SESHA 2019 Symposium PDC

IH/OS Essential Toolbox Tools: What-If/Checklist & Qualitative Risk Analysis

Kelsey Forde
Timothy Stirrup

Parvati Consulting LLC, Albuquerque, NM

The course is based on the principles and methodologies presented in “The Guidelines for Hazard Evaluation Procedures”, 3rd Edition (aka Redbook). The Redbook is a standard industry reference for hazard evaluation procedures published by the Center for Chemical Process Safety. This course provides an overview of the Redbook methodologies for performing Hazard Analysis and focuses on the What-If/Checklist technique along with a Qualitative Risk Analysis.

The What-If/Checklist technique combines the creative, brainstorming features of the What-If technique with the systematic features of the Checklist technique. The Qualitative Risk Analysis can be used in combination with many of the traditional Hazard Evaluation techniques described in the Redbook. The integration of a Qualitative Risk Analysis into the Hazard Analysis process helps to identify and address the unmitigated risk, mitigated risk, and adequacy of safeguards/controls.

This course uses interactive discussions coupled with videos presented by the Chemical Safety Board and Discovery Channel’s Engineering Disasters to illustrate how Hazards Analysis can help identify and avoid accidents. Instructors augment discussions with lessons learned reflecting a combined 40+ years of experience in system safety and hazards analysis.

Presenters

Kelsey L Forde, CIH CSP CHMM
(505)967-8917
KLForde@ParvatiCorp.com

Ms. Kelsey Forde is a Certified Industrial Hygienist, Certified Safety Professional, Certified Hazardous Materials Manager, Owner and Principal Environment, Health, and Safety (EHS) Professional and System Safety Engineer for Parvati Consulting, LLC., based in Albuquerque, New Mexico. Kelsey has approximately 15 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the Redbook. Ms. Forde’s primary responsibilities and areas of expertise are centered around the identification of workplace hazards and development of consequence analysis associated with hazard analysis, safety assessments, primary hazard screens, readiness reviews, and compliance auditing techniques for a variety of clients including the DOE, commercial, industrial, and private clients.
Ms. Forde is a National Director for the Alliance of Hazardous Materials Professionals, President-Elect for the New Mexico Chapter of the American Society of Safety Professionals, Past-President and Director at Large for the New Mexico Society of Hazardous Materials Managers, and served two consecutive appointed terms on the Albuquerque-Bernalillo County Joint Air Quality Control Board.

Timothy S Stirrup, REM CHMM IH
(505)980-3743
TSStirrup@ParvatiCorp.com

Mr. Timothy Stirrup is a Registered Environmental Manager, Certified Hazardous Materials Manager, Industrial Hygienist, Partner and Principal Environment, Health, and Safety (EHS) Professional with Parvati Consulting, LLC., based in Albuquerque, New Mexico. Tim has over 25 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the. Mr. Stirrup’s primary responsibilities and areas of expertise are centered around establishing the framework for clients in Hazard Analysis within a diverse set of industrial facilities including accelerators, semiconductor facilities, R&D laboratories, and dynamic energetic materials testing facilities. Tim is respected for his ability to create highly functional teams and solve diverse, complex problems. Mr. Stirrup provides direct input to Line/Executive Management and Regulators to ensure solutions for continued organizational success. Mr. Stirrup currently serves as President on the New Mexico Society for Hazardous Materials Managers Board of Directors and is continually asked by clients, peers, and professionals in the EHS community to present at both local and national EHS/IH conferences.

SESHA 2019 Symposium PDC

Crash Course on Risk Assessment for Semiconductor Industry: Metals, Organic Agents, Nanoparticles

Andrey Korchevskiy
Daniel Hall
Steven Trammell

Chemistry & Industrial Hygiene, Wheat Ridge, CO; BSI EHS Services and Solutions, Austin, TX

“A crisis of regulations” is haunting manufacturers worldwide: governmental standards don’t exist for many workplace and environmental factors, while most of the existing exposure limits are not health-based. Risk assessment becomes a viable alternative to regulatory paradigm, allowing industry professionals to evaluate new and emerging hazards and establish internal occupational exposure limits. This approach follows the “precautionary principle,” while employing the best available scientific information to prioritize risks and ensure occupational and public health improvement. This PDC will take participants for an intensive, hands-on one-day ride exploring how and when semiconductor industry personnel can use advanced risk assessment methods in their practice. The objective of the class is to demonstrate different methods and techniques used for risk assessment purposes. Structural components of the risk assessment paradigm (hazard identification, exposure assessment, dose-response assessment, and risk characterization) will be described from a practical point of view. The participants will learn via class exercises how to obtain & interpret risk metrics, including absolute & relative risk, attributable risk fraction, unit risk, slope factor, and reference concentration and dose.The audience will participate in interactive exercises, including a statistical risk simulation, demonstrating the probabilistic nature of hazards and health outcomes. The class materials will be based on case studies intended to refresh the audience’s knowledge on hazardous agents specific to the industry, including, arsine, phosphine, methylene chloride, hydrofluoric acid (HF), tetramethylammonium hydroxide (TMAH), and engineered nanoparticles. Steve Trammell, PE, CSP, CCPSC, CHMM – Principal Consultant BSI EHS Services and Solutions Austin, TX Steve has 32+ years’ experience in mechanical design engineering, system safety, hazards analysis and risk management within the high technology, aerospace, pharmaceutical, explosives and petrochemical industries. His experience includes development of global risk management programs, manufacturing startup support, compliance and risk-based auditing. Steve is a member of the SESHA Board of Directors (2010-present) and a past President of the organization (2013-2014). He is a member of the NFPA 318 Technical Committee and has co-authored multiple peer-reviewed journal publications focused on risk management. Andrey Korchevskiy, PhD, DABT, CIH Chemistry & Industrial Hygiene, Inc. Wheat Ridge, CO A certified toxicologist and certified industrial hygienist, Andrey is an expert in risk assessment modeling for industrial hygiene and environmental health applications. He arranged and taught best-selling risk assessment classes in the US, UK, Canada, Mexico, Colombia, and other countries. He has over 150 scientific publications in the fields of risk analysis, epidemiology, toxicology, and biostatistics. He is a full member of the Society of Toxicology (SOT), Distinguished Lecturer of AIHA, a recipient of AIHA Outstanding Project Team Award, and AIHA Volunteer Group Service Awards in both 2016 and 2018. Dan Hall, CIH, PE Chemistry & Industrial Hygiene, Inc. Wheat Ridge, CO Dan is a certified industrial hygienist with a decades long experience in engineering controls, statistical data analysis, and computer modeling. He has presented at national conferences on statistical analytical methodologies and computational fluid dynamics (CFD) modeling techniques utilized in retrospective exposure characterization of workers and outdoor contaminant dispersion for risk assessment activities. He is a member of the American Society of Civil Engineers (ASCE), the American Society of Heating, Refrigerating, and Air-Conditioning Engineers (ASHRAE), the national and local American Industrial Hygiene Association (AIHA), and is an active member of the national AIHA Engineering Committee.

SESHA 2019 Symposium PDC

Fundamentals and EHS Challenges of Semiconductor Manufacturing

Aaron Zude
Sue Creighton

Facilities & Safety Solutions, Newark, CA. and Sue Creighton, Apple Inc., Santa Clara, CA

This is an introduction to EHS in semiconductor and high-tech manufacturing intended for both students and professionals that are new to the semiconductor industry and its operations. An experienced semiconductor EHS professional, recognized in his or her area of expertise, will present the topics. This will be a full day PDC. Students will be provided with handouts of each presentation. PDC topics include an overview of:

• Semiconductor fabrication clean rooms and facilities equipment
• Semiconductor fabrication processes & hazardous materials used
• Occupational health and safety hazards and controls in a semiconductor fabrication facility
• Semiconductor fabrication environmental considerations
• Semiconductor fabrication tool product safety requirements and SEMI EHS standards including S2, S8 and S23
• Semiconductor fabrication clean room and facility building & fire codes
• Semiconductor fabrication tool installation permitting & commissioning
• Semiconductor fabrication clean room life safety controls & emergency response

PDC Outline

SESHA 2019 Symposium PDC

Reactive Silane Byproducts Phase 2

Chemically Speaking LLC

Since the Reactive Silane Byproducts PDC in April 2018, another year of research has been conducted on this important topic. In one test program, a custom benchscale system was used to simulate a user system and process conditions to better understand how these reactive gels are formed. A key finding is that the reactive gels formed by hydrolysis of hexachlorodisilane is different than hydrolyzed HCDS reactor gels. While both forms can be shock sensitive, they exhibit different chemical and physical properties.

Some of the gels formed are so shock sensitive that a fire occurred when a label was peeled off of a vacuum pump containing gels. A chlorosilane manufacturer reported that a facility bicycle rolled over dried deposits on the ground and reported hearing “popping” sounds. The most likely place for these gels to form are in the reactor system vacuum pumps after the heated foreline. The gels from a number of pumps from 2 US users have been studied. These gels are viscous and waxy like that quickly reacts to a brittle solid after exposure to ambient air.

This PDC will have the same speakers from 2018 plus Global Foundries. Key topics will be:

1. Reactive chemical hazard analysis — mitigation of shock sensitive gels
2. Process vacuum pumps were modified to reduce accumulation of reactive byproducts and extend pump life. Results of recent pilot tests will be presented.
3. Gel formation in heated foreline and ambient
4. Deposits found in a user’s foreline have also been characterized
5. F2 Cleaning of gel and hydrolyzed gel
6. Neutralization of hydrolyzed HCDS spill
7. User experience
8. Methods of in situ deactivation of hydrolyzed gels (chemical, heat, steam)
9. Chemical scrubbing of HCDS vapors

Speakers from:

• National Kaohsiung University of Science and Technology
• Dow Chemical
• Global Foundries
• Edwards Vacuum
• Dekra
• Chemically Speaking LLC

This PDC will present data that has not been revealed and may be significant to your operations.

SESHA 2019 Symposium PDC

Reactive Silane Byproducts Phase 2

Chemically Speaking LLC

Since the Reactive Silane Byproducts PDC in April 2018, another year of research has been conducted on this important topic. In one test program, a custom benchscale system was used to simulate a user system and process conditions to better understand how these reactive gels are formed. A key finding is that the reactive gels formed by hydrolysis of hexachlorodisilane is different than hydrolyzed HCDS reactor gels. While both forms can be shock sensitive, they exhibit different chemical and physical properties.

Some of the gels formed are so shock sensitive that a fire occurred when a label was peeled off of a vacuum pump containing gels. A chlorosilane manufacturer reported that a facility bicycle rolled over dried deposits on the ground and reported hearing “popping” sounds. The most likely place for these gels to form are in the reactor system vacuum pumps after the heated foreline. The gels from a number of pumps from 2 US users have been studied. These gels are viscous and waxy like that quickly reacts to a brittle solid after exposure to ambient air.

This PDC will have the same speakers from 2018 plus Global Foundries. Key topics will be:

1. Reactive chemical hazard analysis — mitigation of shock sensitive gels
2. Process vacuum pumps were modified to reduce accumulation of reactive byproducts and extend pump life. Results of recent pilot tests will be presented.
3. Gel formation in heated foreline and ambient
4. Deposits found in a user’s foreline have also been characterized
5. F2 Cleaning of gel and hydrolyzed gel
6. Neutralization of hydrolyzed HCDS spill
7. User experience
8. Methods of in situ deactivation of hydrolyzed gels (chemical, heat, steam)
9. Chemical scrubbing of HCDS vapors

Speakers from:

• National Kaohsiung University of Science and Technology
• Dow Chemical
• Global Foundries
• Edwards Vacuum
• Dekra
• Chemically Speaking LLC

This PDC will present data that has not been revealed and may be significant to your operations.