Exhaust Management System for EH&S Compliance in Semiconductor R&D Environment

Exhaust Management System for EH&S Compliance in Semiconductor R&D Environment
Tom Huynh, PE; Dina Schiller, PE, CSP, REA; Mallikarjun Mudagall, MS; Applied Materials, Inc. (T.H. now with Symyx Technologies, Inc.)

The continued use of various hazardous substances in Nanomanufacturing Technology (TM) research and development in wafer fabrication present challenges to the semiconductor facilities in evaluating the effectiveness of the best available abatement technologies, and in ensuring environmental, health and safety (EHS) compliance without compromising the flexibility of conducting research and development (R&D) activities and facilities operation. This paper discusses the management system developed by Applied Materials EHS for process exhaust abatement. The Applied exhaust management system involves the development of an effluent assessment database, air modeling, and extensive stakeholder reviews.