Restrictor Flow Orifice – An Update

Restrictor Flow Orifice – An Update 
Jerrold Smith – Senior Facilities Engineer of Matheson Gas Products (SSA Journal – February 1988 pp. 65 – 67 )

At a meeting of Semiconductor Equipment Manufacturer’s International held in Phoenix, Arizona, in February, 1984, Matheson Gas Products presented a paper entitled “Gas Flow Restrictors for the Semiconductor Manufacturing Industry.” Since that time, Matheson, in cooperation with Superior Valve Company, has carried out much development work on the subject. This report summarizes the results of these activities.



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