Opacity Elimination in the Semiconductor IndustryLogin to view
Opacity Elimination in the Semiconductor Industry
J. Michael Sherer, Motorola and Kenneth Schifftner, Compliance Systems International (SSA Journal Vol.9 – Fall 1995, pp. 7-10)
As part of implementing strategies for reducing air emissions, opacity in the semiconductor industry can be eliminated. The opacity characterization and mechanism of formation has been studied by environmental control engineers. This article describes the possible causes of this opacity and the engineering solutions that can be used to eliminate the stack opacity.