Air Permitting Wafer Fabs

Sherer, Mike
(Sherer Consulting Services, Inc., Gilbert, Arizona)

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Semiconductor fabs have complex processes that emit numerous process gases and byproducts. This presentation will provide information on developing calculation methodologies for air permitting, including byproducts. Strategies for air permitting will also be presented.

Back to SESHA 33rd Annual Symposium/SIA IHTESH Joint Meeting (2011)



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