Susceptor HCL Out-Gassing Data & Solutions

Susceptor HCL Out-Gassing Data & Solutions
Ron Guertin, Ralph Thivierge; Hannaford Bros. Co., Barber Foods (both formerly with Fairchild Semiconductor)

A solution for reducing the quantity of HCL entering the operator work area as well as reentering the EPI Reactor during susceptor out-gassing. This paper focuses on the quantity of HCL out-gassing that occurs during the three minute timeframe immediately after the susceptor is lowered and exposed to the room atmosphere. Tests were performed using thick film batch epi reactors. Deposition thickness on all test were 50 micron film (thick epi). The study provides actual process run data to determine the effectiveness of the carbon filters.