Calculating Semiconductor Process Air Emissions

Sherer, Mike
(Sherer Consulting Services, Inc.)

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Semiconductor process gaseous emissions can be calculated by using several methodologies. The process gaseous emissions can be used to determine best point-of-use (POU) abatement and to file in air permit applications. Byproducts are important for these calculations, and their fate in POU abatement, centralized exhaust systems and centralized abatement equipment. This presentation will detail different process emissions calculation methodologies and strategies for air permitting. In addition, by-product calculations and its affect on POU abatement specification will be discussed. Calculations for wastewater and waste will also be presented as it relates to process gaseous air emissions.

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