SESHA 2018 Symposium — PDC1

Accident Investigation – Evidence Gathering

Steven Trammell
Sue Creighton
Jonathan Jacobi

BSI Services and Solutions; Apple; UL

Course Goals Instruct participants on fundamentals of accident scene management and evidence gathering including photographic evidence, interviews and acquisition of key data through a combination of presentation materials and interactive class exercises. Overview EHS professionals with expertise in accident investigation will provide information on accident investigation techniques, with a focus on evidence gathering. Information and class exercises will be organized and presented in a highly interactive manner, which allows students to practice and build evidence gathering skills. Key aspects of the course include: Securing the incident scene Identification and gathering of key data Conducting effective interviews Taking, evaluating and organizing photographic evidence Information and techniques presented are derived from extensive experience from the instructors and from key investigative aspects developed by the National Transportation Safety Board (NTSB) and the Center for Chemical Process Safety (CCPS).

SESHA 2018 Symposium Abstract

The Business Value of Integrating Health and Safety

Dr. Ronald Loeppke
(U.S. Preventive Medicine)

This Keynote presentation reviews the results of recent published research as well case studies regarding the impact of the health and safety of the workforce on business and industry. It also provides an overview of the business case leading employers to invest in integrated health, safety and productivity improvement strategies and successful examples workplace health and safety initiatives. Poor health has cost consequences to business, industry and our economy that have largely lurked beneath the surface and not been recognized until the damage is done. Medical and pharmaceutical expenses are just the tip of the iceberg that is threatening to sink many corporate ships. There is a growing recognition that health-related productivity loss such as substandard performance on the job (presenteeism) as well as employee absences due to illness, injury and other factors (absenteeism) add compelling cost burdens to employers. In fact, a study by the Milken Institute concluded that Prevention, early detection, and more effective chronic condition management could save the U.S. $1 trillion annually. (The Milken Institute “An Unhealthy America” 2007) Research published in the Journal of Occupational and Environmental Medicine (Loeppke, et al.; Health and Productivity as a Business Strategy: A Multi-Employer Study); JOEM, April, 2009), showed that workforce health conditions caused an average monetized productivity loss of 2.3 times the medical and pharmacy expenditures for chronic health conditions ($2.3:$1). Medical and pharmacy claims were matched with the health-related presenteeism and absenteeism data obtained from the Dr. Ron Kessler (Harvard)/WHO Health and Work Performance Questionnaire (HPQ) to identify the top health conditions driving total cost for employers. As health risks go, so go health costs. In a clinical study following 7,804 individuals from a variety of employer groups who followed a high tech and high touch personalized preventive health program for two years, individual health risks were significantly reduced. Further, there was a migration from higher overall risk to lower overall health risk. In fact, Harvard Medical School researchers published a study in the journal of Health Affairs in 2010, a critical meta-analysis of 22 research studies in the scientific literature demonstrating that medical and pharmacy costs fall by about $3.27 and absenteeism costs fall by about $2.73 for every $1 invested in a comprehensive wellness program—which results in a return on investment (ROI) of 6 to 1. (Baicker K, Cutler D, Song Z. Workplace Wellness Programs Can Generate Savings. Health Affairs (Millwood). 2010; 29(2). To bring about real change to the corporate bottom line, employers must look beyond healthcare benefits as a cost to be managed and rather to the benefits of good health and safety as investments to be leveraged. The bottom line is that good health and safety is good business! Learning Objectives: (a.) Identifying the key trends that are advancing the Value of Health and the Power of Prevention in integrating Health and Safety initiatives. (b.) Recognizing the total cost (medical/pharmacy and absenteeism/presenteeism costs) impact of poor health on employers. (c.) Understanding the business case to present to the C-Suite for integrating health, safety and productivity strategies as an investment to be leveraged by employers. (d.) Defining key elements of integrated workplace health, safety and productivity enhancement strategies. (e.) Reviewing published studies and case studies of the outcome results of effective workplace health and safety initiatives.

SESHA 2018 Speaker Biography

Ronald Loeppke, MD, MPH, FACOEM, FACPM
Vice Chairman U.S. Preventive Medicine

Dr. Ronald Loeppke, MD, MPH, FACOEM, FACPM is the Vice Chairman of U.S. Preventive Medicine, and Past-President of the American College of Occupational and Environmental Medicine (ACOEM). Dr. Loeppke is an internationally recognized leader in the field of occupational and environmental (OEM) medicine, employee wellness, and health and productivity management. In his role at U.S. Preventive Medicine (USPM) he oversees a wide-ranging portfolio of prevention and population health management products and services that includes clinically based workplace wellness, chronic disease management health coaching and mobile health applications. Dr. Loeppke is a leader of USPM’s global prevention initiatives that engages with employers, health plans, government entities and individual consumers based on the clinical science of preventive medicine: primary prevention (wellness and health promotion to keep healthy people healthy), secondary prevention (screening for earlier detection/diagnosis) and tertiary prevention (early evidence-based treatment to reduce complications and disability). Prior to joining USPM, Dr. Loeppke served as Executive Vice President of Health and Productivity Strategy at Alere and as Chief Strategy Officer and Executive Vice President of Matria Healthcare, Inc. He has also served as Executive Vice President of CorSolutions, Inc., and was the founder and CEO of Health and Productivity Corporation of America. Dr. Loeppke has held several clinical positions, including working as Chair of the Department of Preventive and Occupational Medicine at the Greeley Medical Clinic, in Greeley, Colorado, and as a staff physician at several clinics and hospitals, including National Jewish Hospital and Center for Immunology and Respiratory Medicine in Denver, Colorado and Northern Colorado Medical Center in Greeley Colorado. Dr. Loeppke received a bachelor’s degree from Montana State University and his MD from the University of Kansas School of Medicine. He also completed his Preventive Medicine Residency, Occupational Medicine Fellowship and a master’s in public health degree (MPH) at the University of Washington in Seattle. He has held a variety of leadership positions in medical and health-related organizations, including serving on the Board of Directors of the Health Enhancement Research Organization and as Chair of the Integrated Benefits Institute. He served on the Editorial Advisory Boards of the Journal of Disease Management (now the Journal of Population Health Management) the Journal of Care Management, and the journal of Health and Productivity Management. He also served on the Board of Trustees of the Occupational Physician Scholarship Fund and on the Advisory Board of Directors of the National Disability Management Organization. He has held leadership positions with a variety of professional organizations, including the Rocky Mountain Academy of Occupational Medicine and the Colorado Medical Society. He has held numerous leadership positions with ACOEM in addition to his Board activities, including serving as Co-Chair of ACOEM’s Council of Public Affairs and as chair of many other committees and task forces. Dr. Loeppke’s research, articles and book chapters on population health management and workplace health and wellness have been published extensively in variety of peer reviewed scientific journals and other publications and he is a frequent speaker internationally on these topics.

SESHA 2018 Symposium Abstract

Nanotechnology: Global Chemical Regulatory Challenges and Compliance Strategies

STACIE ABRAHAM
(UL, Latham, NY)

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The research, development, and use of nanomaterials in the semiconductor and high technology electronics industries is a growing area of innovation and application. The unique size and characteristics of nanomaterials from those of the same chemicals at a larger scale give rise to properties and performance characteristics of mounting interest in these industries. As chemical substances, nanomaterials are subject to chemical control regulations globally, however have varying regulatory definitions and are not harmonized in the manner in which they are regulated. This can present compliance challenges to industry in terms of consistent approaches for product development and introduction, recordkeeping and reporting obligations, and managing diverse obligations in a global supply chain. This presentation will cover the important differences in the diverse regulatory definitions of nanomaterials and the oversight approaches taken by chemical control regulatory authorities on a global basis. Compliance challenges and strategies to navigate such complexities to facilitate a global product introduction and supply chain will be discussed.

SESHA 2018 Speaker Biography

Stacie Abraham
Senior Regulatory Specialist UL, Latham, NY

Stacie Abraham, Senior Regulatory Specialist, UL’s Supply Chain & Sustainability, has 33 years of combined chemistry and diverse industry regulatory experience. Stacie is an expert in global chemical control regulations including the U.S. Toxic Substances Control Act (TSCA), European REACH, and others. Her expertise also includes the Globally Harmonized System of Classification and Labeling (GHS), toxicology data analysis, and regulatory compliance consulting and program design. Stacie holds a B.S. degree in Chemistry, Summa Cum Laude, from the University of Pittsburgh.

SESHA 2018 Symposium Abstract

Fireball 101 [Fire Detection Challenges for Semiconductor Equipment]

Matt Wyman
(KFPI LLC)

Fires and Fabs don’t go well together. Even the smallest fires can be catastrophic to a semiconductor fab and clean rooms, resulting in particle damage, contaminated wafers, and tool downtime. Meanwhile, the industry trend to get to smaller geometries continues to result in more hazardous reactive chemicals, increasing the fire risk. Also, many customers are demanding “smoke detection” within electrical enclosures, irrelevant of the fire risk. Many EHS professionals don’t understand that fire protection is an engineering discipline with complex safety and compliance requirements. A primary challenge to fire protection design is effective fire detection. This presentation includes case studies and actual fire test videos demonstrating the effectiveness of fire detection technologies (smoke, flame, and heat) for many semiconductor equipment applications. This includes wire burn testing for smoke detection systems & flame detector testing for metal organic (MO) and other energetic materials.

SESHA 2018 Speaker Biography

Matt Wyman
Managing Director & CTO KFPI LLC

Matt Wyman is the Managing Director & CTO of KFPI LLC who specializes in fire safety solutions for the global semiconductor industry with offices throughout USA, Asia, & Europe. Matt began his career as Semiconductor Loss Prevention Specialist with FM Global and has been designing, consulting, and providing fire safety solutions for semiconductor equipment for the past 20+ years. Matt currently serves as the Leader of the SEMI Standards Committee for Fire Protection, active participant in SEMI/ISMI Energetics Task Force Committee, active Member of the NFPA 318 and NFPA 12 Committees, serves on the SESHA BOD, and has presented on various fire safety topics at SESHA Annual Symposium & Local Chapter Events many times in the past.

SESHA 2018 Symposium Abstract

What does Laser Accident Prep Mean?

Ken Barat
(Laser Safety Solutions)

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Accident preparation is a common theme in our industry. Laser eye or skin injuries tends to be a scenario most firms either do not have a plan for or do not address fully. Goal of this talk is to review all the items in a successful laser accident preparation plan. From do staff know who to contact and how when an injury is suspected? To what do we do with the individual, as well as some common plan failures. Lets not forget lessons learned.

SESHA 2018 Speaker Biography

Ken Barat
Laser Safety Adviser Laser Safety Solutions

Presently doing laser safety consulting under the name Laser Safety Solutions. Former LSO for Lawrence Berkeley Nat Lab and National Ignition Facility- Lawrence Livermore Nat Lab. LSO Fellow and IEEE & SPIE Senior Member, winner of Rockwell Award in Laser Safety. Has provided laser safety advice to KLA-Tencor, LIGO, Newport Corp, Motorola University, Illumina, Allen Institute among others. Author of several laser articles and text books. Executive Director of first 7 LSO Workshop, founder of BALSO, and a CLSO. Webinar presenter for SESHA

SESHA 2018 Symposium Abstract

Don’t be a Dart Throwing Monkey – Current Approaches to Industrial Hygiene Exposure Assessment

James Kapin
(ACTenviro, Sunnyvale, CA)

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Traditional statistical analysis does not work well for the small data sets available to most industrial hygienists in the Semiconductor industry. In response, “professional judgment” is frequently used to supplement, or even replace statistical evaluation of data. This session will introduce attendees to Bayesian Decision Analysis (BDA), a statistical tool that is specifically tailored to small data sets. Use of BDA, within the framework of the AIHA Exposure Assessment model, can bring consistency and rigor to the evaluation of small sets of air sampling data and can even be used to validate or corroborate our own professional judgment! This session is targeted to practicing industrial hygienists of all levels as well as anyone else who evaluates air sampling data. It will require audience participation however no background or experience with statistics is required (or even desired!).

SESHA 2018 Speaker Biography

James Kapin
Manager of EM Services, ACTenviro ACTenviro, Sunnyvale, CA

James Kapin is the Manager of EM Services for ACTenviro, based in San Diego, California. He has over 25 years of experience providing health, safety and environmental consulting and regulatory compliance services. His specialties include exposure assessment, EH&S program management, mold and indoor air quality, hazardous materials spill response as well as OSHA and environmental compliance. Mr. Kapin is a Certified Industrial Hygienist and earned a Masters of Public Health degree with an emphasis in Occupational Health from SDSU

SESHA 2018 Symposium Abstract

Roundtable – Amended TSCA and the Unanticipated Impacts to the Semiconductor Industry

Laurie Beu, Brooke Tvermoes; Virginia Cook, Bob Leet, Michael Castorano; Greg Sower, Marisa Kreider
(Laurie S. Beu Consulting, IBM, JSR, Intel, Dow, Ramboll Environ Cardno Chemrisk)

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Roundtable – Amended TSCA and the Unanticipated Impacts to the Semiconductor Industry Laurie Beu, Laurie S. Beu Consulting; Brooke Tvermoes, IBM; Virginia Cook, JSR; Michael Castorano, Dow; Bob Leet, Intel; Greg Sower, Ramboll-Environ; Marisa Kreider, Cardno Chemrisk. The Toxic Substances Control Act (TSCA) was originally enacted by Congress in 1976 to ensure the safe use of industrial chemicals within the US. Forty years later, in June 2016, the Frank R. Lautenberg Chemical Safety for the 21st Century Act (LCSA) was signed into law significantly changing many aspects of how the US Environmental Protection Agency (EPA) evaluates and manages industrial chemicals within the US. The amended law gives the EPA new authority to obtain toxicity, exposure, and other data necessary to evaluate the potential risks of a given chemical with the intent that the new chemical review process would be more precise and more comprehensive. The risk-based safety standard also requires that at the end of a chemical review, the EPA make an affirmative finding regarding the safety of a chemical; thus, potentially impacting the entire supply chain including downstream entities such as those that process, use, and distribute chemicals and manufacture articles. This mandate, therefore, increases the need for communication and transparency of chemical information along the supply chain such that the safety of a chemical product or material can be accurately assessed. In general, this chemical information can include data on a chemical’s physical and chemical characteristics, toxicity data (both human health and environmental), as well as information pertaining to a chemical product’s use and exposure information (i.e., occupational, consumer, and environmental). Another defining characteristics of TSCA reform that has emerged over this past year is the need to undertake and share responsibilities for chemical safety along the supply chain. For example, EPA has recently been denying low volume exemption requests (LVEs) for a family of chemistries often collectively referred to as onium photo acid generators (PAGs) due to increased concerns regarding the acute and chronic toxicity potential of these compounds and their degradants. To address EPA’s concerns an “onium” PAG consortium has formed which includes both semiconductor manufacturers and photolithography chemical suppliers. The goal of this consortium is to preserve the industries’ ability to continue to safely use and develop iodonium and sulfonium compounds used in photolithography chemistries. This round table session will discuss the new chemical review process under TSCA reform and some of the impacts that it has had on industry this past year. It will also explore the need for increased communication and chemical disclosure throughout the supply chain and how this need was recently addressed through the formation of the consortium.

SESHA 2018 Speaker Biography

Laurie S. Beu
Principal Laurie S. Beu Consulting, IBM, JSR, Intel, Dow, Ramboll Environ Cardno Chemrisk

Laurie Beu, Laurie S. Beu Consulting Laurie Beu is a consultant in the area of environmental policy, strategy and management. She has led semiconductor industry technical programs to address process greenhouse gases emissions and new chemical regulations. She is a Registered Professional Engineer in Texas, has worked in the semiconductor industry for 37 years, and is a SESHA Fellow. Brooke Tvermoes, IBM Brooke Tvermoes (PhD) is a board certified toxicologist and Manager of Environmental and Chemical Management Programs at IBM. She earned her PhD in toxicology from Duke University. Her primary training and areas of expertise include toxicology and human health risk assessment. Virginia Cook, JSR Micro, Inc. Virginia Cook is a Senior EHS Engineer at JSR Micro, Inc. in Sunnyvale, CA. She works with regulatory affairs, sustainability, and safety. She has six years of regulatory experience in the chemical industry, and she possesses a B.S. in chemical engineering from the University of Virginia. Bob Leet, Intel Robert (Bob) Leet is an Intel Technologist, and Senior Supply Chain EHS Engineer at Intel Corporation, in Portland, Oregon, USA; where he has been employed for 23 years. He holds a Bachelor\’s and Master\’s degree in Chemical Engineering from Arizona State University, his Master\’s degree focusing on Semiconductor Processing and Manufacturing. His specialties are in the U.S. TSCA regulation, and regulatory impacts to process technologies for Intel\’s Global Supply Management organization. He is the holder of seven patents for semiconductor devices and waste treatment technologies. Michael Castorano, DowDuPont Electronics and Imaging Michael Castorano is Product Stewardship and Regulatory Leader – America\’s at DowDuPont Electronics and Imaging. His background and degrees are in chemical engineering. He has worked in the semiconductor industry for 13 years, starting in polymer synthesis and scale up then moving to EH&S Product Stewardship where he has spent that past 6 years. Greg Sower, Ramboll-Environ Greg Sower (PhD) is regulatory toxicologist and product steward who specializes in identifying, assessing and classifying chemical hazards and risks. He has designed, supervised, interpreted and presented analyses of toxicological and exposure studies of chemical ingredients to address regulatory requirements under OSHA HazCom and GHS, DOT, and TSCA. Dr. Sower often works with regulators on behalf of clients to address agency concerns and to identify paths to market. Marisa Kreider, Cardno ChemRisk Marisa Kreider is a Senior Managing Health Scientist with Cardno ChemRisk where she serves primarily as a toxicologist. She has managed a variety of project types, including reviewing of toxicological literature for a variety of chemical types; designing, managing and interpreting toxicity studies; conducting or critiquing dose response assessments for chemicals or particulate; and conducting quantitative or qualitative risk assessments of consumer products. Dr. Kreider received her Ph.D. from the Department of Pharmacology and Cancer Biology at Duke University.

SESHA 2018 Symposium Abstract

Design and Safety Considerations for Gas Delivery Systems

Joe Guerin
(CS Clean Solutions Inc.)

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Providing protection from releases of hazardous gases from gas delivery systems is an area of the facility that is often overlooked. Gas cabinets, VMBs and other distribution devices generally are considered inherently safe by design, and thus do not require any special protection. However, many gases commonly employed are either toxic, pyrophoric, or corrosive. Uncontrolled release of gas from cylinders poses a serious safety threat to both the workplace and the neighborhood, owing to the quantity of pressurized, concentrated gas. This paper reviews the potential associated risks and possible mitigation strategies available to provide failsafe operation.

SESHA 2018 Speaker Biography

Joe Guerin
Senior Product/Application Manager CS Clean Solutions Inc.

Joe Guerin studied chemistry at the Cork Institute of Technology in Ireland, from where he graduated with a National Diploma in Chemistry in 1981. The first eight years of his career were spent in the pharmaceutical and automobile industries where he worked as a chemical analyst. Joe has been with his present company, CS CLEAN SOLUTIONS, since 1990 and has accompanied the ongoing development of its products to the present day. His experience comprises more than 20 years working with customers in the United States, Asia, and Europe in areas of gas safety and exhaust gas management within the semiconductor, photovoltaic and related industries.

SESHA 2018 Symposium Abstract

Gas Detection Technologies

Capitola Lau; Rick Gorny; Mike Holmes
(Honeywell – Lincolnshire, IL)

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Join us for a basic overview on gas detection technologies and learn how to monitor unintended gas concentrations in order to keep your employees and facilities safe. During this presentation Ms. Lau, Mr. Gorny, & Mr. Holmes from Honeywell will review technologies including electro-chemical sensors, paper tape, infrared and other methods to determine chemical presence. They will also review equipment used in semiconductor facilities, updates on OSHA standards, how to select technology based on application, and discuss the advantages and disadvantages of each technology. www.honeywellanalytics.com.

SESHA 2018 Speaker Biography

Capitola Lau
Product Marketing Manager Honeywell – Lincolnshire, IL

Capitola Lau – Ms. Lau is a Product Marketing Manager for high tech gas detection products at Honeywell since 2015. Her background includes global marketing management and design development of high tech electrical products; including the first launch of Bluetooth products in 2000. She has worked for Schneider Electric, Emerson, Motorola and Caterpillar. Ms. Lau graduated from Lake Forest Graduate School of Management with an International MBA; and an Electrical Engineering (BSEE) degree from Worcester Polytechnic Institute.

SESHA 2018 Symposium Abstract

Area Gas Detection Placement Optimization using Computational Fluid Dynamic Modeling

Daniel Hall; Steven Trammell
(Chemistry & Industrial Hygiene, Inc,, Wheat Ridge, CO (Hall, Strode) / BSI, Austin, TX (Trammell))

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Area Gas Detection Placement Optimization using Computational Fluid Dynamic Modeling Daniel Hall, PE CIH Chemistry and Industrial Hygiene, Inc. Cassidy Strode, PSE Chemistry and Industrial Hygiene, Inc. Andrey Korchevskiy, PhD, CIH Chemistry and Industrial Hygiene, Inc. Eric Rasmuson, MS, CIH Chemistry and Industrial Hygiene, Inc. Steven Trammell, PE, CSP, CCPSC, CHMM BSI EHS Services and Solutions Gas detection in semiconductor factories is a critical component of overall risk management for providing personnel protection. Codes and standards, such as the International Fire Code and NFPA 318 provide minimum requirements for gas detection and mandate continuous detection in areas where hazardous gases are used, both within exhausted enclosures and in ambient room areas. Typical strategies are to set detector alarm points at levels that provide early warning of leaks and to allow for rapid response to events, such as shutting off gas sources, with higher set points requiring area or site evacuation. Placement of sensors within exhausted enclosures is relatively straightforward since air flow, and therefore gas from a leak event are designed to travel towards the exhaust port. Within tool enclosures and gas cabinets, even small leaks are reliably detected since the location of the detection point at the exhaust exit is close enough to a leak that significant dilution will not have occurred. Area leak detection is more challenging, since there is much more air volume providing dilution, and air flow dynamics are complex. A major factor impacting air flow is the considerable congestion of piping and equipment located in the subfab space, making placement of detectors in the flow path of a potential leak a difficult task. Computational fluid dynamics (CFD) is a software tool that is unique in its ability to customize a three-dimensional space with as much geometric detail and physics of the environment, as necessary, to appropriately simulate realistic airflow and gas dispersion. In this presentation, we will discuss the use of CFD modeling, to model complex air flow pathways in a typical subfab or chase, which will then allow for more effective placement of gas detectors.

SESHA 2018 Speaker Biography

Daniel Hall, PE, CIH / Cassidy D. Strode / Steven R. Trammell, PE, CSP, CCPSC, CHMM
Director of Engineering Chemistry & Industrial Hygiene, Inc,, Wheat Ridge, CO (Hall, Strode) / BSI, Austin, TX (Trammell)

Mr. Hall is a licensed professional engineer (PE), a certified industrial hygienist (CIH), and is the Director of Engineering at Chemistry & Industrial Hygiene, Inc. (C&IH). Mr. Hall specializes in industrial hygiene engineering controls, statistical data analysis, and computer modeling. His engineering controls work focuses on the evaluation of local exhaust ventilation (LEV) and general dilution ventilation systems, including the design of new systems and improvement of existing systems. He utilizes computational fluid dynamics (CFD) software to evaluate workplace ventilation performance criteria for specified applications such as laboratory and industrial process environments, LEV systems within pharmaceutical laboratory settings, and other commercial, governmental, and community settings. He also utilizes CFD to aid in the development of retrospective exposure characterizations. His statistical expertise includes proficiency using stochastic methodologies for compiling and analyzing data for exposure and risk assessments, including Monte Carlo distribution analysis of retrospective exposure data. He has presented at national and international conferences on statistical analytical methodologies and computer modeling techniques utilized in retrospective exposure characterization of workers and outdoor contaminant dispersion for the purpose of risk assessment activities. Cassidy Strode is a certified Professional Simulation Engineer and works at Chemistry & Industrial Hygiene, Inc. as a Computational Fluid Dynamic Specialist and Industrial Hygienist. Mr. Strode graduated from the University of Colorado-Boulder in 2007 with a Bachelor’s degree in Physics. He is a member of the American Industrial Hygiene Association (AIHA) and is an active member of the national AIHA Hazard Prevention and Engineering Controls Committee. Mr. Strode has been using computational fluid dynamics (CFD) for industrial hygiene related projects for the last eight years and specializes in the application of CFD in support of retrospective, current, and prospective exposure assessment activities. He also utilizes CFD to evaluate workplace ventilation performance criteria for specified applications in laboratory and industrial process environments. After work he enjoys spending time with his wife and two dogs and kayaking, skiing, biking, hiking, hunting, and other outdoor sports. Steven Trammell is a Professional Engineer, Certified Safety Professional, Certified Process Safety Professional and Certified Hazardous Materials Manager, and works as a Principal Consultant at BSI. He has over 30 years of experience in a wide range of environmental, health and safety program and project activities, spanning the aerospace, petrochemical and high technology industries. His core competencies include technical risk assessments, compliance auditing, process safety management, explosives safety and construction safety, in addition to expertise in regulatory compliance program development, compliance auditing, technical training and standards development.

SESHA 2018 Symposium Abstract

The Impact of NFPA 400 “Hazards Materials Code” and Your Facility

Robert James
(UL, LLC Chicago Headquarters)

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Typical SESHA facilities that commonly use hazardous materials as part of everyday business are always concerned that something might go wrong. Multiple codes and different regulations impact how these buildings are protected, including operational concerns. Operators must have a good understanding of the basis for the protection approach, including a familiarity with the use of the key documents, such as NFPA 400, Hazards Materials Code. NFPA 400 regulations apply to the storage, use, and handling of hazardous materials in all occupancies and facilities; it is regularly updated and developed by leading experts in the field. So, it is key to be aware of the impact of these regulation on your site. This seminar will explore the administrative, operational, and maintenance provisions as they apply to new conditions and operations that have arisen after the adoption of the code, and will also speak to existing conditions and operations. You will get an inside look at NFPA 400, have the opportunity to ask questions regarding application of the regulations, and gain an understanding of how you can become involved in future changes that impact your facility.

SESHA 2018 Speaker Biography

Robert James
GLobal Building Fire/Security Inspection Director UL, LLC Chicago Headquarters

Robert James is the Global Inspection Director for UL’s Building, Fire, Life Safety, and Security Industries. In this role, he oversees the global building and security inspection program, which assists owners with building fire/life safety and site security concerns. Robert leads educational seminars, develops internet-based training programs, works with the model fire code committees, and serves as a liaison between the UL fire service research staff and the regulatory community. He is active with the UL Firefighter Safety Research Institute, currently Chairs the NFPA 400, Hazardous Materials Code and the NFPA 1082 Building Fire and Life Safety Directors committees, and is an alternate member on NFPA 101 Life Safety Code TCC, NFPA 3-4, NFPA 1030, and NFPA 1730. Prior to joining UL, Robert had more than 30 years of inspection experience, including serving as the Fire Marshal for the City of Bloomington, MN.

SESHA 2018 Symposium Abstract

How on Earth Do I Protect This?

Jake Epstein ; Tomecek Dave; Jeremy Lebowitz
(JENSEN HUGHES, MA/MD/CO)

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Semiconductor manufacturing facilities store and process some of the most hazardous materials on the planet. Use and storage of these materials, and the development of novel equipment using them, is common among the industry but not well understood in the regulatory community. This workshop reviews the general code framework in the Building and Fire Codes for protection of semiconductor manufacturing, the paths available for alternative protection schemes, and several case studies of successful application of performance-based design methods, including the application of fire testing and modeling to support structural fire protection alternatives.

SESHA 2018 Speaker Biography

Jeremy Lebowitz
VP Development – Industrial JENSEN HUGHES, MA/MD/CO

Jeremy Lebowitz, PE, is the Vice President of Development for the industrial, manufacturing and laboratory vertical markets for JENSEN HUGHES. For clients in these sectors, he is responsible for developing fire protection program plans, guiding designs toward building and fire code compliance, and developing performance alternatives which satisfy operational risk and safety objectives. Mr. Lebowitz’s role involves oversight of technical consistency and internal training at JENSEN HUGHES. His background in chemical and fire protection engineering allows for informed decision-making in assisting stakeholders to develop facilities and operational programs suited for hazardous material storage and use. He is a licensed Fire Protection Engineer in the Commonwealth of Massachusetts.

SESHA 2018 Symposium Abstract

Nanomaterial Lifecycle Considerations for use in Advanced Electronics

Craig Rowlands
(Underwriters Laboratories, Inc.)

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The use of nanomaterials (NMs) and devices is an active area of research and development in the semiconductor and advanced electronics industries and increasingly finding applications in products and processes. Due to their increased usage in R&D and manufacturing, there is a need to ensure that these novel nanomaterials are adequately assessed to ensure protection of worker and consumer health and protection of the environment. These chemical substances may have properties different than the same chemical substances with structures at a larger scale, such as greater strength, lighter weight, and greater chemical reactivity. These enhanced or different properties give nanoscale materials a range of potentially beneficial public and commercial applications; however, the same special properties may cause some of these chemical substances to behave differently than conventional chemicals under specific conditions. These unique properties of NMs require special considerations for the their safety assessments throughout the lifecycle that translate into specific requirements for hazards assessments for new chemical registrations, management of workplace exposure prevention and end of life waste disposal and recycling requirements. This roundtable will discuss important issues to consider for the safe use of nanomaterials throughout the lifecycle. The views will be presented from four experts in the science, toxicology, industrial hygiene and lifecycle practices for nanomaterials. Each will provide a brief introduction to these four topical areas and join in a roundtable discussion with the audience. Dr. Rowlands will discuss the Health and environmental hazard assessment of nanomaterials. The enhanced and unique properties that provide nanomaterials a range of potentially beneficial public and commercial applications; however, the same special properties may cause some of these chemical substances to behave differently than conventional chemicals under specific conditions. The current approaches and challenges to toxicity testing of nanomaterials for human health and environmental safety will be described.

SESHA 2018 Speaker Biography

Craig Rowlands, Laura Hodson, John Baker, Scott Tenenbaum
Senior Scientist Underwriters Laboratories, Inc.

Laura Hodson, MSPH, CIH, FAIHA Coordinator Nanotechnology Research Center, Education and Information Division National Institute for Occupational Safety and Health Centers for Disease Control and Prevention • Laura Hodson is the Coordinator of NIOSH’s nanotechnology research center. She is certified in the practice of industrial hygiene and has a BS in Chemistry and Environmental Studies, and a MSPH in Industrial Hygiene. Laura has over 30 years of chemistry and industrial hygiene experience including the evaluation of nanomaterial facilities, and is the document manager of several NIOSH nanotechnology guidance documents including Approaches to Safe Nanotechnology. She is a co-recipient of the AIHA 2015 Edward J. Baier Technical Achievement Award for the Nano field team efforts, and an active member of the AIHA Nanotechnology Working Group. Laura is a former laboratory director and chemical hygiene officer of an AIHA accredited laboratory located at RTI International and is a former member of the AIHA laboratory and lead accreditation committees. Laura has also been providing a PDC on good risk management practices of nanomaterials at the AIHce since 2008 John Baker, CIH, MS, MBA, FAIHA Principal Consultant at BSI EHS Services and Solutions (formerly EORM) • John Baker, CIH is a Principal Consultant for BSI EHS Services and Solutions. He holds a B.A. in Physics, an M.S. in Environmental Engineering, and has performed graduate work in Biophysics at the State University of New York at Buffalo. John has over 40 years of experience in industrial hygiene and environmental management and consulting. He served as Deputy Director of the Center for Biological and Environmental Nanotechnology at Rice University, one of the original six National Science Foundation funded Nanoscale Science and Engineering Centers. John has completed a number of exposure assessments for carbon nanotubes resulting in a quantitative assessment of risk for protection of employees and the public. He received ABIH Certification in the Comprehensive Practice of Industrial Hygiene in 1978 and became an AIHA Registered Professional in SDS/Label Authoring in 2012. Mr. Baker is the Chair of the American Industrial Hygiene Association Nanotechnology Working Group, a member of the American Society of Safety Engineers Industrial Hygiene Special Interest Group, and a technical member of ASTM Committee E56 on Nanotechnology. Mr. Baker’s main professional interest is in exposure assessment and hazard communication related to nanomaterials. Craig Rowlands, Ph.D., DABT Sr. Scientist at UL • Dr. Craig Rowlands is a Senior Scientist for Innovation at Underwriters laboratories, Supply Chain & Sustainability. He is an industry leader with expert knowledge in scientifically sound product safety assessments towards enhancing sustainability and reducing environmental, health & safety risks. He has successful record ensuring organizations achieve their sustainability performance goals through collaborating, partnering and impacting internal R&D programs, government agencies, regulatory authorities, technical- and trade-associations, non-governmental organizations, and universities. Dr. Rowlands has published over 80 articles and book chapters and edited several reports in toxicology and risk assessment. He has served as President of the Molecular and Systems Biology Specialty Section of the Society of Toxicology (SOT), Chair of the SOT Continuing Education Committee, and Co-Chair for the American Chemistry Council\’s Computational Profiling Work Group of the Health, Products and Science Policy Committee. He served on international expert committees including the Organization for Economic Cooperation and Development (OECD) projects on Integrated Approaches to Testing and Assessment (IATA) and Adverse Outcome Pathways (AOPs). He has served on the Board of Trustees of the International Life Sciences Institute (ILSI), Health and Environmental Sciences Institute (HESI), Co-Chair of the ILSI-HESI project Framework for Intelligent Non-Animal Methods for Safety Assessment and serves as co-chair of the SOT, Current Concepts in Toxicology Committee. He is on the editorial board of the Journal of Biochemical and Molecular Toxicology and has been awarded the Carl C. Smith award for meritorious research from the SSOT Mechanisms Specialty Section, and the 2012 Michigan Green Chemistry Governor’s Award. Steve Tenenbaum, Ph.D. Associate Professor of Nanobioscience at SUNY Polytechnic Institute • Dr. Tenenbaum\’s research focuses on understanding some of the basic aspects of how the human genome works; specifically post-transcriptional gene regulation. At the SUNY-Poly College of Nanoscale Science and Engineering, he has helped pioneer the Nanohealth and Safety initiative, which focuses on industry partnered approaches to Nano-related health and safety concerns. Along with his research team, Dr. Tenenbaum has also helped to advance cutting-edge technology and computer-based informatic approaches to studying RNA biology, specifically RNA-binding proteins, to aggressively study and better understand these molecules that regulate information contained in RNA. Dr. Tenenbaum\’s research methods also include working on Nano-based technology to make the research more robust. Dr. Tenenbaum is involved with HocusLocus Inc., and sxRNA Technologies, LLC, biotechnology based start-up companies that were spun-out of SUNY. sxRNA is a platform technology with many potential applications, including antiviral and cancer therapeutics

SESHA 2018 Symposium Abstract

Mechanisms for the unintentional formation of CF4 during Semiconductor Manufacturing

PROFESSOR MICHAEL R. CZERNIAK
(Edwards and University of Bristol)

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Carbon tetrafluoride (CF4) is a widely-used PFC (perfluorocarbon) gas in the semiconductor industry, primarily as a convenient source of fluorine for the purpose of etching silicon-containing layers. The rate of increase of its emission into the atmosphere has been purposefully restricted since the mid 1990’s by proactive industry initiatives, especially under the auspices of the WSC (World Semiconductor Council), due to the realisation of the significant climatic impacts of this gas; not only does it have a high Global Warming Potential (GWP), it also has an extremely long atmospheric lifetime (50,000 years) due to the strength of the carbon-fluorine bonds. Measures to limit emissions of this gas have included optimisation of process steps, the introduction of exhaust gas abatement systems and the replacement of PFC CVD (Chemical Vapour Deposition) chamber cleaning gases by NF3, associated with the roll-out of 300mm processes around the turn of the millennium. Significant benefits of this change were that NF3 has a much lower GWP, shorter atmospheric lifetime, and is efficiently converted into nitrogen and fluorine in a plasma. However the resulting reductions in emissions may not be quite as impactful as at first anticipated. This paper considers 2 mechanisms whereby CF4 can be generated from fluorine (derived from NF3); (a) in a chamber coated with carbon-containing materials (e.g. when using organic precursors) and (b) when the exhaust gas comes into direct contact with a hydrocarbon fuel (e.g. methane), and how this can be minimised/eliminated by suitable set-up of the equipment.

SESHA 2018 Speaker Biography

Professor Michael R. Czerniak
Environmental Solutions Business Development Manag Edwards and University of Bristol

Mike gained his PhD in Electrical Engineering at Manchester University (UK) in 1982. Starting his professional career with Philips, initially in their UK R+D labs & subsequently in the fab in Nijmegen, Holland. He had subsequent marketing roles at UK-based OEMs Cambridge Instruments, VSW and VG Semicon before joining Edwards 21 years ago. He has held various technical and marketing positions before beginning his current role 2 years ago. Mike has numerous published articles and patents to his name, co-chairs 2 SEMI standards committees, participates in the IRDS, is a UK PFC “expert” on the UN IPCC (Intergovernmental Panel on Climate Change, and now is a lead author) and has authored the chapter on Vacuum and Environmental issues in the Handbook of Semiconductor Manufacturing (2nd edition). He has been a Visiting Industrial Professor in the School of Chemistry at the University of Bristol since September 2017. Mike has been married for 39 years and has 2 grown-up children.

SESHA 2018 Symposium Abstract

Fluorinated Greenhouse Gas Emissions and Regulatory Update

Tim Higgs
(CH2M Hill)

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Recent studies have suggested that reported emissions of some greenhouse gases used in the semiconductor industry are inconsistent with measured atmospheric concentrations of those gases, suggesting that there is a gap between reported emissions and actual emissions. Greenhouse gas emissions calculation and reporting is complex, and there are many factors that may influence the apparent inconsistencies mentioned in these studies. There are multiple emission calculation methods in use in the industry, with variations in emission factors as well as different assumptions about the operation and performance of abatement equipment. This paper will evaluate the different results that could be obtained from typical operating fabs, depending upon the calculation method used (e.g. Tier 1, Tier 2, U.S. EPA GHG RR) and the assumptions made about performance and uptime of abatement equipment. The intent of this analysis is to determine whether such differences are a potential contributor to the observed gap between reported emissions and measured atmospheric concentrations. This paper will also provide an update on the status of worldwide actions to limit the use of hydrofluorocarbons (HFCs) that are important to the industry.

SESHA 2018 Speaker Biography

Tim Higgs
Air Quality Specialist CH2M Hill

Tim Higgs is an air quality specialist with CH2M with over 30 years of experience in the semiconductor industry. He is a registered professional engineer (chemical) in the State of Arizona. Tim worked for Intel Corporation from 1984 – 2015 in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency and climate change. He has worked with state and local regulatory agencies across the U.S. as well as in other nations on air pollution control regulations and programs, and has frequently consulted with U.S. EPA on air program matters of importance to the semiconductor industry.

SESHA 2018 Symposium Abstract

FCs Emission Factor and Next Steps Reduction emission for Taiwan’s Industry

Joey Lu; Daphne Cheng ; Chun Yu Chen
(Industrial Technology Research Institute (ITRI))

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Fluorinated Compounds (FCs) have the highest Global Warming Potential of all greenhouse gases identified to date by the Intergovernmental Panel on Climate Change (IPCC); their atmospheric lifetime is estimated to be 3,200 years. Several FCs used in electronics manufacturing including SF6, perfluorocarbons (PFCs), hydrofluorocarbons (HFCs) and heat transfer fluids (HTFs) are extremely potent greenhouse gases. Semiconductor and Panel Display manufacturing are the two most significant sources of FC emissions where these gases are used for equipment cleaning and plasma etching in Taiwan. The two industries have their own association in Taiwan, TSIA and TTLA. The two associations have joined with WSC and WDICC to reduce FC emissions. They reached their target 1st stage before 2010. However, their FCs gas emissions are still high and have to be greatly reduced. The two associations have to make some effort to face these difficult challenges. In this paper, the authors focus specifically on FC usage and emission factors outlining the next steps and how they are preparing plans to meet new targets under regulatory requirements and extending their environmental protections.

SESHA 2018 Speaker Biography

Joey Lu
Senior Researcher Industrial Technology Research Institute (ITRI)

2002~2017 ESH project leader for Semiconductor Industrial Association, TFT-LCD Association, Photo-electrics Industrial (LED) Association, Photovoltaic Industry Association and IC Packaging Testing Industry Committee. 2003~2017 Official delegate of World Semiconductor Council and World Display device Industry Cooperation Committee for TSIA and TTLA. 2009~2017 Project leader for Taiwan Semiconductor Association GHG emission and reduction verification process. 2009~2017 Project leader for Taiwan TFT-LCD Association GHG emission and reduction verification process

SESHA 2018 Symposium Abstract

Heretics Guide to Hacking EH&S

Josh Franklin
(U.S. Air Force Safety Center)

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Normal safety professionals follow the rules, color within the lines, and plateau in stable and secure roles within their organizations. Heretical professionals, on the other hand, question cultural paradigms, scribble new pathways, and drive improvement across companies. When organizations demand the deep change that only heretics can incite, will EH&S professionals be ready? That’s the question Josh has been investigating for years, most recently at the Air Force Safety Center as the Safety Career Field Manager, responsible for the development, training, and leadership of 781 military safety professionals across the globe. In this presentation, Josh shares what he learned about affecting change in large organizations. He also unpacks a path to professional development that is reflected in the National Safety Council’s “Rising Star of the Year” award to Airmen for eight consecutive years (the only organization to have this honor).

SESHA 2018 Speaker Biography

Joshua Franklin, MBA, CSP, CET, ARM, CPCU, SMS, STS
Safety Career Field Manager U.S. Air Force Safety Center

Josh regularly speaks to 1,200+ military safety professionals in his role as the U.S. Air Force Safety Career Field Manager, in both live venues of 100-300 persons and in monthly video talks about various safety topics. As an Embry-Riddle adjunct instructor, he’s taught classes on strategic management and safety. Most recently, Josh has spoken at the 2015, 2016, and 2017 National Safety Council Congresses on the topic of professional development. He serves as Board Member and Ambassador for the Board of Certified Safety Professionals (BCSP).

SESHA 2018 Symposium Abstract

TMAH Toxicity and Controls Update

Ernest Timlin; Brooke Tvermoes; Thomas Diamond
(SUNY Polytechnic Institute, Albany, NY and IBM Corporation, Boulder, CO)

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TMAH Toxicity and Controls Update Purpose There are a growing number of semiconductor processing applications which propose to use TMAH at high concentrations and sometimes at elevated temperatures. Tool vendors, chemical formulators, and some semiconductor companies may not be aware of TMAH’s high acute systemic toxicity. This presentation describes: – Current information on the acute systemic toxicity in humans and supporting data in animals. – Results of toxicity testing in animals, sponsored by IBM, and others, on the effects of repetitive dermal contact and the potential underlying mechanisms of toxicity. – Evaluation and safety precautions implemented by IBM and others to minimize the potential risk.

ESHA 2018 Speaker Biography

See ALL Authors Affiliations, Positions and Education Below
Safety and IH Engineer SUNY Polytechnic Institute, Albany, NY and IBM Corporation, Boulder, CO

Bradford Brooks Ph.D. is an IBM Fellow and Corporate Director of IBM’s Toxicology and Chemical Management programs globally. He also is a member of IBM’s Academy of Technology. Kathleen DiZio MA DABT (deceased) was a Senior Toxicologist in IBM’s Corporate Toxicology and Chemical Management team. Thomas Diamond MS CIH is currently Vice President: Environmental, Safety, Health and Facilities Engineering and Academic Laboratory Support at SUNY Polytechnic Univ., Albany. Richard Melville MS CIH is a senior staff engineer with GlobalFoundries in Hopewell Junction, NY with over 30 years of professional safety and health experience with expertise in exposure assessment, chemical safety, asbestos, ergonomics, lasers, ventilation, safety and health audits, risk assessment and communication, regulatory compliance, personal protective equipment, hazard communication, vapor intrusion, and epidemiology study support. Mr. Melville received an M.S. in occupational and environmental hygiene from New York University. Ernest Timlin MS CIH CSP is currently a safety and industrial hygiene engineer at SUNY Poly College of Nanoscale Science and Engineering, in Albany, New York. He previously worked at IBM Microelectronics and GlobalFoundries semiconductor operations in various corporate and manufacturing plant safety and IH roles. He received his B.S. from Clarkson University and M.S. from Rensselaer Polytechnic Institute. Brooke Tvermoes Ph.D is a Senior toxicologist at IBM with experience in toxicological research, exposure assessment, risk assessment, and regulatory support covering a broad range of industrial chemicals and metals. Her primary areas of interest include quantitative human health risk assessments and the development of health based toxicity values.

SESHA 2018 Symposium Abstract

TMAH and its Alternatives: Where Do We Go From Here?

Kevin McLaughlin; Hidde van Assendelft; Jerry Windisch
(SACHEM Inc., Austin, TX)

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The semiconductor industry has a long history of using high-pH chemicals directly and in formulations for lithography, etching, cleaning, polishing, and stripping applications. As performance and purity requirements increased in early fabrication processes, tetramethylammonium hydroxide (TMAH) quickly supplanted metal-containing hydroxides and has long reigned as the strong base of choice in fab operations. However, concerns over the toxicity of TMAH combined with reports of serious incidents involving TMAH exposure have greatly increased scrutiny of this material by both the semiconductor industry and regulatory entities. This has created a strong and growing interest in identifying and incorporating alternatives to TMAH in semiconductor processing. As a leader in quaternary chemistry, SACHEM has long championed TMAH safety and has developed a portfolio of alternative products for use in semiconductor applications. In this presentation, we will review these alternatives, their performance characteristics, and provide an overview of safe handling practices for these types of chemicals. In addition, we will discuss technology available for the recovery and reuse of quaternary compounds such as TMAH and its alternatives.

SESHA 2018 Speaker Biography

Kevin J. McLaughlin
Business Director, Electronic Materials SACHEM Inc., Austin, TX

Kevin McLaughlin is Business Director, Electronic Materials for SACHEM. He joined SACHEM in 2013 and is responsible for business management, strategic and product marketing in the electronics industry, including IC and packaging, panel display, and printed wire board applications. Prior to SACHEM, Kevin spent seven years at ATMI as Segment Manager, Surface Preparation Technologies, directing product development and marketing for wet process applications. During his twenty years in the semiconductor industry, Kevin has also worked in process engineering, account management, and marketing positions at equipment and materials companies including STEAG Electronic Systems, Tokyo Electron, Mattson Technology and SCP Global Technologies. Prior to the semiconductor industry, Kevin spent eight years in R&D, technical service and marketing positions with Vista Chemical and Alcoa Industrial Chemicals. Kevin holds a BSChE from Purdue University and obtained his MS and PhD in Chemical Engineering from the University of Texas at Austin.

SESHA 2018 Symposium Abstract

Semiconductor MACT Review and Update

Tim Higgs
(CH2M)

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A recent Federal court ruling found the Environmental Protection Agency (EPA) is not in compliance with its statutory obligations under the Clean Air Act and must complete technology and residual risk reviews for nine sources including semiconductor manufacturing by October 1, 2021. Mr. Higgs will present a review and update of semiconductor Maximum Achievable Control Technology (MACT) requirements established under the CAA.

SESHA 2018 Speaker Biography

Tim Higgs
Air Quality Specialist CH2M

Tim Higgs is an air quality specialist with CH2M with over 30 years of experience in the semiconductor industry. He is a registered professional engineer (chemical) in the State of Arizona. Tim worked for Intel Corporation from 1984 – 2015 in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency and climate change. He has worked with state and local regulatory agencies across the U.S. as well as in other nations on air pollution control regulations and programs, and has frequently consulted with U.S. EPA on air program matters of importance to the semiconductor industry.

SESHA 2018 Symposium Abstract

Perspectives on Point of Use Abatement Measurements

Alex Bellon; Steve Hall; Bryan Benaway
(Spectrum Environmental Solutions)

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Having a well-developed POU monitoring plan can bring significant value to a FAB form both an environmental and monetary perspective. POUs are notoriously difficult to maintain in optimal working order and often are not verified for GHG DRE or combustion byproduct emissions during normal operation. POU effluent gas analysis by Fourier transform infrared (FTIR) is an easy way to monitor in real time for GHGs and criteria pollutants without interrupting wafer processing. This presentation details a few of the sampling techniques that can lead to more efficient operation of and lower emissions from POUs.

SESHA 2018 Speaker Biography

Alex Bellon
Senior Scientist Spectrum Environmental Solutions

Alex Bellon, Spectrum Environmental Solutions Alex Bellon is currently employed as a Senior Scientist at Spectrum Environmental Solutions in Austin, Texas. His responsibilities include gas-phase emissions monitoring using various techniques. His work has been focused on emissions testing using FTIR, analysis, interpretation and validation of FTIR data, and training others on the usage of the FTIR equipment and test protocols. Alex earned a Bachelor of Science in Physics from the University of Texas at Austin.

SESHA 2018 Symposium Abstract

Establishing Robust Capabilities to go Beyond RBA (formerly EICC) Audits

Sayed Naimi
(Micron)

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For years, companies have passed audits by providing paperwork that was created to reflect conformance, but not the reality of their operations. When the audit is about social and environmental issues, paperwork is insufficient for the well trained/informed auditor. A robust and mature system is required to show not only compliance to the requirements but the ability for continuous improvements. RBA (Formerly Electronic Industry Citizenship Coalition) Code of Conduct is normally embedded into its member companies Code of Conduct. As a result, compliance is a matter of daily practice, it reflects how a company lives, adapts and matures over time! Building capabilities to mature the management system in the company and its supply chain is the best way to solidify the foundation of compliance and enable growth and improvements overtime. Using a variety of processes Micron has utilized continuous improvement to establish an RBA program recognized by our customers as best in class. As a result of these process Micron RBA program has gone from average performance to near perfect scores with the capability to adapt to the continually evolving RBA requirements. Sayed will share major aspects of this program employed by manufacturing sites to identify best known methods to build cultural awareness and ensure commitment to the RBA Code.

SESHA 2018 Speaker Biography

Sayed Naimi
Sr. Manager RBA Compliance Global Supply Chain Micron

Sayed Naimi has worked in large technology companies for the last 36 years and is a Business Process Management expert. His passion about BPM is connecting business objectives to process objectives and ensuring the robustness of this linkage creates desirable business results. Sayed has helped Micron develop several companywide processes that leverage data driven decision making and empower team member to collaborate on making the right choice for the company and customers. He has held several position that emphasize Business Process, Continuous Improvement, Quality and Supply Chain. Currently Sayed is the Senior Manager for RBA Compliance.

SESHA 2018 Symposium Abstract

Intel’s Continued Journey on Supply Chain Green Chemistry Implementation for Safer Chemical Choices

Fumie Weiby; Rebecca Jensen
(Intel, Hillsboro, OR)

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Intel announced bold environmental goals back in 2012. One of the 2020 environmental goals is in Green Chemistry implementation for our supply chain. The goal states “Implement an enhanced Green Chemistry Screening and Selection Process for 100% of new Chemicals and Gases.” Since 2012, Intel has been proactively performed benchmarking and surveying other industries as well as our supply chain specifically for our chemical and gas suppliers to understand the industry norm regarding Green chemistry implementation and Green Chemistry practices in our own supply chain. We presented our survey results and 2020 environmental goal and initiative at the SESHA conference in 2017. Since then, Intel has chosen a Green Chemistry screening tool and process to perform a pilot and established a Corporate Green Chemistry Screening Criteria. In this presentation, Intel will share our audiences our tool selection process, key learnings from the pilot, issues in Green Chemistry screening, and data management. We will also present our next key critical steps towards successful 2020 environmental goal achievement and challenges that we may face the semiconductor industry will face along the way. During our Intel’s journey in supply chain Green Chemistry implementation, we have learned some key norms in Semiconducting Industry around Green Chemistry. Currently, there is no industry standard, standardized tool, and strong driver in Green Chemistry for semiconducting manufacturers. Since concepts of Green Chemistry (12 principles of Green Chemistry) covers a wide range of areas, each company/industry has developed their own interpolations interpretations of Green Chemistry achievement. It is clear that a strong continued collaboration and development of standardized methodology in Green Chemistry screening are a few of the key areas to improve in the Semiconducting Industry. This presentation/paper will focus on developing a standardized methodology in Green Chemistry screening to improve alignment in measuring Green Chemistry success within the industry, and provide an update on Intel’s current issues in meeting Green Chemistry goal.

SESHA 2018 Speaker Biography

Fumie Weiby
Supply Chain Sustainability Engineer Intel, Hillsboro, OR

Fumie has been working at Intel over 12 years and held various positions including environmental engineer, facility manager, and safety/IH engineer. Prior to joining Intel, Fumie worked as an environmental consultant for 6 years to manage various environmental projects across the country and oversea including China and Japan. Currently, she works as a Supply Chain Sustainability Regulatory Engineer to manage chemical and gas suppliers for global chemical regulatory compliance as well as drive Intel’s Green Chemistry initiatives. She has a B.S. in Environmental Health and Safety from Oregon State University and a M.S. degree in Environmental Engineering from the Oregon Health and Science University. Outside of work, she is a long-distance runner and enjoys all kinds of outdoor sports. She also enjoys spending a time with her family including her husband and three daughters (10, 8, and 4 years old).

SESHA 2018 Symposium Abstract

Metal Organic Liquids in R&D: sharing the learning curve

Alain Pardon
(IMEC )

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Metal organic liquids are in use in R&D facilities for over more than a decade. Not only the amounts of materials used in ALD, MOCVD and EPI are increasing but also the variety of alkyl metals in advanced processing is still growing and will grow the following years. Some of these compounds are toxic and highly reactive hence pose serious risks for staff and infrastructure. A dedicated risk assessment method and adequate engineering controls must be in place before using any of these products. This presentation will illustrate the risk assessment methodology that is used taking into account the supply characteristics, process conditions and emergency handling. In this presentation we will also share the learning curve with incidents, engineering controls that worked and did not work.

SESHA 2018 Symposium Abstract

Fireball 102 [Metal Organic (MO) Fire Suppression Challenges]

Daniel Mitchell
(KFPI LLC)

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The semiconductor industry continues to develop new process technologies to meet ever-changing demand requirements and achieve new manufacturing milestones. The development and use of new “Energetic” materials (pyrophoric, water reactive, and unstable chemicals) continue to move quickly from R&D to full production in ALD, MOCVD, PECVD, Epi, etc. Furthermore, the quantity of these chemicals stored in bulk delivery systems is also increasing at a rapid pace. The International Fire Code (IFC) requires that equipment using pyrophoric liquids must be equipped with “approved FSS” (Fire Suppression System) yet the only current solutions are to smother, delay, or accelerate the fire reaction – All of which can make the fire scenario worse, not better. This presentation includes actual KFPI fire test videos from various small and large-scale TMA fire tests demonstrating the effectiveness (and lack thereof) of all current FSS options. It will also highlight the increasing hazards associated with future MO R&D, which add toxicity and nanoparticle exposure to pyrophoricity. This presentation will also provide a brief overview of the only effective solution for MO fire safety and control… LCAS.

SESHA 2018 Speaker Biography

Daniel Mitchell
VP of Sales KFPI LLC

Daniel Mitchell is the Vice President of Sales for KFPI LLC who specializes in fire safety solutions for the global semiconductor industry with offices throughout USA, Asia, & Europe. Daniel leads the KFPI sales and market development taskforce for the state-of-the-art LCAS (Leak Containment & Abatement System) for pyrophoric liquid metal organic chemistries used in semiconductor industry. Daniel has over 20years of experience developing and managing global semiconductor technology projects, including the heating and handling of chemistries, process temperature control, and equipment fire safety.

SESHA 2018 Symposium Abstract

ESH Consideration for Using Pyrophoric or Water-reactive Materials in Semiconductor Manufacturing Facility

YuMin Wang
(Taiwan Semiconductor Industry Association)

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Pyrophoric and water-reactive materials like Trimethyl Aluminum, PDMAT or TDMAT have been used in advanced semiconductor manufacturing processes widely. These chemicals can ignite spontaneously while contacting air, or moisture in the air, or water, therefore they cannot be exposed to the atmosphere by all means. For semiconductor company, all work incorporating new pyrophoric or water-reactive materials must be reviewed by EHS experts in advance, The purpose is to eliminate or well control hazards. In order to have effective ESH review, material suppliers should provide sufficient and accurate ESH information to users. At least, following information must be well collected before use, like physical and chemical characteristics, health effects in the worst case, water reactivity, instability, by-products contained, and engineering control measures. All these information can help us to simulate the possible hazardous emissions and work out adequate abatement and control systems. After doing these, risk of fire, cleanroom contamination, external environmental pollution or other facility-related events can be reduced. Besides that, due to pyrophoric or water-reactive materials often have low vapor pressure, so their supplying systems are normally different from traditional hazardous gases, PH3 or SiH4. Most of time, the containers of pyrophoric and water-reactive materials were located inside or close to process tools, so special considerations are required. For example, the supplying system should be designed with good isolation, gas capacity should be limited and dual or real time monitoring should be in place. This paper will share our consideration, management principles and some design practices as the minimum criteria of pyrophoric and water-reactive material storages, transportation, use and disposal. By following those rules, we hope to well protect both of company’s assets and workers.

SESHA 2018 Speaker Biography

Wang, YuMin
Technical Manager Taiwan Semiconductor Industry Association

Technical manager of Corporate ESH Division

SESHA 2018 Symposium Abstract

Regulatory Adoption of Normalized Performance Metrics, and Response from the Semiconductor Industry

Kevin Wolfe; Brian Raley; Tim Yeakley
(Intel, Hillsboro, OR)

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Historically semiconductor associations have voluntarily gathered and monitored environmental performance indicators on a normalized, or per-unit-of-production basis to allow for benchmarking with other regions and to monitor environmental performance trends over time. Recently however, Chinese regulators have indicated intent to adopt a production-unit-normalized performance criteria as a required regulatory compliance criteria in a way that will place the more complex manufacturing operations at a relatively higher risk of noncompliance. Indications are that regulators in other geographies could also eventually adopt similar normalized metrics as compliance requirements. The intent of this session is to raise awareness of this regulatory development in China, gather input from SESHA attendees on what the implications to manufacturing might be, identify the most appropriate way to respond, and discuss how a normalized metric that incorporates a measure of manufacturing-complexity in addition to per-unit-of-production could be integrated into a regulatory framework. In this way the semiconductor industry may progress towards becoming a more unified voice that is more capable of working with regulators to ensure their need to promote environmentally responsible manufacturing is met, while simultaneously ensuring that further development of semiconductor manufacturing is not unfairly constrained.

SESHA 2018 Speaker Biography

Kevin Wolfe
Corporate EHS Water Program Owner Intel, Hillsboro, OR

Kevin Wolfe has 18 years of EHS experience, working with Intel Corporation in a variety of roles. He holds a B.S., M.S. and M.A. degrees from the University of Minnesota. He currently holds the position of Water Program Owner within Intel’s Corporate EHS Environmental group.

SESHA 2018 Symposium Abstract

Risk Based Process Safety (RBPS) –  It’s a Journey, Not a Destination

Jeff Frazier; Steven Hawkins
(Micron Technology / Enviromental Resources Management (ERM)

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Process safety focuses on the prevention of incidents involving leaks, spills, fires or explosions by making sure that facilities are well-designed, safely operated and properly maintained. In particular, Process Safety Management (PSM) ensures that facilities are designed and engineered properly with systems in place to monitor and control hazards. PSM may also be considered the result of a range of technical, management and operational systems working together to achieve the desired outcome of eliminating process safety hazards and events, and to maximizing safety for team members, facilities and communities. When the desired outcome is not achieved, a process safety incident occurs. In this presentation, we will show why Micron Technology decided to embark on the journey of process safety management, the process of designing a global Risk Based Process Safety program, and the challenges and lessons learned during the development and implementation of the program.

SESHA 2018 Speaker Biography

Jeff Frazier
Corporate Process Safety Manager Micron Technology / Enviromental Resources Management (ERM

Jeff J. Frazier, Corporate Process Safety Manager Micron Technology 8000 S. Federal Way, Boise, Idaho 83707 208.363.3617 Jefffrazier@micron.com Mr. Frazier has over 35 years of experience in Semiconductor Manufacturing with a focus in Process and Equipment Engineering. Over the last 5 years Mr. Frazier has focused on the development and implementation of both a global PSM team and a global RBPS program at Micron Technology. Jeff received his Electronic Engineering Degree in 1991 from ITT Technical Institute and is currently the Corporate Process Safety Manager (PSM) at Micron Technology ___________________________________________________________________ Steven C. Hawkins, Partner Environmental Resources Management (ERM) 9825 Kenwood Road, Suite 100, cincinnati, OH 45242 513.830.9030 steve.hawkins@erm.com Mr. Hawkins has over 23 years of experience in environmental, health and safety consulting with a focus in development and implementation of Process Safety Management (PSM) and Risk Management Planning (RMP) programs. Steve has designed, implemented and/or audited PSM/RMP programs for a variety of industrial clients in various sectors including: mid-stream and down-stream oil & gas, chemical, pharmaceutical, automotive, food and beverage, power, metals, mining, semiconductor and general manufacturing. In addition to a strong focus on OSHA’s PSM Standard and EPA’s RMP Rule, Mr. Hawkins has extensive work globally with Risk Based Process Safety (RBPS) programs for clients in the following countries: Argentina, Belgium, Brazil, China, Japan, the Netherlands, Singapore, Taiwan, and the United Kingdom. Mr. Hawkins is current the lead technical resources working with Micron Technology, Inc. on development and implementation of a global RBPS program. Steve has a BSME from Clemson University and is a Certified Professional Environmental Auditor (CPEA) and Certified Process Safety Auditor (CPSA). He currently is the Managing Partner for ERM’s North American Process Safety Practice.

SESHA 2018 Symposium Abstract

ASM’s Implementation of New Product Safety Engineering Program

Tara Smithers
(ASM, AZ)

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The equipment designers within the semiconductor industry have learned a lot over the last 25+ years about hazards and how to control the potential risks. They have documented these learnings in the various safety guidelines, standards, regulation and directives that are currently published. In total, these safety regulations have been a very positive resource to help prevent known hazard situations. The painful reality is that there are thousands of pages of safety design requirements to be considered, and this number grows greater each year. They don’t teach this information at colleges or universities. So, how does the industry transfer the knowledge of these standards to the equipment designers? The Product Safety Engineer cannot facilitate as a “safety cop” and check each and every design after it is designed; our industry is too fast paced for that. The only successful way to design safe and compliant tools is to share the responsibility and knowledge among the cross-functional teams that design the equipment. ASM has taken a two-tier approach to close this knowledge gap. • Continued Design Engineering Training • Published internal ASM Product Safety Design Guidelines. The first part to successfully transfer the knowledge of safe and compliant design requirements is Continued Engineering Training. At ASM, we have started a 4 Phase Training Program. The second part of the program is the Product Safety Design Guidelines. These are documents that contain compliance information and BKMs by subject matter (i.e. information to reference after the training). They reference various safety and compliance standards/directives that were used to create the document – reducing thousands of pages into a few. ASM uses an online WIKI program to provide engineers with important information that is easy to navigate and search through. These Product Safety Design Guidelines can be accessed through links in this WIKI as well as a link to the full printable PDF. There are also pictures and examples of BKMs and non-BKMs/non-compliances in each document. With the face to face continued training and the Design Guidelines, ASM hopes to increase the knowledge of the design engineers and share the responsibility and knowledge of producing safe and compliance equipment.

SESHA 2018 Speaker Biography

Tara Smithers
Senior Product Safety Engineer ASM, AZ

Tara Smithers has a Chemical Engineering Degree from Arizona State University. She has spent the last 3 years gaining product safety knowledge as a Product Safety Engineer at ASM. Tara has focused on the design, testing, and evaluation of many ASM product lines (EPI, ALD, Etch) to both SEMI S2 and Machinery Directive requirements. She utilizes formal risk assessment process to justify engineering changes to ensure ASM America’s designs are robust and fail safe. In addition she actively participates on ASM’s Global Product Safety Council, helping to create custom product safety training material, and ASM internal design guidelines. She also plays a critical role in root-cause investigation of significant incidents and applies Effective Problem Solving (EPS) techniques to ensure the reason for incident is clearly understood and helps put measures in place to prevent it from happening again. Prior to ASM she managed an R&D anodize and thermal spray department while supporting the EHS responsibilities for the site. The technical and EHS background blended nicely for a career in Product Safety.

SESHA 2018 Symposium Abstract

Flammable Exhaust Management – Methods for Analysis and Control

Leslie Swann
(Micron Technology, Inc., Boise, ID)

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Semiconductor processes use many flammable materials. These can be process inputs or generated as byproducts. When used under vacuum conditions the material reaction rate is slowed. However, as the process is exhausted through the vacuum pump and transitions to near atmospheric pressures, the flammability of the waste gas must be evaluated and controlled to prevent fires and explosions which can result in employee injury, equipment damage, and production loss. Best practice for flammable exhaust control is dilution of flammable mixtures yet methods for detailed analysis are not widely published. This presentation will provide flammability calculation methodologies and explore the impact of operational conditions on material flammability. In addition to the technical background for flammability calculations, process examples and engineering controls that can reduce exhaust dilution flows will be presented. Semiconductor manufacturers can use the calculation practices and control options presented to accurately perform process hazard analysis and safely design flammable process exhaust systems.

SESHA 2018 Speaker Biography

Leslie Swann
Principal Engineer, Process Hazard Analysis Micron Technology, Inc., Boise, ID

Leslie Swann is a Principal Process Hazard Analysis Engineer at Micron Technology, Inc.’s research and development facility in Boise, Idaho. Leslie has 14 years of experience in the semiconductor industry, including roles in process engineering, environmental engineering and compliance, and process safety. Leslie has a B.S. in Chemical Engineering from Montana State University, a M.S. in Water Resources & Environmental Engineering from Villanova University, and is a licensed Professional Engineer (Chemical) in the state of Idaho.

SESHA 2018 Symposium Abstract

Alternative First Aid Procedure for Eye Contamination by HF

Georgia Latham
(ON Semiconductor, Phoenix)

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Exposure of HF fluid or vapors can cause severe injury to the eyes. It is paramount that immediate treatment be administered. For many years, the gold standard of first aid treatment for HF splashes to the eyes has been a pre-mixed solution distributed by the Calgonate Corporation (a single source supplier of the solution). Approximately two years ago, the company stopped supplying the solution due to problems certifying their primary supplier. Customers were told to retain the current stock, regardless of the expiry date on the bottles – the premise being sterility is maintained as long as the bottles remain sealed. Some customer’s supplies are more than two years expired, which presents a concern to medical professionals regarding the use of expired topical medications. (The Calgonate gel – for skin contamination, was not impacted by their supplier issue.) HF liquid exposure to the eyes has a poor prognosis, but exposure to the HF vapors is better. Corneal opacification secondary to vapor exposure usually clears without residual effects, following immediate treatment. Despite the prognosis being less than desirable, treatment should begin immediately. Neither Zephiran or the gel form of calcium gluconate can be used in the eyes; it is designed for topical skin use only. This presents an opportunity for medical professionals who are concerned about using expired Calgonate Eyewash. An alternate treatment (with a prescribed formula and a step/action table) for acute eye exposure to HF, has been developed by medical professionals outside of the semiconductor industry. Items necessary to formulate the irrigation solution, are readily available. Occupational physicians are willing to prescribe the ampules of injectable calcium gluconate to be stocked on-site, for occupational health nurses to mix the solution at the time of need. The application of this treatment is most appropriate for Occupational Health use within the semiconductor industry, and is an acceptable work around to the supplier shortage.

SESHA 2018 Speaker Biography

Georgia A. Latham, RN, CCM, CLNC
Occupational Health Resources Manager ON Semiconductor, Phoenix

Georgia is an RN, with over 20 years in the field of Occupational Health Nursing & Industrial Hygiene, with 20 years in the semiconductor industry, and is currently the North American regional manager of Occupational Health Resources for ON Semiconductor. She is a certified case manager with extensive experience in worker\’s comp and is a certified legal nurse consultant. She has been a Nurse Educator in Disease Management, Case Management, and Wellness. She holds RN licenses in the following states: NY, CA, OR, AZ as well as the compact states.

SESHA 2018 Symposium Abstract

Next Generation Monitoring and Reporting: Drone & Automated Sampling Technology

Judith Aasland
(CleanAir Engineering, Sumner, WA)

This presentation will provide a preview and discussion of the next generation technology that is currently being developed to support industry. Through the implementation of remote and automated sampling technologies, site specific data programming and cloud based software applications are being developed to monitor emissions and operational processes 24 hours a day. Within the next several years, this interactive technology is expected to normalize facility management systems though the continuous generation of accurate process, emissions, and ambient monitoring data.

SESHA 2018 Speaker Biography

Judith Aasland
Senior Technical Sales Leader CleanAir Engineering, Sumner, WA

With over 30 years of experience in the air measurements industry, I have worked closely with clients from all industries to define proactive emissions test programs based on internal engineering and applicable regulatory requirements. I have previously worked for Am Test-Air Quality, TRC Environmental, The Avogadro Group and Montrose Environmental. Currently, I serve the Pacific Northwest from my Happy Valley, Oregon office. Happily married for 33 years to Mark, we have two daughters attending local colleges in Portland.

SESHA 2018 Symposium Abstract

Drones and Industrial Applications: a Safer Alternative

Lauren Blazeck
(Intel Corporation)

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Unmanned Aircraft Systems, or Drones, are being utilized in industrial applications to minimize human exposure to hazards, labor costs, and time costs. Learn how to become FAA certified to operate drones for commercial applications and how drones may improve the environmental, health, and safety programs at your facility.

SESHA 2018 Speaker Biography

Lauren Blazeck
Engineer Intel Corporation

Lauren Blazeck, P.E., is an Environmental Engineer with Intel Corporation. Lauren has worked for Intel Corporation for six years and has a background in water treatment and environmental engineering. She is also a member of the Intel Drone Team.

SESHA 2018 Symposium Abstract

Applying FTIR multigas measurement technology to solving plant air quality issues.

Jim Cornish
(Gasmet Technologies)

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The analytical technique of fourier transform infrared (FTIR) gas analysis has been traditionally limited to either a laboratory or a fixed/ permanent installation. Pioneered by Dr. Albert A. Michelson in the 1890’s with his development of the interferometer which involves moving a finely balanced mirror to generate an interferogram and combined with the complex computations (fourier transformation) requiring a powerful computer this analytical technique while recognized and widely used for accuracy and rapid multi-component gas analysis was disregarded as a field technique. Develops in optical engineering and the advent of ever faster and faster computer processing chips have further refined FTIR so the powerful analytical technique once reserved for the laboratory is now available for plant safety personnel, emergency responders and engineers to use a portable FTIR for various applications including further understanding the processes, tightening the controls on their processes through improved quality control, reducing losses and environmental discharges. A new generation portable FTIR gas analyzer worn on the user’s back or carried over their shoulder brings new monitoring opportunities to the semiconductor industry. Providing emergency responders with a powerful tool to identify and quantify “unknown” toxic gases within minutes of arriving at the incident site means decisions and directives can be issued so protecting people and plant in an expeditious fashion. For safety officers, one tool to check leaking cylinders from the many toxic gases sorted on site ranging from Silanes, hydrogen chloride, phosphine, arsine, PFC’s, hydrogen fluoride, SO2, ammonia, diborane and hydrogen bromide provides a powerful and time saving means to protect personnel from toxic gas exposure and prevent expensive product losses. Measuring GHG’s escaping in process ducts and plant emission stacks by moving a portable FTIR analyzer and sampling system around to the various sources provides environmental engineers a near-real time picture on how tight their controls and scavenging systems are operating. This paper presents a new generation of analytical capabilities that is available for semiconductor safety and process engineers to measure multiple toxic gases in near real-time in the their work place environment.

SESHA 2018 Speaker Biography

Jim Cornish
Sales & Support Manager Gasmet Technologies

Applied Chemist with 17 years experience specializing in applying FOurier Transform Infrared (FTIR) Spectroscopy to helping clients’ solve their emergency response & fugitive emissions air quality problems.

SESHA 2018 Symposium Abstract

Advanced Waste Gas Abatement Concept for Epitaxy Processes

Angela Bayler
(centrotherm clean solutions, Blaubeuren, Germany)

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Epitaxial growth (EPI) of Si, SiGe (strained silicon) and SiC layers has recently gained in importance for the manufacturing of modern semiconductor and power electronic devices. Due to the unique process chemistry, which involves the utilization of high flows of pyrophoric, flammable and corrosive gases (H2, SiH2Cl2, SiHCl3, HCl etc.), these applications can be regarded as very safety-critical and challenging for any waste gas abatement system. In addition to providing for safe and reliable treatment of the process effluents, the waste gas abatement system has also to maintain a constant pressure in the exhaust line in cases where the EPI process is operated at atmospheric pressure. This paper reviews different abatement technologies in terms of their suitability to handle EPI process exhausts and presents an advanced modular abatement concept designed to meet all the unique challenges mentioned above.

SESHA 2018 Speaker Biography

Angela Bayler
Director Technology & Business Development centrotherm clean solutions, Blaubeuren, Germany

Dr. Angela Bayler is Director of Technology & Business Development for centrotherm clean solutions and has more than 15 years of professional experience in the field of waste gas abatement and recycling in the semiconductor, photovoltaic and polysilicon manufacturing industries. Angela has a Diploma degree in chemistry and PhD from the Technical University of Munich and spent her early career in R&D of dry bed absorber materials at CS CLEAN SYSTEMS before taking up different positions at centrotherm clean solutions and centrotherm photovoltaics with the focus on technology & development, technical marketing & sales as well as project management of exhaust treatment applications.

SESHA 2018 Symposium Abstract

Metal-Organic Framework Materials: A New Generation of Nano-Adsorbents for advanced Electronic Materials Delivery and Abatement

Jose Arno; Mitch Weston; Glenn Tom
(NuMat Technologies, Skokie, IL)

Metal-Organic Frameworks (MOFs) are a new class of nano-porous materials with broad applicability in improving the safety, purity, and abatement of electronics materials. MOFs are comprised of organic ligands and metal units creating highly uniform crystalline structures. By changing the identity of the organic ligand and metal unit utilized in the MOF synthesis, the structure, surface area, pore size, and reactivity of the MOF can be modulated. ION-X is the first product using MOFs used to store and deliver dopant gases sub-atmospherically for ion implant applications. ION-X was evaluated and tested at key OEMs and customer sites demonstrating the safety and capacity improvements compared to other adsorbent systems. Due to their broad tunability, this new generation of adsorbent nano-materials provide an ideal platform to expand beyond the storage of ion implant dopant gases. Specifically, MOFs can offer the same safety advantages to deliver ultra-high purity gases at high flow rates for MOCVD, ALD, plasma deposition, and etch applications. In addition, MOF materials can be custom made with very passive surfaces to stabilize energetic and reactive materials. This can be accomplished through surface adsorption, molecular isolation, and pressure reduction. Finally, MOFs can be tailored to precisely separate or chemisorb specific gases for advanced abatement solutions. In this paper, we will describe the new class of adsorbents and discuss their EH&S advantages to deliver and abate electronic materials.

SESHA 2018 Speaker Biography

Jose Arno
Chief Technology Officer NuMat Technologies, Skokie, IL

Dr. Arno received a Ph.D. in physical chemistry from Texas A&M University. After graduate school he joined ATMI (later acquired by Entegris) as an analytical chemist working on characterizing hazardous gas effluents used during electronics manufacturing. His role expanded to manage R&D teams developing materials and adsorbents used in the semiconductor industry. His group invented and scaled-up and successfully transferred to high volume manufacturing the world’s highest density microporous activated carbon to adsorb arsine, phosphine and boron trifluoride gases used in the ion implantation. After ATMI, Dr. Arno joined Smiths Detection as Senior Director of RD&E developing ruggedized and portable FTIR, Raman, and ion mobility spectroscopy, and mass spectrometric analytical equipment for the defense and emergency response markets. Prior to joining NuMat, he became Vice President of Technology at NexPlanar (later acquired by Cabot Microelectronics). At NuMat, he is the CTO leading the technology organization developing and scaling-up metal-organic framework materials. He has proven records for inventing, developing, and scaling-up a number of commercially successful products related to advanced gas and materials delivery systems pollution control equipment, and chemical detection instrumentation. Throughout his career, Jose has authored 37 technical publications and holds 40 US patents for diverse applications.

SESHA 2018 Symposium Abstract

Catalase for Remediation of Hydrogen Peroxide in Semiconductor Wastewater

Peter Birschbach
(DuPont Industrial Biosciences, Rochester NY)

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Large volumes of hydrogen peroxide are used during the fabrication of semiconductors. Depending on local environmental regulations, downstream water recycling requirements and other factors many semiconductor fabricators find it necessary or desirable to actively remediate the residual hydrogen peroxide in their wastewater. Hydrogen peroxide remediation can be accomplished by a variety of methods including activated carbon, chemical reducing agents and enzymatic decomposition using the catalase enzyme. The use of catalase for decomposition of hydrogen peroxide has significant health and safety, environmental and logistical advantages over the other methods. Unlike the other methods, catalase decomposition of hydrogen peroxide yields water and molecular oxygen and thus does not contribute to total dissolved solids nor does it produce any harmful byproducts. Catalase is also much more suitable for downstream water treatment processes such as ion exchange, membrane filtration, copper recovery, and ammonia recovery. We will present data that clearly demonstrates that catalase is safe and sustainable, highly effective, and significantly less expensive than other peroxide remediation methods.

SESHA 2018 Speaker Biography

Peter Birschbach
Business Segment Leader DuPont Industrial Biosciences, Rochester NY

Expertise in product management, product development, process development, and applications to support the use of enzymes in the Industrial Markets and Textiles segments. Education in Molecular Biology (Northwestern University) and Engineering Management (Milwaukee School of Engineering).

SESHA 2018 Symposium Abstract

Polysilazane Waste Handling: Navigating Safety and Environmental Considerations

Deena Starkel, P.E.; Bob Gross
(Micron Technology, Inc. Boise, ID)

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Spin on dielectric (SOD) or spin on glass (SOG) is an interlevel-dielectric material that is applied in liquid form. Spin on dielectrics are a class of coated films that are spin cast by dispensing a liquid dielectric material on to a rotating wafer. Silicon dioxide (SiO2) film deposition by SOD provides benefits through simple processing, lower defect density, higher throughput, relatively low cost and elimination of hazardous gases. Polysilazanes are a common category of SOD chemistries that provide a silicon source for SiO2 film deposition. Despite the reduced risk associated with eliminating hazardous gases, polysilazanes present unique challenges for safe handling and waste disposal due to their physical properties and chemical reactivity. Polysilazanes are moisture reactive and decomposition results in the formation of hazardous byproducts including ammonia, hydrogen and silane gases. Byproduct gas generation from decomposition impacts safe handling, storage and transportation of waste. Polysilazane chemicals present unique hazards and risks that need to be understood when considering facilitation requirements for waste handling. Process safety impacts and environmental considerations can influence decisions regarding the best management strategy of polysilazane waste for a facility. Presented will be an overview of the physical properties and chemical reactivity of polysilazanes and methods to handle polysilazane waste based on process safety and environmental considerations.

SESHA 2018 Speaker Biography

Thomas M. Roberts
Principle Process Safety Engineer Micron Technology, Inc. Boise, ID

Tom Roberts is a Principle Process Safety Engineer with Micron Technology, Inc. in Boise Idaho. Tom Roberts has a Bachelor’s degree in Chemical Engineering from Montana State University, in addition to 15 years of experience in the semiconductor industry. Tom’s current area of focus is chemical process safety and process hazard analysis for semiconductor facilities systems. Tom has led multiple hazard analyses on semiconductor facilities systems utilizing Hazard and Operability Studies. Tom has experience leading incident investigations with regard to Process Safety incidents. Tom has additional experience in the design of specialty gas systems and pollution abatement systems supporting semiconductor fabrication.

SESHA 2018 Symposium Abstract

UL/ SESHA Courses

Steve Roberge
(SESHA Treasurer)

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SESHA has partnered with UL EHS Sustainability to develop courses specific to the semiconductor and high-tech industries, a collection of 18 modules designed by safety experts and adult learning specialists. This suite of online, on-demand courses, incorporating content from SESHA “boot camp” courses, provides a comprehensive safety training foundation for all employees who work in a semiconductor fabrication setting. Steve will demonstrate training modules and discuss how to access the training.

SESHA 2018 Symposium Abstract

Setting the Tone for Safety and Health as the CEO

Joe Morgan
(siY LLC)

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For over 3 decades Joe has seen the benefits of safety and health within his businesses and personal life. His original perspective came during his time as an environmental health and safety engineer, where he was focused on physical safety and protecting the environment. Through his personal experiences in a range of businesses from manufacturing to business services, he has created a cadence that engages employees, customers and suppliers in a conversation that establishes a culture of safety and health. People are more informed, take personal responsibility and have a higher level of accountability. Outline: The Safety and Health Journey – Stories Creating the expectation – Cadence Impacting People’s Lives – Expectations Re-defining – Creating Room for Involvement Owning the Results

SESHA 2018 Speaker Biography

Joe Morgan
Founder and Chief Strategist siY LLC

Joe has held executive leadership and board positions at well-known companies such as Standard Register and Sony Chemical Corporation. He has authored several articles and is frequently called upon as a guest speaker. He earned his MBA from Clark University in Worcester, MA. He holds a Bachelor of Science degree from Worcester Polytechnic Institute and a Bachelor of Arts from College of the Holy Cross.

SESHA 2018 Symposium Abstract

Branding EH&S and Sustainability as Risk Mitigating and Value Driving Programs within your Organization

Cristina Mendoza; John Baycroft
(Capaccio Enviornmental Engineering, Inc., Marlborough, MA)

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Strong branding is one of the most important aspects of a successful organization. It can become the differentiating factor in capturing value in the market place. The same concept can be applied to program and functional area branding within organizations. Creating and maintaining a strong brand for your EH&S and Sustainability programs helps to clearly demonstrate the added value of your functional area to the organization. It also ensures alignment with your organization’s broader, external brand. During the course of this presentation, we will discuss how strong internal branding can be used to gain support and drive goals within your organization. In addition, we will present case studies and examples where EHS and Sustainability programs utilize modern technology in conjunction with internal branding to communicate successes, mitigate risks and become essential business functions with a seat at the management table.

SESHA 2018 Speaker Biography

Cristina Mendoza
Env. Scientist/Sustainability Consultant Capaccio Enviornmental Engineering, Inc., Marlborough, MA

Ms. Mendoza leads Sustainability services at Capaccio and her expertise and experience include Corporate Sustainability Reporting, Global Reporting Initiative Reporting, sustainability strategy, and environmental program consulting. She is also versed in Greenhouse Gas Reporting and sustainability metrics tracking and analysis. She leads the Management Systems Group as well, and has experience in ISO 14001 management systems. Ms. Mendoza holds a Bachelor of Arts in Environmental Science, and a Master of Business Administration (MBA), both from Clark University in Worcester, MA. She sits as the Vice Chair of the Environmental Business Council (EBC) Ascending Professionals Committee, serves as an Ascending Professional representative on the EBC EBEE Awards Committee, and is an expert advisor to the Associated Industries of Massachusetts Sustainability Round Table. In 2017, Ms. Mendoza received EBC\’s Ascending Leader Award for her outstanding work and achievements.

SESHA 2018 Symposium Abstract

Semiconductor Industry Material Circulation in Taiwan – Challenge and Perspective

Fangming Hsu
(Taiean Semiconductor Industry Association)

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Waste management is a challenge in Taiwan in recent years due to limit downstream capacity of waste treatment, recycling and some illegal waste dumping cases occurred. Since the government in Taiwan announced the policy of promoting circular economy, domestic semiconductor industry is now keen to move its strategy from traditional waste disposal, recycling to more comprehensive material circulation. In response to actual needs and government’s policy, Taiwan Semiconductor Manufacturing Company, Ltd. (TSMC) set its waste management strategies as follows: • Source Reduction: Reduce raw material consumption for processes to minimize waste generation • Change wastes to resources: Refine wastes to increase value of used materials together with suppliers and contractors for semiconductor and other industries • Prevent illegal dumping by aligned contractor audit on association level TSMC manages process wastes as potential resources. The company does its best to categorize wastes at process tool side and collects them separately in order to raise recyclability, and also collaborates with external waste treatment and recycling facilities to develop new recycling measures. Finally, we see the volume of wastes sent to incinerators and landfills has been significantly reduced. In consideration of external contractors’ capability, TSMC migrated its strategy of waste recycling from totally off-site recycling to partially on-site recycling in 2017 by regenerating wastes on its fab sites. This has also changes some of wastes to resources successfully. Nowadays, TSMC is dedicating to upgrade the quality of some regenerated chemicals aiming to be reused in semiconductor manufacturing processes. The company will keep collaborating with material suppliers to develop more material recycling technologies to reuse chemicals in manufacturing process, such as sulfuric acid, ammonia, TMAH (Tetramethylammonium hydroxide).

SESHA 2018 Speaker Biography

HSU,FANGMING
Director Taiean Semiconductor Industry Association

Director of Corporate ESH Division

SESHA 2018 Symposium Abstract

Water Stewardship and Intel’s New Water Goal

Fawn Bergen; Todd Brady
(Intel Corporation; Hillsboro, OR and Chandler, AZ; Global Public Affairs and Sustainability)

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Water Stewardship Authors: Fawn Bergen, Intel Corporation – Global Sustainability Program Manager (Water/Carbon); Hillsboro, Oregon Todd Brady, Intel Corporation – Global Public Affairs and Sustainability Director; Chandler, Arizona Water is essential to the semiconductor manufacturing process. It is used to remove impurities from silicon wafers, run manufacturing facility systems (such as scrubbers), and in office buildings and landscaping. Although we have made significant investments in water management and conservation practices over the last 2 decades – through onsite water conservation systems, partnerships with local municipalities, and purchase of reclaimed water (to reduce freshwater withdrawals) – an increased focus on water-related risks has led us to look at how we can do more. And in September 2017, Intel became the first technology company to commit to restore 100% of global water use by 2025. This presentation will focus on Intel’s development of this goal, how it is being achieved, and lessons learned for other tech companies interested in developing a water stewardship target.

SESHA 2018 Symposium Abstract

Crisis Management Team/CFATS Training – Learnings From An Active Shooter Scenario Table Top Exercise

Aaron Zude; Thomas Grego
(Facilities & Safety Solutions, Newark, CA. Veeco Instruments Inc, Somerset, NJ.)

Every business has (or should have) a Business Continuity Plan that includes annual Crisis Management Team table top exercises. Additionally, most semiconductor and high tech companies fall under the Department of Homeland Security (DHS) Chemical Facility Anti-Terrorism Standards (CFATS) program and are required to conduct security training, exercises, and drills. This presentation will review the planning, preparation, local police department coordination and learnings from a recent Crisis Management Team table top exercise having the scenario of an active shooter inside the building during a Board of Directors meeting.

SESHA 2018 Speaker Biography

Aaron Zude
Owner & Principal Consultant Facilities & Safety Solutions, Newark, CA. Veeco Instruments Inc, Somerset, NJ.

Aaron is the owner & principal consultant at Facilities & Safety Solutions, which he founded in 2002. He is a Certified Safety Professional and has been involved in semiconductor and high technology EHS for 30 years.

SESHA 2018 Symposium Abstract

Hurricane Season 2017: Disaster Medical Response for an Unprecedented Season

Brian Sherin
(SLAC National Accelerator Laboratory, Stanford, CA)

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Beginning in August 2017, the Atlantic and Caribbean experienced an unprecedented hurricane season. There were ten hurricanes in a row, two back-to-back Category 5 storms, approximately 1500 fatalities, and a record amount of damage — a preliminary total of approximately $280B. With the start of Hurricane Harvey in late August, the Department of Health and Human Services spun up its entire National Disaster Medical Response System (NDMS) to provide support in the South and in US territories the Caribbean. This included deployments of approximately 4,000 personnel to Texas, Louisiana, Georgia, Florida, Puerto Rico, and the US Virgin Islands. This deployment involved the use of regional Disaster Medical Assistance Teams (DMATs) which are made up of volunteer medical and support personnel who, when activated, constitute federal resources to supplement or replace area-wide damaged health care systems. This presentation will cover the deployment of these teams, the impacts observed, and the challenges associated with such a large-scale response.

SESHA 2018 Speaker Biography

Brian Sherin
Deputy Director Operations/COO SLAC National Accelerator Laboratory, Stanford, CA

Brian Sherin has three decades of management, business and leadership experience in environment, health, safety and security, crisis management in high-tech industries and research institutions. As the Deputy Director for Operations/COO at SLAC National Accelerator Laboratory, a US Department of Energy national lab operated by Stanford University, he is responsible for overseeing the lab’s business and technology services, facilities, human resources, communications and environment/safety divisions. Prior to his current role, he served the ESH Division Director and has been at SLAC since 2007. He was the co-founder and managing principal consultant of Environmental & Occupational Risk Management, Inc., a national environmental and safety consulting firm (now BSI EHS Services & Solutions) and was the Health & Safety Manager for Hewlett Packard Company’s Components Group. He is also active in the local and broader community, volunteering to support emergency management in various capacities. For 17 years he served as a volunteer firefighter in Santa Cruz County, CA. He is on the command staff of the US Dept of Health & Human Services Disaster Medical Assistance Team (DMAT) CA-6, with field response experience in Haiti following the 2010 earthquake and in Puerto Rico and the US Virgin Islands following Hurricanes Irma/Maria in 2017. Brian holds a master’s degree in biology/toxicology from San Jose State University and a bachelor’s degree in genetics from the University of California at Davis.

SESHA 2018 Symposium Abstract

Materials outgassing as part of process hazard assessment

Alain Pardon
(IMEC )

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Imec’s core activity is to develop new processes for semiconductor manufacturing. This involves using novel process equipment but also new materials that can fulfill the demands of future technology nodes. In the past the focus of the risk assessment was on the process (process hazard assessment) to identify the hazards of the materials used but also to identify the reactive and hazardous byproducts of the process. In advanced processing not only equipment and chemistry should be the focus of sound risk assessment. Some materials (selenides, phosphides, .. ) formed in the layers tend to outgas when exposed to ambient air. This presentation will illustrate process hazard assessment and give some insight in how risks of material outgassing are assessed and managed.

SESHA 2018 Symposium Abstract

Introduction to STPA Hazard Evaluation Technique: A New Tool in the IH/OS Tool Box

Kelsey Forde; Timothy Stirrup
(Albuquerque, NM)

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Instructor(s): Kelsey Forde CIH CHMM & Timothy Stirrup REM Description: There is new hazards analysis technique in the IH tool box. STPA, or Systems-Theoretic Process Analysis, is a new hazard analysis technique with the same goals as any other hazard analysis technique; however, STPA has a very different theoretical basis or accident causality model. STPA is based on systems theory while traditional hazard analysis techniques have reliability theory at the foundation. While traditional techniques were designed to prevent component failure accidents (accidents caused by one or more components that fail), STPA was designed to also address increasingly common interactions between humans, controllers/computers, and equipment. STPA comes out of research at MIT. The participants will learn the ins and outs of this new hazards analysis technique. The participants will learn when best to apply STPA as well as what inputs are necessary and what results to expect. The participants will learn where to get additional information on the STPA technique. Industrial hygienists performing systems, facility, and worker level hazards analysis will find this presentation useful. Learning Outcomes: The participants will learn the benefits and pitfalls of this new hazards analysis technique. The participants will learn when best to apply STPA as well as what inputs are necessary and what results to expect. The participants will learn where to get additional information on the STPA technique. Practical Application: The presentation of “Introduction to STPA Hazard Evaluation Technique: A New Tool in the IH/OS Tool Box” will help industrial/occupational hygiene professionals by giving them practical knowledge on a hazards analysis technique that analyzes the potential hazardous interactions between human, controller, and equipment.

SESHA 2018 Speaker Biography

Timothy Stirruo
Principal EHS Professional Albuquerque, NM

Mr. Timothy Stirrup is Registered Environmental Manager, Partner and Principal Environment, Health, and Safety (EHS) Professional with Parvati Consulting, LLC., based in Albuquerque, New Mexico. Tim has over 25 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the Redbook – Guidelines for Hazard Evaluation Procedures, 3rd Ed (CCPS 2008). Mr. Stirrup’s primary responsibilities and areas of expertise are centered around establishing the framework for clients in Hazard Analysis within a diverse set of industrial facilities including accelerators, semiconductor facilities, R&D laboratories, and dynamic energetic materials testing facilities. Throughout his career, Mr. Stirrup has provided EHS consulting support to DOD, DOE, commercial, industrial, and private clients. He is an expert in System Safety and the application of Hazard Analysis principles at all levels – from hazards identification to facilitation of hazards evaluations and control derivations.

SESHA 2018 Symposium Abstract

Roundtable on Corporate Social Responsibility Issues- Evolution and Emerging Issues

Sandy Skees; Josh Kang; Justin Murrill
(BSI, Austin, TX and Samsung, Austin, TX and AMD, Austin, TX and BSI, San Jose, CA)

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Corporate social responsibility (CSR) is how an organization is able to assess and take responsibility for the company’s effects on environmental and social wellbeing. It is a natural outcome from early work on environmental and safety management systems and the subsequent focus on sustainability issues. This round table will look at how CSR has evolved over the last decade, hear from several differing companies’ assessment of their own current CSR processes and how CSR has impacted internal and external stakeholders, as well as hearing about new issues of CSR information for investment strategies. The panel will be presented from five experts in CSR arena. Discussion Topic 1:CSR from Management Systems to Sustainability to Social Responsibility: The Importance of Transparency in CSR and Sustainability Reporting: (confirmed): Sandy Skees is BSI Practice Leader in Social Responsibility and Sustainability/Regional Director for BSI California Brief Presentation (≤ 20 min):Providing an overview of how CSR has evolved in the last decade; its natural off-shoot from management systems to sustainable strategy to what CSR is today. Sandy will also discuss the importance of clear transparent communication in social responsible reporting and the need to involve the top tier of leadership. Topic 2:A site specific CSR (confirmed):Josh Kang, Environmental and Sustainability Specialist Samsung Austin Brief Presentation (≤ 20 min):What was the decision process to make a site specific CSR for a large scale semi-conductor manufacturer, and how was the environmental department able to coordinate with the Legal/Public Affairs office in a short period of time to produce a report? How was that report distributed and what was is the feedback? Topic 3:CSR as a way of Tracking Supplier Compliance (tentative): Justin Murrill is Senior Manager of Corporate Sustainability at Advanced Micro Devices (AMD) Brief Presentation (≤ 20 min): How does AMD coordinate the CSR reporting data within their Supply Chain logistical team and what values/risks are considered when looking at direct suppliers vs indirect suppliers? Topic 4: CSR Expert (TBD): Brief Presentation (≤ 20 min): Topic 5:What Financial Institutions Look for in CSRs (to be confirmed):Susan Burns, Director of Finance for Change, Global Footprint Network. Brief Presentation (≤ 20 min): Susan now advises credit rating agencies and financial institutions on environmental risk in investing, and uses CSR information as part of the processes to identify whether a company is a strong risk investment, or whether through its poor social responsibility and environmental performance, some financial institutions are deciding to pass on particular companies in their portfolios. Panel Moderator: Melita Elmore, BSI Principal Consultant, CSR Manager/ISO Lead Auditor

SESHA 2018 Speaker Biography

Melita Elmore
Principal Consultant BSI, Austin, TX and Samsung, Austin, TX and AMD, Austin, TX and BSI, San Jose, CA

Melita has over 20 years’ experience as a business owner, senior project manager, industry executive and state regulator. She is experienced in corporate social responsibility issues, management systems, safety and environmental regulatory impacts, policy analyses and organizing project studies. Her core competencies include the following: CSR; environmental and safety management systems implementation and assessments; sustainability issues and programs, including water and energy conservation; EHS regulatory compliance; curriculum development and training delivery; due diligence; stakeholder outreach and participation; and multi-media auditor.

SESHA 2018 Symposium Abstract

Thermal Runaway Incidents – Safety Procedures for Burns and Potential Smoke Inhalation

James Keenan
(Cardno ChemRisk, Arlington, VA)

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Thermal runaway is a failure mode in lithium-ion batteries that occurs when exothermic reactions are induced by short-circuiting, excessive heat, or physical distress to the batteries. The process can generate extreme heat that can melt the battery and surrounding hardware and even cause the device to catch fire. Thermal runaway in electronic devices is a concern for regulatory agencies, cargo transportation providers, commercial airlines, device and battery manufacturers, consumers carrying these devices, and others. In the occupational setting, physical hazards such as burns can be lessened via training employees, providing fire extinguishing media such as sand, using personal protective equipment, and battery charge control. Aside from physical hazards in the immediate area of a thermal runaway event, a potential human health risk exists from chemicals generated by the reaction, one of which can be hydrogen fluoride. This risk has not been quantitatively evaluated in the available scientific literature. We performed a screening-level analysis aimed to assess exposure and characterize the health risk associated with hydrogen fluoride released during a thermal runaway event on an airplane. Briefly, the fluorine mass content in a lithium-ion cell phone battery was derived from manufacturers’ specification sheets. A well-mixed box model was then used to conservatively estimate the airborne concentration of hydrogen fluoride generated in a commercial airplane cabin and cockpit. Using very conservative assumptions, potential 10-minute peak exposures to hydrogen fluoride from a thermal runaway event ranged from 1.1 to 7.1 mg/m3 in the cabin and 0.5 to 3.6 mg/m3 in the cockpit. More research is needed, such as through air sampling during thermal runaway in simulated or in-field environments, for a more complete understanding of risks on an airplane and in other settings. The modeled concentrations span above the U.S. EPA 10-minute Acute Exposure Guideline Level-1 (AEGL-1) of 0.8 mg/m3, intended to protect against reversible irritation or discomfort. However, modeled concentrations fell below the 10-minute AEGL-2 of 78 mg/m3, intended to protect against more serious effects. Safety procedures such as reentry time calculation, storage and shipping procedures, and engineering controls should be considered by all employers whose employees come in contact with lithium ion batteries.

SESHA 2018 Speaker Biography

James Keenan
Senior Managing Health Scientist Cardno ChemRisk, Arlington, VA

Dr. James J. Keenan board-certified toxicologist and Supervising Health Scientist with Cardno ChemRisk. He has a wide range of experience including risk assessment, exposure assessment, and toxicology. His doctoral research included indoor and outdoor exposure assessments of children and adults to pesticides, including large scale biomonitoring studies. Additionally, Dr. Keenan has vast experience in designing and conducting laboratory and field studies concerning the environmental fate of chemicals indoors and outdoors. Dr. Keenan has participated in research concerning perchlorate, nitrate, and nicotine exposure to the general public. Furthermore, he has performed research and provided litigation support concerning exposure to lead, asbestos, diacetyl, trichloroethylene (TCE), tetrachloroethylene (PCE), dioxins/furans, polycyclic aromatic hydrocarbons (PAH), cadmium, copper, chromium, nickel and benzene.

SESHA 2018 Symposium – PDC3

Reactive Silane Byproducts

Eugene Ngai

Chemically Speaking LLC, Whitehouse Station, NJ, NKFUST, Kaohsiung, TW, Dow Corning, Midland, MI, others TBA

As discussed at the 2017 PDC on Energetic Materials, Silicon Semiconductor device manufacturers have increased their use of the more complex silane molecules such as Hexachlorodisilane. These Si-Si or Si-Si-Si bonded molecules have a greater tendency to form reactive byproducts which in some cases are shock sensitive (aka Popping Gels) There have been reports of incidents at suppler, user and equipment facilities. To better understand how these are formed and the chemistry, two major research efforts have been recently conducted. Air Liquide Advanced Materials a major supplier funded a joint study at National Kaohsiung First University of Science and Technology (NKFUST) in Taiwan. Prof Chen who previously participated and conducted silane and trichlorosilane release studies from 2005-2017 will present his findings. A second supplier Dow Corning has conducted research in the same area for 18 months will also present their findings. This information will be invaluable to all that handle HCDS as well as the more complex silanes. They will answer questions such as what are they, how are these formed and more importantly how to handle these safely? Other presenters will discuss incidents involving these gels in systems or equipment.

SESHA 2018 Symposium – PDC4

EPA Greenhouse Gas Emissions Reporting for Electronics Industry

Mike Sherer
Jesse Gonzalez
Mike Sherer

Trinity Consultants, Phoenix, Arizona

This course will cover EPA greenhouse gas emissions reporting for electronics industry, including wafer fabs, under 40 CFR Subparts A, C and I.