Cryogen and Inert Gas Risk Assessment and Controls in a Manufacturing Environment

Andrew Forbes
(Intel Corporation)

Inert gases and cryogens may seem mundane compared to more exotic chemicals used in the semiconductor manufacturing industry, but they can just as easily lead to fatal environments. This presentation will go over a screening method to differentiate between areas that are low risk, requiring little in the way of mitigation, and those that need further assessment. If an initial review determines that a more in-depth assessment is needed, there are ways to quantify the risk of developing an oxygen deficient atmosphere. The quantification can then be used to identify controls that would be the most effective in mitigating risk for that specific scenario.

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