Hazards associated with the use and preventive maintenance tasks of Ion Implanters

Tyrrell*, Neil; D\\\’Agostino, Mark
(Varian Semiconductor Equipment Associates, Inc.)

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I will present all the hazards associated with the use and preventive maintenance tasks of Ion Implanters. These hazards will encompass many of the EH&S considerations discussed in SEMI S2. The list of hazards that I will discuss include: Electrical, Energy, Fire, Ergonomics, Mechanical, Exhaust by-products, Chemicals, Toxic gases, Thermal, Ionizing radiation, Non ionizing radiation, Lasers and Sound.

Back to SESHA 29th Annual Symposium (2007)