Analysis of Radiation Detected from Exposed Process Elements from the Krypton(85) Fine Leak Testing System

Analysis of Radiation Detected from Exposed Process Elements from the Krypton(85) Fine Leak Testing System 
Julie M. Leach-Marshall – University of Wisconsin (SSA Journal Volume 5 Number 2 – June 1991 pp. 48 – 60 )

All levels of radiation are considered hazardous, the concern is with those levels of ionizing radiation produced in the semiconductor industry by the removed exposed process elements of the Kr^85 Fine Leak Testing System. To analyze the levels of radiation detected from exposed process elements, ionizing radiation literature was reviewed along with the existing practices and procedures of the Kr^85 Fine Leak Testing System. Upon completion of related data collected, the levels of ionizing radiation in the semiconductor industry today were found to be both above and below the existing industry standard (10 CFR Part 20) of 2mR/hr. As a result of these findings, the following recommendations were made:

3. record all levels of radiation detected from exposed process parts as a function of time;
4. consideration of risk transfer as a risk control tool with the semiconductor manufacturing companies housing the Kr^85 Fin Leak Testing System;
5. switch to an alternative system of testing ; and
6. consideration of additional personal protective equipment.