Silane Safety Study: Compressed Gas Association Performs Large Scale TestsLogin to view
Silane Safety Study: Compressed Gas Association Performs Large Scale Tests
Naser Chowdhury – Air Products and Chemicals, Inc. (SSA Journal Volume 11 Number 4 – Winter 1997 pp. 47 – 57 )
Due to the increasing use of bulk gases, including silane, throughout the semiconductor and other industries, research and testing is needed to establish additional safety standards, particularly safe setback distances for bulk storage facilities, as well as up-to-date information for regulations such as the Uniform Fire Code. The Compressed Gas Association recently completed a comprehensive series of large- and small- scale silane release tests in order to quantify the impact of various release parameters on the potential accumulation of flammable silane mass and its delayed explosion potential.