Implementation of an energy and resource saving solution for the subfab

Joe Van Gompel, Angela Bayler, Thomas Krause, Adam Stover, Andreas Neuber, & Jim L’Heureux

Sustainability of semiconductor manufacturing is increasingly important in our world of depleting resources and increasing environmental challenges. The talk will focus on how POU abatement basic operating modes can be used to synchronize subfab operation to equipment requirements and minimize both resource consumption and cost-of-ownership, but not impact process performance and emission values. Abatement configuration to support idle and sleep mode for compliance with SEMI standards will be discussed. Beyond that the results of additional improvements, e.g. how F-GHG abatement efficiencies depend on total N2-pump flow and how precise burner control

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