The World of Virtual SEMI S2+ Audits

In this time of the COVID-19 Pandemic, companies around the world are limiting contact and contractors in their offices and manufacturing facilities. But these essential business needed to make progress in development and delivery of semiconductor manufacturing equipment.  This forced some creative thinking on how to approach SEMI S2 and other equipment safety audits. Tara Collins (ASM) will give a perspective from the viewpoint of the equipment manufacturer and Lindy Austin (SALUS) will give a perspective from the 3rd Party. We will make a short presentation about what seemed to work well and challenges that we had. The remainder of the session will be an open forum discussion: questions and answers, audience perspective on their struggles and successful methods for remote equipment evaluations.

Back to SESHA 43rd Virtual Annual Symposium



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