Environmental and Infrastructure Impacts of Single Wafer Wet Tools

Raley, Brian
(GLOBALFOUNDRIES, Malta, NY)

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The increased usage of single wafer wet tools has resulted in significant impacts for manufacturing facilities. This impact will increase as use of single wafer wet tools increase. This presentation will give a broad outline of those challenges, explain how those challenges are novel, and information on how those challenges are being met. The issues highlighted include increased chemical usage, chemical storage challenges, increased water usage, increased waste generation, various emissions issues, and exhaust and make-up air requirements. Although some of these challenges are not new to the industry, the significant magnitude increase in chemical and water use in single wafer wet tools should be understood as a new industry challenge. One of the more novel challenges resulting from single wafer wet tool use is in regards to exhaust emissions.

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