Home > Education > Book Review: Semiconductor Industry Wafer Fab Exhaust Management by J. Michael Sherer

Book Review: Semiconductor Industry Wafer Fab Exhaust Management by J. Michael Sherer

Book Review: Semiconductor Industry Wafer Fab Exhaust Management by J. Michael Sherer
Steven Roberge; Axcelis

Semiconductor Industry Wafer Fab Exhaust Management provides an extremely practical review of exhaust management and abatement systems used in semiconductor fabs. This detailed book provides the reader with a vast array of knowledge on considerations that go into selecting, operating and maintaining exhaust management systems.

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