Long-Lived and Greenhouse Gases in the Semiconductor Industry: A Review of Science, Policy, and TechnologyLogin to view
Long-Lived and Greenhouse Gases in the Semiconductor Industry: A Review of Science, Policy, and Technology
Michael T. Mocella – DuPont Fluoroproducts (SSA Journal Volume 8 Number 4 – December 1994 pp. 13 – 17)
Certain perfluorocompounds (PFCs) widely used in semiconductor dry processing applications have generated environmental concerns because of their long lifetimes and strong infrared absorption characteristics. This paper will review the science underlying these concerns, policies established to control their atmospheric emissions, and the technological status of emissions control.