Semiconductor Facility Exhaust Management and Air Abatement Equipment

Sherer, M.

Course Description: This course will review exhaust management in the fab, including exhaust types and issues that can be encountered. The reasons for using and selecting point-of-use (POU) abatement (also known as exhaust conditioners) will be discussed, including different technologies available. Design and operation of centralized scrubbers and centralized volatile organic compound (VOC) abatement devices will be presented, including the “do’s” and “do not’s.” The semiconductor industry Maximum Achievable Control Technology (MACT) EPA regulation status and content will be reviewed (draft expected by end of 2001 and final expected by May, 2002). Course attendees will be asked for additional similar subject matter that they would like to be covered prior to course.

Back to SESHA 24th Annual Symposium (2002)



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