Hazards Associated with Vapor Deposition Capital Equipment

Kryska, Paul; Brewster, Alan
(Novellus Systems Inc, San Jose, CA)

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This presentation provides an overview of hazards associated with physical vapor deposition (PVD) and chemical vapor deposition (CVD) capital equipment. Common hazards associated with their operation and maintenance, and solutions for mitigation are described. International regulatory requirements that govern and guide product safety design, as well as regional practices and expectations are incorporated into this presentation.

Back to SESHA 29th Annual Symposium (2007)