Toxic Gas Monitoring Basics

Goyal, Harish
(TGO Solutions)

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Many semiconductor processes utilize extremely hazardous gases that present a significant risk of harm to people, the environment, and property, if released. Such releases can occur in many locations- in the gas storage and delivery systems that supply the tool, and exhaust systems that draw off waste and byproducts from the equipment. Protecting fab occupants depends on the timely and accurate detection of very low levels of these highly toxic, pyrophoric, or extremely flammable materials. This presentation will provide an overview of gas sensing technologies and how these are integrated with monitoring and alarm systems. Understanding the advantages and limitations of each technology is a significant factor in selecting the proper detection equipment for a specific application. An effective toxic gas monitoring system is also dependant upon the gas sensor placement relative to storage and delivery systems, processing equipment, and exhaust lines. When activated, sensors transmit data to monitoring and alarm systems that provide notification to area occupants and emergency responders, and trigger actions such as tool shutdowns and evacuation of personnel. Understanding and interpreting this data is critical to ERT members who respond to releases and in identifying underlying causes and equipment failures. The complexity and high level of sensitivity of TGO equipment requires a thourough maintenance program and rigorous calibration schedule to ensure reliable and precise operation. The basic components of such a program will also be described.

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