FCs Emission by new IPCC guideline in Taiwan’s semiconductor
Tseng Hsiang-Chieh
(Industrial Technology Research Institute)
Fluorinated Compounds (FCs) are high Global Warming Potential greenhouse gases. Several FCs are used for CVD cleaning and plasma etching in Taiwan’s Semiconductor manufacturing, such as SF6, perfluorocarbons (PFCs), hydrofluorocarbons (HFCs) and heat transfer fluids (HTFs). The IPCC is issuing 2019 Good Practice Guidance for GHG Emissions. It will be adopted by UNFCCC to estimate changes in F-gas emissions. This study aims to collect 2018 emission data from ≤200 mm and 300 mm semiconductor fabs in Taiwan.