Testing the Responsiveness of Fire & Gas Technologies to Small Silane Leak Scenarios

Matt Wyman; Glenn Holbrook
(kfpi)

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Over the past many years Silane has been tested and studied to try to understand characteristics of this complex chemical. The results of these tests have demonstrated that silane, although classified as a pyrophoric gas, can release an automatically catch on fire, release and result in a delayed explosive reaction, or release with no ignition depending upon the leak release rate. With all these varying leak scenarios, what testing has been done to verify the fire and gas detectors used throughout the semiconductor industry will actually detect each and every potential leak scenario? This is exactly what KFPI and ASM set to find out. In this presentation, we will compare what the safety codes and standards require for silane in terms of gas detection, fire detection, and exhaust ventilation and then compare them to what technologies actually responded to leak scenarios of all types under different exhaust rates within silane gas cabinet. Review of the leak testing videos and results will provide some shocking results.

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