Isobutylene Proves Successful in a Unique Process Tool Tracer Gas Test

This article presents a case study which describes the use of an inexpensive, simple and reliable method to quantitatively evaluate the exhaust ventilation provided to a corrosive cleaning process tool. Although face velocity measurements are recommended by the SEMATECH Application Guide for SEMI S2-93, the unique design of the process tool precluded the use of traditional exhaust ventilation measurements. This work offers a simple, inexpensive technique that may be useful in a wide variety of other applications. Reliability is derived from the repeatability and accuracy of the detection equipment used, the high purity of tracer standard, and the theoretical underpinnings of the method.



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