Multi-layer Protection Analysis for Manufacturing Facilities

Fthenakis, Vasilis (Brookhaven National Laboratory)

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This paper presents an accident prevention and mitigation strategy for high-tech industries, based on the concept of defense in depth; if one line of defense fails, then others are available. Engineering and administrative options to prevent and control accidental releases and reduce their consequences are considered sequentially in six steps: i) inherently safer technologies, processes and materials; ii) safer use of a given material; iii) means to prevent accident initiating events; iv) safety systems to minimize releases at the source; v) systems to contain accidental releases; vi) options to prevent or minimize human exposures and their consequences. Specific options available to the semiconductor industries are discussed.

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