Pump and Abatement Safety on Hexachlorodisilane Processes
December 10, 2025 - Pump and Abatement Safety on Hexachlorodisilane Processes
In this presentation, we’ll explore effective strategies for installing pump and abatement equipment in systems that handle reactive process residues. We’ll also walk through essential safety procedures for maintaining and exchanging pumps in these challenging environments. To add insight, we’ll share observations from our Edwards remanufacturing facility, with a particular focus on the behavior of hexachlorodisilane residue during pump disassembly. Join us for an engaging exploration of best practices and real-world insights that can enhance safety and efficiency in your operations!
SPEAKER
Mike Gordon
Edwards Vacuum
Applications Manager
Mike Gordon has worked in the EHS field since 1987, including roles in government, consulting, and the semiconductor industry. He has managed EHS compliance, hazmat shipping, and process safety for Edwards Vacuum personnel and equipment at most major semiconductor manufacturing facilities in the US. Mike is a member of the SEMI energetic materials task force and is also a volunteer firefighter/EMT.
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This suite of online, on-demand courses, incorporating content from SESHA “boot camp” courses, provides a comprehensive safety training foundation for all employees who work in a semiconductor fabrication setting.
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