Fab Decommissioning: The Outline of One Approach

Stadlman, Cheryl
(Intel, Chandler, AZ)

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The inherent flux in the semiconductor industry not only results in changes to the look, feel and capabilities of the computer on your desk, but often times also results in continuous churning behind the scenes of tool moves, fab demolition and decontamination activities and new fab startups. In the event that a fab needs to be decommissioned it is important to take several issues into consideration including employees’ health and safety, the surrounding environment, and regulatory compliance matters. The approaches to successfully demo/decon a fab are endless. This paper will outline the basic principals used in the closure of one of Intel’s systems manufacturing plants.

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