Extension of SEMI Standard F15 to Include Evaporation of Liquids

Extension of SEMI Standard F15 to Include Evaporation of Liquids
P. L. Lagus; Lagus Applied Technology, Inc., Escondido, California

SEMI Standard F15 is recommended by both SEMI Standard S2-93A and SEMI Standard S2-0200 as a method using the release of a tracer gas to verify the integrity of ventilated enclosures when subjected to a catastrophic failure of an internal pressurized gas or vapor line. The standard has been used primarily to document the effects of a release of a pressure driven jet of process gas or vapor. In this paper a methodology is presented that is based on published liquid evaporation equations. It will allow containment of process liquids to be assessed using the procedures of SEMI Standard F15. The required equations are provided along with actual experimental data for an enclosure using two different process liquids.