Comparing US NF3 and PFC Supplies to US NF3 and PFC Consumption by Electronics Industry

Deborah Ottinger, Stephanie Bogle, Bikash Acharya & Deb Harris

Under the Greenhouse Gas Reporting Program (GHGRP), the US Environmental Protection Agency (EPA) receives reports of production, imports, and exports of perfluorocarbons (PFCs) and nitrogen trifluoride (NF3). EPA also receives reports of emissions and related parameters from the primary users of PFCs and NF3 in the US, manufacturers of electronic devices such as semiconductors. Based on GHGRP reports from electronics manufacturers, EPA can estimate the implied consumption of PFCs and NF3 by the US electronics industry.

In this study, we will compare the magnitudes and trends of implied NF3 and PFC consumption by the US electronics industry to the magnitudes and trends of the PFC and NF3 supplies reported under the GHGRP. Differences may imply that the Inventory of US Greenhouse Gas Emissions and Sinks, which relies on data from GHGRP reports, is either under- or overestimating emissions of these compounds from the electronics industry. Past comparisons between estimated US consumption and supplies of sulfur hexafluoride (SF6) indicated that the Inventory may not be accounting for all emissions of SF6, either because emissions and consumption by known sources were underestimated or because emissions and consumption by one or more unknown sources were occurring. This study will determine whether similar gaps exist for PFCs and NF3 and will examine potential explanations for such gaps.


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