Pyrophoric Silanes

Eugene Ngai; Eugene Ngai
(Whitehouse Station)

Silane has been used for many years as a silicon source gas and its use is continuing to grow. While it is pyrophoric, it can be released without immediate ignition and as a result has been involved in numerous fatal accidents. Since the late 1960’s it has been well studied. Other silanes such as disilane, trisilane and tetrasilane are replacing silane in some niche applications. They are pyrophoric as well, how do they compare to silane? Are the safeguards used for silane applicable and/or effective for these silanes?

Back to SESHA 41st Annual Symposium (2019)



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