Reducing Volatile Organic Compound Emissions through Improved Waste Management
(Intel Corp, Hillsboro, OR)
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This paper explores the challenge faced by semiconductor manufacturing operations to reduce their environmental footprint and avoid regulatory constraints. Our facilities continue to increase in size and complexity while emissions limits continue to shrink. Focus is on Volatile Organic Compound (VOC) emissions, which pose the most likely constraining permit limits. Areas covered include common air permit limits and requirements, analysis of VOC sources at a typical semiconductor facility and examples of wins from Intel’s VOC reduction toolbox including improved waste management procedures. Finally, attention is given to remaining emissions problems and what must be done to ensure future manufacturing capability.