Energetics in Exhaust Systems

Tim Yeakley
World Semiconductor Counsel, Safety and Health Working Group

Energetics in Exhaust Systems Workshop Agenda 1) Review the current status of the Sematech document that was published in 2014. 2) Provide an update to the development of the SEMI standard for Metal Organic Chemistries 3) Review the process and data collected by Sematech and SUNY-Albany NY 4) Member sharing of any events not previously discussed – incident reviews 5) SEMI Standard – content review 6) Information exchange – facilitated discussion focusing on known occurrences and actions taken to reduce risk of future occurrence 7) Summary of follow up actions. WORKSHOP PARTICIPATION: Participation in this full day workshop is limited to WSC members and approved suppliers. All attendees will be required to share non-confidential information about the workshop topic. All persons who attend a WSC workshop must be an expert in a field that can add to the discussion to resolve open technical issues (e.g. safety and health professional with experience in the topic area, analyst performing studies in the area). Persons who request to attend that are not a member of the WSC will receive instructions to provide information that will be reviewed by the WSC before they receive final attendance approval. Information that will be needed for each attendee is a biography, a brief description of experience in the area and a brief description of any information that will be shared with the group. Sales and marketing presentations will not be allowed.

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