Stefan Uhlenbrock

S. Uhlenbrock received B.S., M.S., and Ph.D. degrees in chemistry—all from the Westfälische Wilhelms Universität (Münster, Germany)—in 1988, 1990, and 1993, respectively.

After a postdoctoral position with the University of Toledo (Toledo, Ohio USA), he joined Micron Technology, Inc. (MTI) (Boise, Idaho USA) in 1997 and worked in the Process R&D Materials Technology group for 23 years. His research interests are in the design and synthesis of organometallic precursors for CVD and ALD applications.

He has published 11 articles in technical journals and referred conferences. He is currently working in the Process Hazard Analysis team at MTI, Boise ID. Dr. Uhlenbrock has more than 55 U.S./international patents. He is a member of the American Chemical Society (ACS) and the German Chemical Society (GDCh). At Micron, he is Senior Member Technical Staff.

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