Copper and Other Regulatory Initiatives of the New Millennium

A number of new initiatives, spurred by the United States Environmental Protection Agency (EPA) and other agencies, will impact the semiconductor industry. In addition, ever-changing politics and science surrounding the global warming issue continue to drive the development of new regulatory programs. Whether through formal rules or implementation of voluntary programs, the US’ approach is moving towards addressing multi-media effects of specific chemical compounds. This paper will identify and address some of the more significant trends, compliance issues and industry challenges related to copper processing, other new processes and new materials, resource conservation, community-right-to-know, and product stewardship. This paper was presented at SSA ’99.