Applying “Process Hazard Analysis”, Designing EHS Compliance into a 150,000 ft2, 300mm Fab

Bilimoria, Sarah (Applied Materials)
Mary-j Klang* (Applied Materials)

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Early identification of hazards makes responsible business sense. Process Hazard Analysis (PHA) provides a systematic way to identify potential hazards associated with a tool or system. PHA, when used in design phase, provides a format for facilitating dialog and cross checking between design teams.
During design of the 150,000 ft2, 66 tool Bay, Applied Materials Technology Center, PHAs were a tool used to ensure the EHS Design Team goals were met These goals included; operability of the system, bullet proofing for regulatory compliance, no single point of failure resulting in violation of any permit conditions, and safety of the system. While Applied Materials had often utilized PHA, this process was targeted at tools, and had not been used consistently for building related systems.
At 30% conceptual “black box” design, the EHS Design Team used What If Analysis to identify showstoppers and critical path design requirements. At 60% and 90% design, a detailed Hazard and Operability Analysis was conducted. During design phases, over 20 PHAs were conducted for systems that posed EHS risks: Bulk/Specialty Gas; AWN, HF and Slurry Treatment; Abatement Devices; Wet Labs; Chemical and Waste Handling; Life Safety Systems; and an Automated Material Handling System.
The EHS Design Team raised the bar for bulletproofing system compliance. Using a proven process, PHA, and adapting this tool for design review, the Team was able to partner for success with Designers, Operations, Facilities, Vendors and Regulators. This presentation will outline among other things; lessons learned, usable PHA tools, methods to identify and maintain key partners, and ways to overcome resistance to the PHA process.

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