Emerging contaminants in Microelectronics

Sam Sanchez, Alfredo Zepeda, Nate Haralson and Chuck Dale

Fluorinated compounds like PFAS and PFOS are known to be in the environment, difficult to remove and bioaccumulate in living things. The Semiconductor Industry is constantly exploring various methods to manage these contaminants by either concentration, adsorption, oxidation or incineration. This paper will present and overview of the various methods, focusing on pilot results of reverse osmosis and its ability to concentrate these compounds. What removal efficiencies were observed and factors affecting it. In conclusion, the key advantages and disadvantages of each method will be highlighted and what remaining challenges and next steps need to be considered for a cost-effective solution to meet the regulatory landscape.

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