Risk Management Strategies for Semiconductor Chemicals without Occupational Exposure Limits

Shepard, Michele
(Colden Corporation, Ballston Lake, NY)

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Occupational exposure limits (OELs) define acceptable airborne concentrations of chemicals and have been a key part of workplace risk management programs. While thousands of hazardous chemicals are used in commerce, OELs have been established for only a fraction of these. There are numerous chemicals used in the semiconductor and other high technology industries without established OELs, and this number may increase with new chemistries and advanced materials and manufacturing processes. This presentation will outline strategies for managing workplace risks for chemicals without identified regulatory or recommended OELs. Approaches to be compared include a tiered approach to OEL development such as process-based Derived No Effect Levels (DNELs) and provisional limits as well as categorical approaches such as Occupational Exposure Bands (OEBs) and hazard banding, and control banding models. The focus will include management strategies as well as practical applications, tools, and other resources to assist EHS professionals in evaluating, prioritizing and managing workplace exposure risks for chemicals without established OELs.

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