Semiconductor Industry Exhaust Management, POU Abatement and Centralized Abatement Equipment

Sherer, Mike
(Sherer Consulting Services, Inc. )

The semiconductor industry has numerous challenges in the wafer fab concerning exhaust systems, point-of-use abatement, and centralized abatement equipment. This half-day course will review how to specify types of centralized exhaust systems, specify/operate POU abatement technologies for different processes, and specify/operate centralized abatement equipment (including scrubbers, VOC control equipment and emergency release systems). Numerous examples with solutions will be presented. Information will also be presented on exhaust line management.

Back to SESHA 28th Annual Symposium (2006)



Already have an account?