Semiconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test Methodologies

Mike Sherer
Trinity Consultants, Phoenix, Arizona

This four-hour professional development course will present the semiconductor fab greenhouse gas emissions reporting requirements for EPA under 40 CFR Part 98 Subparts A, C and I, and the EPA test protocol for greenhouse gas destruction or removal efficiency for point-of-use(POU)abatement devices. In addition, semiconductor processes that emit greenhouse gas emissions will be discussed. Additional powerpoint slides will be provided to attendees for typical semiconductor fab stack sampling methods and for the ISMI environmental characterization guidelines.

Back to SESHA 38th Annual Symposium (2016)



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