SESHA 2014 Symposium — PDC1

GHG Leadership Forum

Climate change is the biggest environmental challenge mankind faces today. The semiconductor industry has undertaken efforts to proactively estimate and reduce its greenhouse gas emissions. This SEMATECH-sponsored greenhouse gas leadership forum will provide a venue for industry members and others to:

• Become versed in the U.S. EPA’s recently revised Subpart I greenhouse gas reporting rule;
• Learn from industry experts how they plan to comply with the rule requirements;
• Understand the process equipment suppliers’ role in characterizing new process and tool emissions and reducing environmental impact;
• Hear a proposal to update the IPCC semiconductor GHG emissions estimating guidance; and
• Become aware of the latest semiconductor carbon and environmental footprint efforts.

PDC 1 GHG Leadership Forum Agenda

SESHA 2014 Symposium — PDC2

Don’t Flirt with Disaster: Proper Planning for Hazardous Materials Emergencies

Mark McDaniel*
Michelle Dallessandro

AlterEcho, Chicago, IL, and Wheeling, WV

Recent releases of hazardous chemicals into the environment serve as reminders of the importance of proper storage and management of chemicals at industrial facilities and the critical importance of emergency response. This course will highlight proper storage and management of chemicals and waste materials and the procedures that should be followed in the event of a release of a chemical or toxic waste material at an industrial plant. Regulatory procedures for reporting releases, coordinating response efforts with emergency responders, monitoring strategies and equipment requirements, and documenting that the release has been safely and properly contained will be discussed. Fundamentals of Chemical and Waste Material Storage and Management(1 Hr) Storage and Management of Chemicals and Wastes at a Facility: Discuss systems used to store and manage chemicals and waste materials, regulations that govern these systems and emergency response planning documents. Managing an Emergency Response Action (3 hrs) Common Issues that Cause Releases to the Environment: Trainers share experiences with environmental releases that have resulted in emergency response actions. Reporting an Environmental Release: Discuss regulations that must be addressed when a chemical is released to the environment. Coordination with Local, State and Federal Responders: Learn how to work effectively with local, state and federal response teams. Monitoring and Sampling Equipment: Discuss types of equipment that should be immediately available and the applicability and proper operation of equipment in order to detect chemicals in the environment. Documentation of Release Containment or Remediation: Learn how to properly document that the chemical has been contained or remediated in accordance with applicable regulations.

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SESHA 2014 Symposium Abstract

Using Technology to Streamline Environmental, Health and Safety Systems

Baycroft, John
(Capaccio Environmental Engineering, Inc.)

Electronics and semiconductor companies are required by federal, state, local, and even global environmental, health and safety (EH&S) regulatory agencies as well as non-governmental stakeholder commitments (such as ISO and EICC) to maintain EH&S records and monitor many aspects of their operations. This task is often difficult to manage. As a result, it becomes an ongoing challenge to organize, manage, and standardize all of these requirements and systems. Harnessing the full potential of readily available technologies such as smart phones, tablets, and the cloud can make a significant difference in streamlining EH&S systems. The presentation will provide specific examples of how available technologies can be used to facilitate top-level EH&S performance and efficiency. Learn how current technology can eliminate duplication, time-consuming data collection and analysis, and inefficiencies in communication of important information. For example, software can be used to complete a lab inspection and store the data in a single place rather than needing to fill out printed forms. Web-based applications can be used to store the data in a centralized location and be viewed from anywhere in the world. Mobile devices such as smart phones and tablets can access these web-based applications and allow for data gathering in the field without the need for pen and paper. Technology also enhances the ability for EH&S to minimize impacts on clean rooms. These capabilities can be applied to many health and safety applications such as risk assessment, lockout/tagout, and confined space forms, as well as many others. Migrating your local data storage onto a web-based option also enables you to upload process flow drawings, maintenance logs, and emissions information onto your smart phone or tablet from anywhere in the facility, allowing for better efficiency and no longer searching for the hard copy file. With technology constantly improving, the potential is nearly limitless. In this presentation, we will discuss some common data management challenges faced by the semiconductor industry. We will share some of technologies and solutions that streamline these processes. We will also discuss additional systems that are being developed to assist with future needs.

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SESHA 2014 Speaker Biography

John Baycroft
Senior Environmental Engineer/Solutions Coordinator, Capaccio Environmental Engineering, Inc.

As an Environmental Engineer, ES Level 2, Mr. Baycroft supports clients and staff with a variety of engineering related and environmental management tasks including preparing technical and design specifications, assisting with bid reviews and contractor selection, and providing construction inspections. He also assists with the preparation of air and water permit applications, air reporting requirements such as source registrations, federal and state mandatory greenhouse gas reports and sampling plans, as well as many other tasks. Mr. Baycroft has also been instrumental in developing customized web applications for clients to help them track EH&S technical data and information. In addition, he develops excel spreadsheets and databases for tracking daily, monthly and annual usage for calculating air emissions. Prior to joining the CAPACCIO team, Mr. Baycroft spent two years developing and managing web based collaboration practices for an international consulting firm. In addition, he has over five years of experience in software, mobile, and web development. Mr. Baycroft holds a Bachelor of Science in Engineering, with a major in Environmental Engineering, from Suffolk University in Boston, MA.

SESHA 2014 Symposium Abstract

Introduction Of ESH Smart Management System

Jang, DongHee
(SK Hynix Inc. 337 Jikji-daero Heungdeok-gu Cheongju-si Chungcheongbuk-do 361-480 Korea)

This presentation will introduce to you about Development and Application of SK Hynix’s “ESH Smart Management System” Regularly, SK Hynix is running function checks to safety systems that is equipment for accident prevention (ESH Qualification) and also, we are checking fire protection systems (fire pumps, sprinklers, ERT equipment, etc.) These function checks are done 600 times per year for The Manufacturing Equipments Safety Check System “ESH Qualification” as well as Safety/fire equipments are checked monthly for 6700Points. We had to spend a lot of time for these Inspections, likes PC operating for filling out Check Sheets that was printed. For these reasons, we needed another solutions to prevent waste of time and material losses. SK Hynix developed “ESH Smart Management System” which is combined PDA Network System with Barcode. ESH Smart Management System shows us accuracy of checking information through the mobile device(PDA). We just match barcode with this information, It comes out from data that already put in main network server.The data contains all about history of manufacturing equipments and various safety/fire equipment. There are two remarkable achievements exist in our new ESH Smart Management System. First, The system of ESH Qualification means co-operation team work for the safety when we install new manufacturing equipments. This team put together every each department, that is, equipment / environmental / safety. In the past, ESH Qualification was organized by persons based on ‘office to office PC network’. This old system raised a lot of loss for the time and goods, due to overlapped work boundaries. The introduction of ‘ESH Smart Management System’ gives us some benefits. For example, we can improve the problems immediately through the Mobile (PDA) device in local task. In addition, we attached a history barcode on the “ESH Qualification” system. We are able to check that safety information on a daily base As a result, we can save time and expenses Secondly, we have been doing a regular check for the emergency fire protection equipments on a monthly basis.Under the old system, we have to spend a lot of paper and sometimes, we missed the check in some place. But now, We are going to register all historical information of System on safety/Fire equipment (identification number, specifications, CheckSheet) to ESH Smart Management with barcode. And then, this Smart system makes it possible for us to easy access and easy reporting to the main server using PDA in every local area. As a result, the inspector can do the check easily and also, the managers can manage the process easily. With this brand new “ESH Smart Management System” SK Hynix surely reduce the unnecessary waste of resource and, Sk Hynix can get additional safety management.

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SESHA 2014 Speaker Biography

Donghee Jang
Safety, SK Hynix Inc. 337 Jikji-daero Heungdeok-gu Cheongju-si Chungcheongbuk-do 361-480 Korea

Name : DongHee Jang Title/Psition : Assistant Manager Company : SK Hynix Inc. Mr. Jang has been a Safety Manager at SK Hynix for Six years since 2008. Mr. Jang had received a bachelor\’s degree in the field of safety Engineering from the Hoseo University, ASAN, South Korea

SESHA 2014 Symposium Abstract

Calculations, Conversions and Commitment to GHG reduction

Tam, Jolene; Dayalal, Milan
(Juniper Networks, Inc.)

Jolene Tam Global Environmental Health and Safety Specialist Juniper Networks, Inc. 1194 North Mathilda Ave. Sunnyvale, CA 94089 Committed to operational efficiency and excellence, Juniper Networks is continually reviewing and improving their internal processes and infrastructure to reduce energy consumption and stand out as a leader in their industry on GHG emissions reduction and transparency. Energy efficiency is a driving force in the design, operation and management of Juniper’s global facilities, supply chain and products. With over 9,000 employees in 107 offices spanning 44 countries, Juniper collects environmental data from sites with a headcount over 100 employees, which represent about 95% of their impact. Even in a period of headcount and real estate growth, Juniper achieved a 10% reduction in emissions intensity per employee and a decrease in emissions intensity per square foot in 2011 and 2012 respectively. Juniper is committed to disclosing regularly on their GHG inventory and working in a coordinated effort to efficiently manage impacts and ensure reporting accuracy. The Juniper Energy Efficiency Council (JEEC) is comprised of leaders from Juniper sites around the globe who are focused on reducing energy use and absolute carbon emissions and deploying best practices while supporting business expansion. The core team, made up of worldwide facility managers, meets weekly and an extended team meets every 2 months. JEEC’s focus is to better understand their energy usage on a global basis, in order to implement the policies and practices that will make the biggest impact. For example, energy consumption from all sources is tracked every half hour in the US and UK facilities which allows them to understand their use and identify ways to conserve. Centralized, aggregated information is critical to the JEEC’s decision making process. Aggregating global energy consumption requires having robust systems in place to interpret vendor provided invoices. One of the global challenges in analyzing worldwide energy consumption is the diverse metrics and source data used by international facilities in China, Hong Kong, India, Japan, Netherlands, UK, the US and Singapore. Data needs to be converted in order to measure, trend, and compare usage. Juniper contracted with Dakota Software to customize and implement a Metrics collection tool which enables them to collect data from facilities worldwide, and convert the measurements to a common standard providing transparency for monitoring data and third-party verification in key sustainability areas, such as energy, greenhouse gas emissions, water, waste and refrigerant. Jolene Tam, EHS specialist, will present how one software solution benefits program owners in doing their job more efficiently to contribute to Juniper’s worldwide values of Corporate Citizenship and Sustainability.

SESHA 2014 Speaker Biography

Jolene Tam
Global Environmental Health and Safety Specialist, Juniper Networks, Inc.

Jolene Tam holds a Bachelors Degree in Applied Economics and Management and Natural Resources from Cornell University and a Masters degree from Duke University in Environmental Economics and Policy. She is currently the Global Environmental, Health and Safety Specialist at Juniper Networks, Inc. in Sunnyvale, CA.

SESHA 2014 Symposium Abstract

InP and Phosphorous Allotropes: Safety Lessons from their Processing and Mishandling in Semiconductor Facilities

Barrera, Carlos*; Kemal, Abid
(Exponent, Menlo Park, CA)

Indium phosphide (InP) is a prevalent compound in the semiconductor industry, particularly in high speed/high bandwidth electronics and solar panel manufacturing. Although InP is a very powerful and efficient semiconductor, its production is complex and relies on the use of dangerous substances, such as phosphine (PH3), or pure solid forms like the so-called red or white phosphorous. Unlike the well-known dangerous properties of the raw materials (e.g. pyrophoric behavior, flammability and toxicity), the deposits formed in the exhaust systems or on the walls of production units are not so well understood. In some cases, these dangers are not considered in the safety assessment of the production process. A thorough understanding of the chemical and physical properties of the various phosphorous allotropes would seem like an obvious requisite for the team charged with the design, operation, or maintenance of a production facility; however, in practice such knowledge is often very limited or simply does not exist. For example, the semiconductor industry has regarded red phosphorous as a stable, safe compound, while white phosphorous is perceived as dangerous and unstable. Much effort has gone into designing systems to remove white phosphorous, but very little attention has been paid to mixed composition deposits where the properties of the various allotropes is unclear and, under certain process conditions, unstable and dangerous mixtures can be formed. Through examples drawn from the investigation and analysis of several incidents involving phosphorous, this paper stresses the importance of considering the formation of reactive species in processing units and their exhaust systems, and how to safely deal with them. This type of information is fundamental when conducting safety assessments, design reviews, and commissioning and maintenance planning.

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SESHA 2014 Speaker Biography

Carlos Barrera
Managing Engineer, Exponent, Menlo Park, CA

Dr. Carlos Barrera is a Managing Engineer in Exponent’s Thermal Sciences practice in Menlo Park. Dr. Barrera’s background in chemical and nuclear engineering provides an excellent foundation for his consulting work in the analysis and investigation of fires, explosions, product failures, and chemical process upsets. His areas of expertise and interest include chemical process safety, chemical plant operations, semi-conductor fabrication, the paper industry, process hazard analysis (PHA) for chemical processes, reactive chemistry, as well as unitary operations characterization and design, project management, and industrial safety and risk analysis programs. Dr. Barrera has participated in the investigation of explosions and process upset in multiple production facilities involving reactive chemistry incidents with unstable materials, including phosphorus and silicon compounds used in the semiconductor industry. Additionally, Dr. Barrera has leaded multiple PHAs using techniques like HAZOP, LOPA, and What-If among others.

SESHA 2014 Symposium Abstract

Managing Process Byproduct Hazards within Centralized Exhaust Systems

Roberts, Thomas M.
(Micron, Boise, ID)

The wafer fabrication industry may have well-developed process safety assessment procedures with respect to evaluation of process hazards specific to wafer fabrication equipment and secondary systems supporting wafer fabrication. Secondary systems include centralized exhaust systems that are designed to support wafer manufacturing equipment. Centralized exhaust systems may be identified as low risk systems based on a standard hazard review. Risks associated with a centralized exhaust system include the potential to form deposits of reactive byproducts within the system. These risks are typically managed through practices of segregating incompatible emissions and implementing point of use abatement at point of generation. Managing the hazards of reactive byproducts within a centralized exhaust system should include implementing process safety principles through the entire life of the system. Applicable process safety principles include managing asset integrity and reliability through the life of the system. Formation of reactive byproducts within a centralized exhaust system should be assessed and evaluated on a periodic basis. The formation of reactive byproducts within a centralized exhaust system may be a risk over the life of a system due to periodic equipment failures or from low level emissions from treated sources. This article presents a general discussion of potential hazards associated with process byproducts within centralized exhaust systems. The article provides an overview of test methods to evaluate reactivity, thermal stability, toxicity, and flammability of process byproducts. Assessment methods are presented to aid in evaluating the hazards associated with byproduct deposits. The article suggests a risk-based approach to evaluating hazards and implementing controls to reduce the risk associated with byproduct deposits within a centralized exhaust system.

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SESHA 2014 Speaker Biography

Thomas M. Roberts, P.E.
Process Hazard Analysis Engineer, Micron, Boise, ID

Eleven years experience in the semiconductor industry. Ten year experience as a Facilities Chemical Engineer specializing in Specialty Gas System installations and Pollution Abatement equipment installations. Pollution Abatement experience includes point of use abatement systems and centralized exhaust abatement systems. Current focus is chemical process safety and process hazard analysis for facilities systems through design, installation and operation.

SESHA 2014 Symposium Abstract

Risk Assessment and Mitigation of Energetic Events in the Semiconductor Industry

Zhang, Shasha ; Sharfstein, Susan ; Begley, Thomas
(College of Nanoscale Science and Engineering, 257 Fuller Road, Albany, NY 12203)

Wafer fabrication is a procedure bearing substantial risks due to many chemically intensive processes involved. A survey conducted in early 2013 was analyzed to provide integrated overviews of seventy incidents that occurred in the past three years. The most significant risks lie in the film deposition process, including atomic layer deposition (ALD) and chemical vapor deposition (CVD). Such risks are not only associated with upstream precursors that are pyrophoric, unstable or water sensitive, but also exist in downstream byproducts. For many of the new precursors, there is a general lack of material property information for conducting process hazard review. During the process, chemical byproducts may form and accumulate in the exhaust system or forelines. Many of these reaction byproducts are uncharacterized, but it is certain that they consist of energetic substances. In this work, a new effort is initiated to assess and mitigate the hazards associated with both poorly characterized pyrophoric precursors and unknown byproducts. A wide variety of experimental methods are introduced to evaluate the hazards and understand the reaction chemistry. Differential scanning calorimeter and adiabatic calorimeter are used to evaluate stability, reactivity and runaway potential of materials and mixtures. The data will assist not only in developing control measures to eliminate or minimize the level of the risks, but also in predicting the incidents in a worst-case scenario. A series of solid phase characterization methods, such as scanning electron microscopy, differential scanning calorimetry, Fourier transform infrared spectroscopy and X-ray diffraction, are proposed to characterize solid byproducts in order to identify root causes and retrieve reaction history. A combustion experiment is designed to acquire flame characteristics for various materials, providing information for engineering design of fire sensing systems. Detailed information will be presented and discussed in this talk.

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SESHA 2014 Speaker Biography

Shasha Zhang
Research scientist, College of Nanoscale Science and Engineering, 257 Fuller Road, Albany, NY 12203

Dr. Shasha Zhang is a research scientist specializing in energetics at college of Nanoscale Science and Engineering. She earned her PhD degree in chemical engineering. She possesses five years of experience on military projects focusing on reactivity, ignition, combustion and explosion of explosive or pyrophoric materials. She has 12 journal publications and 7 conference proceedings pertaining to these topics. Her current interest is assessment and mitigation of energetic hazards in semiconductor industry.

SESHA 2014 Symposium Abstract

40 Years of Silane Testing, What Have We Learned?

Ngai, Eugene
(SESHA)

Over the last 40 years extensive testing has been done to better understand silane release behavior. Conrad, Britton, Otani, Taminini, Chen all have conducted research on silane resulting in thousands of pages of reference articles and presentations. What were the key findings? A CGA Task Force conducted release testing in 1996 in order to establish the initial setback distances for P-32 (G-13). Why did another CGA Task Force decide that more testing had to be done in June 2011 followed by even more in June 2012? What are the results of the testing in New Mexico? How did it impact the current revisions to CGA G-13? What does all this mean to the user?

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SESHA 2014 Speaker Biography

Eugene Ngai
President, SESHA

Eugene has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He retired from Air Products in 2009 and formed Chemically Speaking LLC. Chemically Speaking LLC is a compressed gas safety and emergency response training and consulting corporation. Eugene first handled silane in 1972 when it was made in a small batch process. He was involved with the development of the initial pamphlet, P-32, the testing in 1996. He was the test director for the recent CGA silane testing in 2011 and 2012. He is also collaborating with Prof Chen of Kaohsiung First University of Science and Technology with his silane testing program. Since 2007 he has also coordinated over 12 silane safety seminars worldwide. He continues to investigate silane incidents worldwide. Eugene is a principal member of NFPA 55, 318 and 400. He is also active on ISO 10156 and 10298.

SESHA 2014 Symposium Abstract

Being an EHS Manager is Risky Business

Young, Rob
(AlterEcho, New York, NY)

Environmental risk can have serious negative effects on an organization’s financial position and its ability to achieve its business objectives. Corporations and their leaders face an increasing risk of criminal allegations and serious financial penalties for not properly addressing environmental issues. Recent enforcement trends have seen companies putting aside hundreds of millions of dollars to fund future liabilities and clean-ups. Increasing legislation and regulations, severe weather events and changes in workforce composition, both for industry and regulators, contribute to a dynamic environmental risk profile that can influence an organization’s financial performance, reputation, cash flow, and shareholder value. The task of identifying and addressing complex risks such as these is becoming more critical–and difficult–for environmental health and safety (EHS) professionals. The EHS industry is undergoing a significant turnover with the retirement of many of the first generation of environmental professionals. At the same time, in many cases, EHS professionals are being asked to “do more with less” as far as financial and staff resources. This trend is occurring both in the private sector and among regulators. A result is that at a time of increasing complexity and risk in environmental matters, we are seeing a decrease in the level of experience, regulatory knowledge and industry and site specific expertise and training. These evolving challenges present new risks and an increase in environmental exposures to be managed by EHS professionals. This paper and presentation will address the substance of these risks and emerging tools and initiatives to effectively manage the risks. Specific takeaways from this presentation will be: • Analysis of recent regulatory compliance trends and enforcement actions for the semiconductor sector • Identification of non-compliance factors and key risk operational risk areas • Insight on training and tools being designed to address these emerging risks and the unique footprint size, store level staff profile and resource constraints faced by retailers

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SESHA 2014 Speaker Biography

Rob Young
Vice President, AlterEcho, New York, NY

Rob Young is a Professional Geologist with more than 20 years of experience as a manager and consultant on a wide range of environmental projects. He is well-versed in federal and state regulations, as well as the appropriate guidance for a number of regulated solid waste and hazardous waste locations throughout the country, from former military bases to federal Superfund sites. He is an expert in groundwater monitoring, particularly as it relates to permitting and site remediation. He has regularly assisted the U.S. EPA and state environmental agencies in making risk-based corrective measure decisions affecting human health and ecology. He has visited dozens of government and private waste sites nationwide, performing a number of sampling, monitoring, assessment and oversight activities and providing technical expertise and management to lead projects to successful completion. He is a frequent instructor for federal and state environmental agencies on corrective action and quality assurance techniques, and he has made several public presentations on a variety of environmental topics. He is an experienced manager, overseeing several multi-million-dollar federal contracts and a number of employees.

SESHA 2014 Symposium Abstract

“Why Incident Management Matters”

Glass, Eric
(Workplace Health & Safety)

This session will establish new thinking around the importance of observation and near miss reporting and will provide supervisors and other tasked with employee health and safety an opportunity to hone their hazard identification and evaluation skills, while understanding the importance (or end result) of this crucial foundation of a leading indicator-based health and safety program. It is one thing to know “what” you do; it is completely different on know “why” you should do it. And not knowing the “why” is why most health and safety programs fail. Topics covered include: 1) Critical elements of a successful near miss and observation reporting process, 2)Using “what if” thinking to identify and evaluate hazards, 3) Best practices for coaching and feedback and 4) Choosing controls and precautions that prevent repeat issues.

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SESHA 2014 Speaker Biography

Eric Glass
Senior EHS Advisor, Workplace Health & Safety

Eric Glass serves as Senior EHS Advisor with Underwriter Laboratories’ Workplace Health and Safety (ULWHS) division. With over 18 years of risk management, safety and health experience, Eric is responsible for not only supporting ULWHS commitment to industry leading safety and health eLearning content and software, but guiding clients in the effective utilization of their health and safety programs. Eric’s professional career is rich with risk management, insurance loss control, third party claims administrator and EHS consulting. He is a distinguished industry speaker, published author and heavily active in thought leadership on various industry trade publications and journal articles.

SESHA 2014 Symposium Abstract

Nanoparticle EHS research

Speed, David
(IBM, New York)

The presentation will describe some of the key environmental, health, and safety challenges presented by current and future use of nanoparticles by the semiconductor industry. The presentation will provide an overview of semiconductor industry sponsored research on nanoparticle environmental, health, and safety; how that research intersects with key industry information needs, and with the general state of science on nano EHS

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SESHA 2014 Speaker Biography

David Speed
Chemical & Environmental Program Manager, IBM, New York

David Speed is the chemical and environmental program manager for IBM’s Microelectronics Division, and a Senior Technical Staff Member. He represents IBM on a wide variety of environmental, health, and safety issues. He has led IBM actions to remediate groundwater, eliminate hazardous chemicals, develop and optimize semiconductor and packaging manufacturing processes, provide safe drinking water, and reduce air, water, and waste emissions. He provides process modeling and other technical support across IBM and the industry, and has developed a number of chemical treatment and recycling processes. He has a PhD in Environmental Engineering from UCONN, with BS and MS degrees from URI and RPI.

SESHA 2014 Symposium Abstract

Semiconductor Facility Source Emissions Measurements – How the New EPA Regulations Might Change Your Upcoming Test Program

Thiry, Craig; Aasland, Judith
(Montrose Environmental Corporation)

There are many new regulations impacting source testing in the semiconductor industry in various ways. These include the following regulations: • AETB-7036 (Air Emission Testing Body) Source Testing Company Accreditation • QSTI/QSTO (Qualified Source Test Individual/Observer) • PGVP (Protocol Gas Verification Program) • SSAP (Stationary Source Audit Program) • Boiler MACT • Overview/Discussion of Applicable EPA Test Methods to the Semiconductor Industry • Upcoming EPA Method changes including ERT reporting The discussion will include requirements for source testing companies as well as a brief overview of applicable test methods specific to the industry. All of these items provide an synopsis of the trend towards required improvements in data quality.

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SESHA 2014 Speaker Biography

Judith Aasland
Chief Operating Officer, Montrose Environmental Corporation

Ms. Aasland has been involved with air pollution testing for over 24 years. She has been involved with the performance and/or management of thousands of stationary source tests at various locations across the United States. Prior to joining the Montrose Environmental Group, Judith worked 8 years as a Project Manager for TRC Environmental Corporation, 10 years as a Senior Technical Writer for Am Test-Air Quality, LLC, and 3 years overseeing reporting for an environmental laboratory. Overall, she has been directly involved with stack testing since 1990 and employed within the environmental industry since 1987. As a Client Account Manager and Business Development team member at the Montrose Environmental Group, Ms. Aasland meets with new and existing customers to collect information which will assist with the transfer of information to the properly selected Project Managers for successful sampling projects. Within Montrose, Ms. Aasland also assists in the review and dissemination of new and existing EPA regulations.

SESHA 2014 Symposium Abstract

EPA GHG Abatement Testing Protocol and How to Apply It

Van Gompel, Joe
(Edwards Service)

Determination of destruction or removal efficiency (DRE) of F-GHGs for point-of-use abatement devices is an involved process. The US EPA requires analysts to use the test protocol 430-R-10-003 (The Protocol) or equivalent, based on EPA approval. The procedures described in The Protocol are complex and require considerable planning for successful and efficient testing. For example, The Protocol describes Method 1 testing – flowing gases from the process chamber without a wafer. While Method 1 allows for greater control of the tests as well as easier data workup, process byproducts are not observed. Conversely, Method 2 testing uses live wafers, giving information on byproducts as well as DRE values of the original process gases, but the data workup can be more difficult. This talk will look in detail at testing with both Methods, including partial checklists of items and details for preparation of DRE testing.

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SESHA 2014 Speaker Biography

Joe Van Gompel
Performance Services Manager, Edwards Service

Joe Van Gompel is the Performance Services Manager for Exhaust Gas Management at Edwards. As such Joe is responsible for proper functioning of installed abatement devices, including F-gas destruction and all aspects of the EPA GHG Reporting Rule within Edwards. Previously, Joe spent the 12 years before that (1996 – 2008) as a point-of-use exhaust gas management specialist for Edwards, where he was the primary technical specialist for Edwards’ POU scrubbers in the US. While there, he had final approval of scrubbers on new processes, ensuring proper configurations based on safety while optimizing for uptime and cost of ownership. In addition, he wrote and presented technical papers and seminars at conferences and was the technical liaison between the fab and the company. For a couple of years, Joe was Founder and Vice President of Glade Consulting, LLC, focusing on subfab operations, safety training, and climate change in the semiconductor industry. He also spent a total of 7 years as an Applications Chemist with two different FTIR companies. Joe is active with SESHA and is a member of the American Chemical Society. He has a BS in Chemistry from Carroll College in Wisconsin and a Ph.D. in Chemistry from the University of Illinois.

Environmental, Safety and Health Aspects of R&D and Manufacturing with Advanced Processing Materials – Best Known Methods and Standardization

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SESHA 2014 Symposium Abstract

Seismic resistance enhancement of Semiconductor Fab based on lessons learned from Great East Japan Earthquake

Kaido, Atsushi
(Rnesas Electronics Corporation, Kanagawa, Japan)

The Great East Japan Earthquake (M9.0) on March 11 2011 causing giant tsunami, soil liquefaction, land subsidence and nuclear power plant accidents brought devastating damages in north-eastern Japan. Renesas Electronics Naka factory was damaged severely by the 3.11 Earthquake and had to suspend the production activities, resulting in serious impacts on supply chains of automobile and electric industries. Based on the lessons learned from the 3.11 Earthquake, we conducted comprehensive reviews of our Business Continuity Plans (BCPs) and revised them in order to ensure our ability to maintain a stable and continuous supply of products to our customers. Now we are deploying the lessons learned to all our fabs to attain resistance to the 3.11 class earthquakes under our new BCPs. This presentation will introduce seismic resistance enhancement of semiconductor fab based on lessons learned from the 3.11 Earthquake.

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SESHA 2014 Speaker Biography

Atsushi Kaido
Department Manager, Rnesas Electronics Corporation, Kanagawa, Japan

Renesas Electronics Coporation, Department Manager, Thin film & Wet/Diffusion Engineering Department, Process Technology Division, Production and Technology Unit.

SESHA 2014 Symposium Abstract

Study of the relationship between water recovery and energy usage rates in Taiwan’s High tech industries

LU, Joey ; Ao, Jia-Gang ; Chen, Chun-Yu
(Industrial Technology Research Institute (ITRI))

In tandem with a global trend that rapidly gained momentum, Taiwan initiated its first science parks in 1980. Hopefully the success story of Silicon Valley could repeat itself in Taiwan. The high tech, semiconductor, TFT-LCD, LED and PV industries, have been greatly increasing their water usage. In order to reduce the water usage in these industries, they have made a lot effort into water recovery and reuse. The water recovery rate is over 75%; some companies and industries even reach the rate of 90%. However, when they recover the process water, they have to use electricity. If they recover more water they will use more electricity. This article will describe the relationship between the 2 side using water recovery company designed data.

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SESHA 2014 Speaker Biography

Joey Lu
Senior Researcher, Industrial Technology Research Institute (ITRI)

Joey Lu have been working for Industrial Technology Research Institute about 20 years. He is a senior researcher in ITRI now. Mr Lu attended many project on environmental management, including Montreal and Kyoto Protocol on international environmental issue, abatement of,PFCs , cleaner production and water/energy recycle. He is a consultants of the Taiwan Semiconductor Industrial Association ,Taiwan TFT-LCD association , and Taiwan photo-electrics Industrial Association

Proceedings article: Updates from SIA in China (.pdf)

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Proceedings article: Updates from SIA in Chinese Taipei (.pdf)

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Proceedings article: Updates from SIA in Japan (.pdf)

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Proceedings article: Updates from SIA in Korea (.pdf)

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Proceedings article: Updates from SIA in the US (.pdf)

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Proceedings article: Mohin – EICC Regulatory Harmonization (.pdf)

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SESHA 2014 Symposium Abstract

Typing Performance and Body Discomfort among Overweight and Obese Office Workers: A Pilot Study of Keyboard Modification

Bishop, Gary*; Smith, Matthew ; Congleton, Jerome
(Intel Corporation, Chandler, AZ)

Abstract: Obesity in the workplace is associated with loss of productivity, high medical care expenses, and increased rates of work-related injuries and illness. Thus, effective, low-cost interventions are needed to accommodate the size of today’s obese office worker while alleviating potential physical harm associated with musculoskeletal disorders. Utilizing a sample of 22 overweight and obese office workers, this study assessed the impact of introducing an alternative, more ergonomically-sound keyboard on perceptions about design, acceptability, usability, and comfort; typing productivity; and self-reported body discomfort. Data were collected using self-reported questionnaires and objective typing tests administered at before and after the intervention. After switching from their standard work keyboard to an alternative keyboard, all participants reported significant decreases in lower back discomfort (t=2.14, P=0.044); although obese participants reported significant decreases in both upper (t=2.46, P=0.032) and lower (t=2.39, P=0.036) back discomfort. No significant changes were observed in overall typing performance scores from baseline to follow-up. Findings suggest that such interventions may be introduced into the workforce with positive gains for workers without reducing short-term worker productivity. Highlights  We introduced an alternative, more ergonomically-sound keyboard to overweight/obese office workers and examined changes in typing productivity and self-reported body discomfort  After using an alternative keyboard for 3 weeks, participants reported significant decreases in lower back discomfort.  After using an alternative keyboard for 3 weeks, obese participants reported significant decreases in upper and lower back discomfort.  No significant changes were observed in overall typing performance scores from baseline to follow-up

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SESHA 2014 Speaker Biography

Gary Bishop MSPH
Intel Corporation, Chandler, AZ

Mr Bishop has over 20 years experience as an ergonomist and safety engineer. He has worked previously in the oil and gas/exploration and production field, various chemical manufacturing operations, and coal mining industries. Mr. Bishop holds a Master of Science in Public Health degree thru the Texas A&M Health Science Center with emphasis in Occupational Safety and Health. Currently Gary is employed by Intel Corporation as a Technology Development Ergonomist/Safety Engineer. His primary responsibilities are focused on consultation with Intel equipment engineeers and their suppiers to assure design compliance with Intel Ergonomic Design Guidelines and semiconductor industry standards relative to safety and ergonomics, (SEMI S2/S8).

SESHA 2014 Symposium Abstract

Fire Safety Challenges for Energetic Materials & Other Developing Technologies

Wyman, Matt
(KFPI Inc.)

The semiconductor industry continues to develop new process technologies to meet ever-changing demand requirements and achieve new manufacturing milestones. As a result, this has seen the emergence and increased use of new energetic materials and pyrophoric liquids in many new processes (such as ALD). The use of these new materials has not only created new product safety challenges but has greatly increased the fire risks in these tools as well. Many of these materials are pyrophoric, water reactive (explosive), etc. and in many cases the chemical composition of these materials are proprietary and/or undisclosed. As a result, the burning characteristics of these materials are unknown and the “best known methods (BKM)” for detecting and protecting fires involving these materials need to be developed further. KFPI will explain how these challenges affect the ability to design and integrate effective fire safety solutions and what is being done to address these challenges. Also, KFPI will explain how additional process R&D manufacturing has exposed major issues with traditional fire safety compliance, reliability, and effectiveness.

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SESHA 2014 Speaker Biography

Matt Wyman
Managing Director, KFPI Inc.

Matt Wyman is the Managing Director for KFPI Inc. who specializes in fire safety systems for the global semiconductor industry with offices throughout USA, Asia, & Europe. Matt began his career as Semiconductor Loss Prevention Specialist with FM Global over 20 years ago, and has been designing and integrating fire safety solutions for semiconductor equipment for the past 15 years. Matt currently serves as the Leader of the SEMI Standards Committee for Fire Protection, active Member of the NFPA 318 and NFPA 12 Committees, active Member of SESHA and SFPE Chapters, and has presented at SESHA Annual Symposium & Local Chapter Events many times in the past.

SESHA 2014 Symposium Abstract

Toxic Gas Monitoring System integration strategies and real-time visualization

Bornoff, Steve*
(Hallam-ICS, South Burlington, VT)

Whether incidents are managed internally or responded to externally, a well designed and developed Continuous Gas Detection System that satisfies code requirements for “Command and Control” will directly determine your organization’s credibility and the level of action during a response. Will the reliability of the TGMS information allow for minimal invasive action or will a facility wide shutdown be required due to a lack of credibility? This presentation will cover the composition of a well-designed Continuous Gas Detection System that meets the expectations of the AHJ and expanding NFPA 72 and IFC requirements, while balancing the need for real-time visualization in simple, yet effective, formats for inside and outside emergency responders. The methods of integration for TGM systems vary widely, but this presentation will identify the best practices, different approaches, newest industry standards, and red flags.

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SESHA 2014 Speaker Biography

Steve Bornoff
TGMS Program Manager, Hallam-ICS, South Burlington, VT

Steve Bornoff is a 25 year Toxic Gas Monitoring System subject matter expert specializing in code compliance, detection application, system design and engineering, integration, visualization, start-up, commissioning, testing, and system management. His experience is based upon tenure with Intel, Praxair, Honeywell, and now Hallam-ICS in various roles including his current responsibility as TGMS Program Manager. Hallam-ICS is an engineering and design firm with offices in Burlington, VT, Taunton, MA, Malta, NY, and Raleigh, NC.

SESHA 2014 Symposium Abstract

Toxic Gas Ordinance Data Book Updated and Expanded for 2014

Kincaid, Linda; Rohm, Timothy; Tarter, Jeff
(HPM Systems, Inc.)

Linda Kincaid, MPH; Timothy Rohm, PhD; Jeff Tarter. HPM systems, Inc. 70 Saratoga Ave. Santa Clara, Calif. Toxic Gas Ordinance Data Book Updated and Expanded for 2014. The Toxic Gas Ordinance (TGO) had its origin with the 1988 Model of Toxic Gas Regulation drafted by Santa Clara County Fire Chief’s Association in conjunction with the Santa Clara County City Manager’s Association, the Santa Clara County Manufacturing Group, and Silicon Valley Toxics Coalition. Various cities and regulatory their authorities subsequently adopted this model ordinance into municipal codes. The TGO was subsequently used as the model for the 1994 Uniform Fire Code amendments for toxic and highly toxic gases. Currently, International Fire Code regulations for toxic and highly-toxic gases correspond roughly to the original TGO with the following exceptions. (1) TGO requires secondary containment piping for Class I (highly toxic) gases and for Class II (toxic) gases where the primary piping is not inert to the gas being conveyed. (2) TGO requires an approved seismically activated shutoff for Class I (highly toxic) and Class II (toxic) gases. TGO includes regulation of Class III (moderately toxic) gases in addition to the Fire Code’s regulation of Class I and Class II gases. Class III roughly corresponds to the Department of Transportation Division 2.3 “toxic” or “poisonous” gases. TGO regulates bulk containment systems containing a maximum threshold quantity (MTQ) as the next more stringent category of regulation. Quantities of Class II gases exceeding the MTQ shall comply with regulations for Class I. Quantities of Class III gases exceeding the MTQ shall comply with regulations for Class II. Release of the 2014 Toxic Gas Ordinance Data Book is expected in spring. The 2014 booklet is expanded and annotated to include gases classified as pyrophoric and flammable by the Fire Code. Such gases are not regulated by the Fire Code or TGO as toxic gases. However, gas detection requirements, piping standards, and many controls are similar to requirements for toxic and highly toxic gases. The inclusion of pyrophoric and flammable gases provides a more complete single resource for requirements related to use and monitoring of highly toxic, toxic, pyrophoric, and flammable gases.

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SESHA 2014 Speaker Biography

Linda Kincaid
Industrial Hygienist, HPM Systems, Inc.

Linda Kincaid has a Master of Public Health (UC Berkeley) with a concentration in industrial hygiene. She was a Certified Industrial Hygienist through 2010. Kincaid has been a chemical safety consultant to semi-conductor and solar clients in Silicon Valley since 1990. For much of the last two decades, she provided expertise in toxic gas monitoring and exposure assessment as an employee of Industrial Hygiene Systems, owned by toxic gas monitoring guru Timothy Rohm, PhD. In 2013, HPM Systems, Inc. acquired Industrial Hygiene Systems. Kincaid now provides her expertise clients of HPM Systems, Inc. She has presented on industrial hygiene and chemical exposure topics at conferences across the nation and in Canada.

SESHA 2014 Symposium Abstract

SESHA 36th Annual International High Technology ESH Symposium & Exposition Keynote Speaker Announcement – Mr. Tim Mohin

Changing Business From the Inside Out: Essential Skills for a Career in Corporations

We are excited to announce the addition of Tim Mohin, to our keynote speaker lineup at the upcoming SESHA Annual Conference and Symposium. The focus of Tim’s keynote will be the interconnections between the disciplines of EHS and corporate social responsibility or CSR. Tim will talk about his personal journey between these two worlds as well as the essential skills needed to work in, or with, the CSR department. Attendees will be provided a copy of Tim’s new book, “Changing Business from the Inside Out: A Treehugger’s Guide to Working in Corporations.”

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SESHA 2014 Speaker Biography

Tim Mohin joined AMD as the Director of Corporate Responsibility in December 2009. In this role, Tim is responsible for the development of AMD’s corporate responsibility strategy, oversees the company’s responsibility programs, and heads AMD’s cross-functional corporate responsibility advisory council.

Tim is the Chairman of the Board of Directors for the Electronic Industry Citizenship Coalition (EICC) and the author of the 2012 book Changing Business from the Inside Out: A Treehugger’s Guide to Working in Corporations.

Prior to joining AMD, Tim started up and led Apple’s Supplier Responsibility program. Before Apple, Tim was at Intel for 12 years leading the company’s environmental and sustainability functions.

Tim started his career with the US government. With the U.S. Environmental Protection Agency he led the development of the toxics provisions of the Clean Air Act Amendments. Later, Tim was senior legislative staff for the Chairman of U.S. Senate Committee on Environment and Public Works where he contributed to a variety of national environmental policies; notably the Environmental Technology Act of 1993.

Tim serves on the board of directors of the Electronic Industry Citizenship Coalition, Net Impact and The Green Grid.

He earned a Bachelor’s degree in Environmental Biology from the State University of New York and a Masters degree in Environmental Management from Duke University.

SESHA 2014 Symposium Abstract

New Materials Introductions for Next Generation Semiconductor Manufacturing: ESH Challenges

Trammell, Steven
(SEMATECH, Albany, NY)

The semiconductor industry uses a wide variety of chemicals and gasses in manufacturing operations. Control mechanisms are in place to mitigate material hazards, however new and emerging materials, some with unknown properties, are continuously being introduced into research and manufacturing to meet the demands of emerging technologies. This presentation will discuss ESH considerations associated with new material introduction, and will include discussions on areas where knowledge gaps may exist.

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SESHA 2014 Speaker Biography

Steven Trammell
ESH Project Manager, SEMATECH, Albany, NY

Steve Trammell is an ESH Project manager at SEMATECH in Albany, NY. He manages project activities in both technical and strategic areas, including evaluations of energetic and III-V process risks, nanomaterial ESH studies, equipment and process risk assessments, and review of emerging chemical regulations. Prior to SEMATECH, Steve worked at Motorola/Freescale for 15 years, and his responsibilities included assisting in fab startups, establishing corporate level risk management programs and policies, and conducting ESH risk and compliance audits worldwide. Steve holds a B.S. in Mechanical Engineering from the University of Texas at Austin and an MBA, and is a registered Professional Engineer, a Certified Safety Professional and a Certified Hazardous Materials Manager. Steve is the current president of SESHA.

SESHA 2014 Symposium Abstract

Experience Sharing About Early Response To Emerging Health Risks in TSMC

Lin, Ro-Ting
(Taiwan Semiconductor Manufacturing Company, Hsinchu Science Park, Taiwan)

This presentation aims to introduce TSMC’s approach to early response to new regulatory standards and challenges of emerging occupational health risks of workers in Taiwan. TSMC has worked over the long term to build a friendly workplace, protect its employees’ safety and health, promote gender equality, and raise worker effectiveness. Concerning demographic shift, awareness of labor right increase, and new occupational health risks stemming from industry structural change, Taiwan government passed the amended regulations, i.e., Occupational Safety and Health Act, and announced by Presidential decree on July 3, 2013. The new Act will require employers to take measures that prevent work-related mental diseases and violence, protect maternal health, control workplace health risks based on workplace environment monitoring results, as well as strengthen the promotion of workers’ health. TSMC believes that human capital is one of its invaluable assets and its employees’ physical and mental health is fundamental to maintaining normal business operations. Employees’ health is determined not only by occupation hazards, but also by social and personal health risks and access to health services. Work-related stress and long working hours have become new topics of concern for government, society, employers, and employees as areas that require further attention and occupational health efforts in Taiwan. TSMC has prioritized these issues as one of the Company’s major occupational health subjects. In addition, preventing outbreak of novel influenza is critical to avoid business interruption, such as the H7N9 avian flu in Asia in 2013. The report demonstrates TSMC’s approach of managing these emerging health risks and how the Company shares these experiences across many industries in Taiwan, which is also part of a corporation’s social responsibility.

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SESHA 2014 Speaker Biography

Ro-Ting Lin
Principle Engineer, Taiwan Semiconductor Manufacturing Company, Hsinchu Science Park, Taiwan

Ro-Ting Lin is a principle engineer in Taiwan Semiconductor Manufacturing Company (TSMC). She received her bachelor’s degree in public health and master’s degree in industrial hygiene from National Taiwan University and has beam PhD candidate since 2009. She was a Research Associate at the University of Occupational and Environmental Health in Japan between 2005 and 2007. She has been with TSMC since 2009. Her main areas of work and research interest are global health, industrial hygiene, and occupational health.

SESHA 2014 Symposium Abstract

The Spills that Kill

McDaniel, Mark
(AlterEcho, Golden, CO)

Recent chemical disasters in the US have shaken industry and outraged the public. With all of the rules and regulations we now have in place, how is this possible? Is your facility prepared? When, how, and what do you need to report when a spill or emergency occurs? When do you need to bring in specialized help? Experienced emergency responders will guide you through the basics by looking at CERCLA and EPCRA requirements, legal implications, common mistakes, and case studies to help you prepare.

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SESHA 2014 Speaker Biography

Mark McDaniel
Associate, AlterEcho, Golden, CO

Mark McDaniel is a Certified Professional Analytical Chemist who has served as a Primary Responder on more than 25 emergency actions in support of the US EPA. He has managed more than 20 investigation, enforcement and removal actions under CERCLA, RCRA, TSCA, and SPCC guidelines on projects involving inspections, enforcement and removal actions at chemical plants, explosive and solid-rocket fuel manufacturers, petroleum refineries, hazardous waste recyclers, and mill sites. He currently oversees a team of 25 chemists, field scientists, air quality engineers, risk assessors, field biologists, microscopists, data managers and GIS specialists, while supervising field and laboratory operations at one of the largest-ever EPA Superfund sites in Libby, MT.

SESHA 2014 Symposium Abstract

Executive Order 13650, Improving Chemical Facility Safety and Security

Frist, Bernie
(Safety & Risk Management Group)

On August 1, 2013, the President of the United States signed Executive Order 13650, entitled Improving Chemical Facility Safety and Security. The EO comes on the heels of recent notable accidents in West, TX and Richmond, CA. The EO set up an OSHA/EPA/DHS Working Group to develop action plans over the next six months to find ways to improve current regulations governing chemical storage. These potential changes could significantly increase the regulatory compliance burden/risk in our industry. Mr. Frist will be discussing potential changes that could arise as a result of this Executive Order.

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SESHA 2014 Speaker Biography

Bernie Frist
Managing Principal, Safety & Risk Management Group

Bernie Frist is the Founder and Managing Principal of Safety & Risk Management Group. He has over twenty-five years of experience in EH&S program management, specializing in process safety and risk management; five years of semiconductor Fab EH&S experience with National Semiconductor and twenty years of consulting experience with EORM and ARCADIS. He has implemented and evaluated risk management and safety programs for research and development and full-scale production manufacturing operations in process intensive industries, worldwide. His PSM experience includes compliance auditing and leading PHAs for clients in diverse market sectors including agriculture, consumer products, defense, semiconductor, food and beverage, transportation, power generation, oil & gas, biotechnology, and pharmaceutical. Mr. Frist most recently served as the Risk Management Technical Knowledge and Innovation Subdiscipline Leader for delivery of PSM & RMP related services at ARCADIS. He has been a member of SESHA since 1991 and has presented, moderated and chaired the Annual Symposium; served as Arizona Chapter President (1997-1998); served two consecutive terms on the SESHA Board of Directors (2001-2006); is a past-President of the Association (2005-2006); and became a Fellow of SESHA in 2007.

SESHA 2014 Symposium Abstract

A Journey To Conflict-free

Niekerk, Gary
(Intel, Chander, AZ)

Conflict minerals (tantalum, tin, tungsten and gold)originating from the Democratic Republic of the Congo (DRC) are sometimes mined and sold to finance conflict and extreme levels of violence. Some of these minerals and the metals created from them can make their way into the supply chains of the electronics industry.Intel was one of the first companies to address the issue of conflict minerals in our supply chain, and we are working diligently to put the systems and processes in place that will enable us to reasonably conclude the tantalum, tin, tungsten and gold in our products are DRC conflict free. On January 6th, 2014 at the Consumer Electronics Show in Las Vegas, Intel CEO, Brian Krzanich announced that Intel had achieved our goal to produce the world’s first conflict-free microprossors. Intel celebrated that milestone by encouraging other companies and industries to join Intel in a collective effort to ’go conflict-free.” We achieved this conflict free milestone by focusing our efforts in two primary areas: identification and validation. Identification: We examined our supply chain and worked with our suppliers to determine those materials which contributed tantalum, tin, tungsten and/or gold to our products. For those products that contain at least one of these metals, we conducted a supply-chain survey and requested identification of the smelters or refiners supplying the metal. We contacted numerous smelters directly, visiting over 85 smelters in 21 countries, to obtain sourcing information, and to request their participation in the CFSP or similar independent 3rd party smelter validation audit. Validation: Intel utilized two systems to reasonably validate smelters were DRC conflict free. The majority of smelters were validated through the Conflict Free Smelter Program (CFSP), the London Bullion Market Association Responsible Gold Program, or the Responsible Jewelry Council Chain of Custody Certification program. Alternatively, Intel staff conducted smelter visits and worked directly with smelters to conduct a Reasonable Country of Origin Inquiry to determine the Country of Origin of their incoming materials,or recycle and scrap materials. Intel will continue our work to establish DRC conflict free supply chains for our company and our industry and provide updates on our efforts as this issue is not resolved and will take ongoing vigilance

SESHA 2014 Speaker Biography

Gary Niekerk
Director Corporate Citizenship, Intel, Chander, AZ

Gary has worked inside of some of the world’s most recognizable technology brands, such as IBM, HP, Apple and Intel to make sure what they do to produce their products is as admirable as the products themselves. In pursuit of this goal, Gary works with stakeholders and organizations that corporations have traditionally shunned – believing that your critics can be a valuable source of inspiration and enlightenment. Gary is currently the Intel Director of Corporate Citizenship and he has a BS in Occupational Safety and Health and MS in Industrial Hygiene.

SESHA 2014 Symposium Abstract

Assessing the Effectiveness of Used Electronics Management Programs

Mars*, Carole; Mangold, Jennifer; Hutchins, Margot
(The Sustainability Consortium, Arizona State University, Laboratory for Manufacturing and Sustainability, University of California, Berkeley)

With the number of electronic products reaching end-of-life expected to increase by 30% over the next 5 years, how companies manage the products they sell is a significant part of their overall corporate social responsibility program and an important contribution to efficient management of the resources required to manufacture their products. Environmentally and socially responsible program management is complicated by the inconsistent patchwork of regulations globally, an increasing focus on supply chain transparency to the point of final material disposal, and no clear, consistent way to assess or communicate the effectiveness of a used electronics management program. This presentation will cover the current and arising issues for electronic products at the end of their first use and research underway at The Sustainability Consortium to provide a way for organizations to assess, communicate and improve on their performance around used electronics management.

SESHA 2014 Speaker Biography

Carole Mars
Research Manager, The Sustainability Consortium, Arizona State University, Laboratory for Manufacturing and Sustainability, University of California, Berkeley

Dr. Carole Mars is currently the Research Manager for durable and formulated Goods at The Sustainability Consortium, Arizona State University. She is responsible for managing and executing on sector activities around development of the Sustainability Measurement and Reporting System as well as the manager and primary investigator for the Electronics End-of-Life Innovation Workgroup. Prior to joining The Consortium, Dr. Mars worked as a process engineer for Novellus Systems, a semiconductor equipment manufacturing company. Dr. Mars received her PhD in surface analytical chemistry from Pennsylvania State University and her bachelor of science in chemistry from the University of Arizona.

Closing Ceremony

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SESHA 2014 Symposium — PDC4

ESH for III-V Processing

III-V, including but not limited to InGaAs, InP, InAs, InAlAs, GaSb, GaN, and BeO manufacturing utilizes a variety of III-V materials in the processes, many of which have potential and unique ESH hazards. Investigation and technical project work has been performed to understand the hazards posed by process materials, byproducts, effluents and emissions from these processes. In this PDC, experts in the areas of safety, health, industrial hygiene and environmental engineering will provide an update on III-V processing hazards, including solution which have been determined, or are under development, to mitigate risk to personnel and the environment. Specific topic areas will include medical monitoring , personnel/workspace sampling, processing and tool related hazards, effluent generation and treatment strategies.

SESHA 2014 Symposium — PDC5

S2 Breakdown!! – How to critically review the key sections of an S2 Report

Chris Evanston, PE, President
John Visty, CIH, Principal

Salus Engineering International

An S2 Report can be of great assistance in identifying and assessing various equipment hazards before and after the equipment is installed. Reading the entire report to gather as much information as possible can be very useful, however, initially focusing on key areas will provide an initial efficient assessment. This course is designed to identify the primary S2 sections (paragraphs) and supporting documentation from a SEMI S2 report that should be accessed by a reader in order to efficiently breakdown the most critical information. Breakdown of an S2 report will highlight information on electrical power, interlocks, chemical exposure, LOTO, exhaust, etc.

Focusing on the critical information sections will allow the reader to initially assess and qualify the equipment hazards for their installation and specific company use. The information extracted from the key sections will also provide the reader an opportunity to develop an impression as to the quality of information in the report and what additional information should be provided from the supplier.

SESHA 2014 Symposium — PDC6

Toxic Gas Monitoring

Optimal TGM Selection & Maintenance. Locations of TGM fall into three main categories: area, tool, and gas cabinet. Area monitors measure ambient concentration of target gas. They are placed between workers and a potential source. Evacuation is appropriate at PEL. Tool and gas cabinet monitors are placed in exhausted enclosures. There is a presumption that workers are not exposed to exhaust. Alarm levels are set high enough to avoid unnecessary alarms. Three times PEL or one half IDLH is appropriate. Evacuation is unnecessary. TGM relies primarily on electrochemical sensors and reagent-impregnated paper tape systems. Electrochemical sensors tend to be less expensive. They are smaller, easier to install, and easier to test. They respond quickly if properly maintained and periodically challenged. Electrochemical sensors have the disadvantage of being less specific than paper tape and more susceptible to false alarms. Interference by IPA is common. Sensors mounted directly in exhaust ducts can dry out quickly. Extractive systems are appropriate for monitoring ducts. Paper tape is the more reliable technology and is more specific to target gas. It is also more expensive and more difficult to install. Teflon tubing draws a sample from a detection point to the analyzer. A delay in response is associated with the length of tubing. Tubing can be damaged and needs tested periodically. Dust inside tubing can interfere with detection of highly reactive gases such as HF, HCl, and HBr. Infrared sensors work exceptionally well for gases with specific spectra.