced Micro Devices Inc. (AMD), a manufacturer of state-of-the-art logic and FLASH memory microelectronics, has developed this inventory for its 200 mm semiconductor manufacturing facility (fab) in Austin, Texas. Perfluorocarbons (PFCs) have received significant environmental focus because of their high global warming potentials (GWP). The relative significance and measurement system of these emissions as well as emissions due to fossil fuel combustion compared to the total global warming impact is evaluated. FTIR monitoring, IPCC inventory methods, and energy panel breakouts are employed to develop this analysis.