Air Modeling of Hydrogen Fluoride and Hydrochloric Acid to Determine Acute or Chronic Toxicity.
Lopez, Marie A.
(St. Louis University)
The purpose is to determine if Hydrogen chloride (HCl) and Hydrogen fluoride (HF) emissions posed any threat to the surrounding area of semiconductor plants. A risk analysis to determine if there are health hazards as a result of chronic air releases are determined using ALOHA air modeling. Exposure scenarios were conducted on the surrounding area and people working at the semiconductor plant. Doses of HF and HCl did not reach acute toxicity levels. Extrapolations were made according to the chronic effects of HF; possible environmental and public health issues should be investigated.