The Science of Exhaust Management

Madhuri Korampally ; Steve Cottle
(Edwards, Albany, NY / Edwards, Clevedon, UK)

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Perfluorinated compounds (PFCs) were incorporated into semiconductor processing to obviate the use of ozone depleting substances, such as chlorofluorocarbons. However, PFCs have been shown to strongly contribute to global warming due to the behaviour of the carbon-fluorine bond. Furthermore, PFC molecules are quite stable due to the strength of the carbon-fluorine bond. Therefore, it is crucial to understand the chemistry of these molecules and the role it can play in successfully destroying PFCs and then safely treating the hazardous and corrosive by-products safely. To that end, this talk will first discuss the periodic table and its implications on elemental reactivity. Only by fundamentally understanding chemical behaviour can proper abatement strategies by formulated. After this primer, specific chemical families used in semiconductor processing, such as PFCs, will be discussed in more detail regarding their chemistry and toxicity and the role these factors play in proper abatement. As safe abatement can be nuanced, potential safety hazards and practices to avoid are also detailed.

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