“Cradle to Grave” EHS Management of Semiconductor Processing Equipment

Hendricksen, Kathy; Reynoso, Anna ; Wood, Shelly
(Motorola, Austin, TX)

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This paper will discuss a comprehensive approach for Environmental, Health and Safety (EHS) review of equipment installation, equipment or process modification and equipment decommissioning. Focused review and approval of semiconductor processing equipment is an essential part of a robust EHS program. Integrating EHS approval into equipment installation and decommissioning projects supports time sensitive factory schedules, provides for EHS elements to be addressed at the onset of a project and ensures proper functioning of equipment safety controls. An integrated approach, implemented over the long term, ensures EHS criteria are maintained and establishes cultural norms for protection of employees and factory resources.

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