SESHA 2015 Symposium — PDC1

The Science of Process Exhaust Management

Joe Van Gompel
Glade Consulting, LLC

The byproducts of CVD, diffusion, and plasma etch processes are intimately tied to the process itself. The precursor materials (e.g. SiH4, TEOS, C3F8, WF6) have different properties and often require different abatement configurations. For example, interlayer dielectric etch uses fluorinated greenhouse gases and is a clean process with regard to process solids formation but requires specialized point-of-use (POU) equipment for F-GHG abatement. Conversely, aluminum etch (Cl2, BCl3) has no F-GHGs, but is challenging with regard to solids formation in the pipework. The Science of Process Exhaust Management Seminar has 3 primary areas of study. First is a survey of common chemicals used in semiconductor manufacturing with regard to their reactivity and likely process byproducts. Toxicity, corrosivity, and flammability are also considered. Understanding these properties enables the user to more clearly define POU requirements. Second is an overview of technologies (e.g. wet scrubbers, dry bed scrubbers, combustors, plasma) used for POU abatement. These are discussed with respect to efficacy to abate the process precursors and byproducts, and cost of ownership is also considered. Building on these, the third segment is a discussion of several common process types; etch, CVD, diffusion, implant, and more, and how these processes may be abated. A fourth topic will be presented which discusses aspects of F-GHG stability and abatement, followed by a tie-in to the EPA’s greenhouse gas reporting rule as it pertains to the electronics industry.

SESHA 2015 Symposium — PDC3

Ethical Decision Making in Dual Loyalty Settings

The University of Texas School of Public Health

Many professionals face the dual loyalty conundrum of how to best serve the needs of the client while fulfilling the requirements of management. Where do you turn when these viewpoints collide and how do you resolve this challenge? After attending this presentation, you will be able to (1) define the terms “ethics” and “dual loyalty”, (2) summarize the major concepts that appear in applicable codes of ethics, (3) state in simple terms society’s expectations of health and safety professionals, (4) describe examples of dual loyalty situations, (5) list sources of distrust and (6) apply decision-making tools to clarify, prioritize and justify possible courses of action. We will use an audience response system to capture audience opinions as we explore several common ethical dilemmas. Past audiences have remarked that using the clickers to watch opinion data grow live on the screen was an innovative way to promote participation – and it was fun!

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SESHA 2015 Symposium Abstract

Emerging Issues–Infectious Agents and Epidemiology for EHS Practioners

Aton, Elizabeth 
(MMA, Saint Louis, MO)

Their names are ripped from the headlines–Legionnaires’ Disease, Bird Flu, SARS, Ebola. Occupational health and industrial hygiene in the general workplace has been limited in the past with respect to infectious agents–with hazards of such agents being seen as public health issues only. In the contemporary workplace however, companies must address the intersection of community pathogens and the workplace with preparation and implementation of a hazard reduction plan. A basic understanding of types of pathogens, methods of transmission and risk reduction strategy is central to the preparation of a site or company plan for infectious agents. Both the workplace air-handling and housekeeping issues are core to understanding and minimizing risk for workplace transmission of infectious agents. An administrative program addressing procedures for dealing with workers with community acquired illness completes a site plan. Agents of particular interest in today’s general workplace include influenza, MRSA and Ebola, and detailed review and analysis of the current issues for these agents are described. Sources of accurate information and free resources for the EHS Specialist are included. Strategies for identification of and preparation for the NEXT BIG DISEASE complete the presentation.

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SESHA 2015 Speaker Biography

Elizabeth Aton
Senior Principal Scientist, MMA, Saint Louis, MO

Liz has been a SESHA member since the 1980s. She has practiced EHS in aerospace microelectronics and high tech healthcare, and done research in environmental health. She volunteers pro bono service to community EHS functions and consults in scientific aspects of EHS issues.

SESHA 2015 Symposium Abstract

Evaluation of Risk Assessment and Control Banding Models for Engineered Nanomaterials: Application to Exposure Scenarios in Semiconductor Fabrication

Shepard, Dr. Michele 
(Colden Corporation, Albany, NY)

With the continued growth of engineered nanomaterial (ENM) applications and nanoproducts in the workplace, methods are needed to evaluate potential worker exposures and provide a basis for risk management decisions. Risk assessment may be challenging due to current limitations in available data on nanomaterial properties and hazards, as well as exposure assessment methods. A number of risk screening and control banding models for ENMs have been developed to assist in occupational risk assessment and management. Further evaluation and application of these models is necessary to help refine and validate their utility and better understand limitations. ENMs are used in the nanoelectronics and related industries for chemical mechanical planarization (CMP) processes as well as other applications being investigated. This presentation provides an overview of four risk banding tools for ENMs, and presents the findings from applying these to six exposure scenarios at a research and development site using ENMs in CMP processes. The risk banding approaches-ANSES, CB Nanotool, ISO 12901-2, and the Precautionary Matrix-were reviewed to identify model characteristics and determine areas of agreement or contrast in design and application. Output from control banding was compared to existing site engineering controls to determine if additional controls or actions were recommended, and to conclusions from air sampling previously conducted at the site. The models have differences in their scope and complexity, input parameters and other design features. The control levels recommended were not consistent across the control banding models evaluated, although two approaches generally agreed. No significant differences were found between conclusions from control banding and air sampling based on the limited evaluation. While broader application of these results may be limited based on the small sample size, this study helped highlight areas of agreement and dissimilarity in the approaches and provides additional data to consider in selecting or refining risk banding models for ENMs.

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SESHA 2015 Speaker Biography

Michele Shepard
Senior Consultant, Colden Corporation, Albany, NY

Michele Shepard is a Certified Industrial Hygienist at Colden Corporation with over 20 years of EHS experience in consulting, industry and academic research. She has a PhD from SUNY College of Nanoscale Science and Engineering (CNSE), a M.S. in Environmental Studies from the University of Oregon, and a B.S. in Industrial Hygiene/Environmental Toxicology from Clarkson University. As an EPA STAR Fellow, she investigated occupational exposure assessment and risk management practices for engineered nanoparticles. She also worked previously as a Vice President and health and safety services lead at a consulting firm, as the EHS lead for a global business division of a Fortune 200 corporation, and as a consultant at Arthur D. Little. Michele is currently the Vice Chair for the AIHA Nanotechnology Working Group.

SESHA 2015 Symposium Abstract

The Importance of “Failures”: Why Every Organization Needs Them

Glass, Eric 
(Underwriters Laboratories, Northbrook, IL)

Ask any organization about their definition of “failure”. More than likely, you will hear that failure is not a good thing. But, could failures be necessary to achieve overall health and safety success? In this seminar, we will take a closer look at “failures”, the misinterpretation and use of “failures” and, if used correctly, how “failures” can actually help organizations improve and perfect their health and safety programs.

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SESHA 2015 Speaker Biography

Eric Glass
Senior EHS Advisor, Underwriters Laboratories, Northbrook, IL

Eric Glass is a Senior EHS Advisor that provides internal guidance and support to UL Workplace Health & Safety eLearning and software development teams on the creation and evolution of EHS related content and software. Because of the importance of understanding each client’s health and safety program, processes and procedures, Eric provides valuable coaching to both small and large organizations in regards to developing, sustaining and improving their safety culture.

SESHA 2015 Symposium Abstract

Effective Implementation of EHS Management Systems for Managing Risks across Diverse Operations

Trammell, P.E. , Steven; Mazzarella, Susan
(Environmental and Occupational Risk Management, Inc.)

A major challenge for many large organizations, especially those operating in multiple domestic and/or international regions, is the effective and consistent implementation of EHS management systems across all sites. This becomes especially challenging for companies which have a highly diverse set of operations with differing levels of operational risk, regulatory requirements and EHS staffing and training resources. This presentation will provide strategies, best management practices and examples of effective implementation of management systems within companies with highly diverse operating and staffing parameters.

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SESHA 2015 Speaker Biography

Steven Trammell / Susan Mazzarella
Principal Consultant, Environmental and Occupational Risk Management, Inc.

Steven Trammell, P.E., CSP, CHMM Mr. Trammell has over 30 years of experience in a wide range of environmental, health and safety (EHS) program and project activities, spanning the aerospace, petrochemical and semiconductor industries. His core competencies include technical risk assessments, process safety management, explosives safety and construction safety, in addition to expertise in regulatory compliance program development, compliance auditing, technical training and standards development. He has developed corporate risk assessment programs for multiple companies, and has lead international audit teams to ensure site legal compliance to country specific and international EHS regulations. Mr. Trammell has conducted and led process safety hazards analysis studies for highly hazardous operations and developed programs to comply with OSHA’s PSM and the EPA’s RMP regulations. He has extensive experience in conducting Job Hazards Analysis activities and leading investigation / root cause analysis teams. Mr. Trammell has provided on-site technical support and EHS program development for new construction and site demolition activities, including start-up support for four semiconductor manufacturing facilities, two petrochemical processing facilities, three rocket motor fabrication facilities and decommissioning oversight for a major explosives manufacturing plant. Susan Mazzarella, LEED AP Ms. Mazzarella has over 20 years of experience in the environmental, health, safety and sustainability (EHS&S) field, including EHS management systems implementation, corporate social responsibility strategies, sustainable building assessments and planning, compliance auditing and management, on-site support services, regulatory program review, preparation, and implementation, and environmental site assessments. Ms. Mazzarella leads EORM’s Management Systems practice and has experience leading teams in pursuit of ISO 14001, OHSAS 18001, ISO 28001, ISO 26001, and RC 14001; 100% of these projects have resulted in successfully passing the initial certification audit on the first attempt.

SESHA 2015 Symposium Abstract

Summary of SEMATECH and IMEC Collaboration 2014 III-V EHS Projects

Davis, Brett; Kwong, Hsi-An; Pardon, Alain
(Zephyr Environmental, SEMATECH, IMEC)

This paper will report the results of investigations into the EHS aspects of the processing III-V materials, including InGaAs, GaAs and InP – where these films are epitaxially grown on 300mm silicon substrates. A summary of SEMATECH’s multiyear efforts in addressing III-V ESH topics including off-gassing and wastewater collection and treatment will be presented. The results of SEMATECH and IMEC’s recent collaboration on CMP and FOUP off-gassing experiments on III-V materials will be discussed. Experimental approaches to quantify the type and concentration of gaseous species released during CMP and in the FOUP, with tools such as Fourier-Transform Infra-Red Spectroscopy, will be discussed. Future III-V EHS related risk assessment and control tasks will be identified.

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SESHA 2015 Speaker Biography

Brett Davis, Hsi-An Kwong, Alain Pardon
Zephyr Environmental, SEMATECH, IMEC

Brett Davis is a Senior Project Engineer for Zephyr Environmental Corp. in Austin, where serves as a project manager on air permit related projects, for chemical and semiconductor clients. Brett previously provided EHS consulting and project management support for Motorola Semiconductor Products Sector (now Freescale) sites worldwide. Brett earned a B.S. in Chemical Engineering from the University of Texas at Austin and an M.S. in Hazardous Waste Management from National Technological University, now Walden University. He is a registered professional engineer. Hsi-An Kwong is the ESH Program Leader at SEMATECH. Hsi-An has been working in the areas of ESH in the semiconductor and electronics industries for over 30 years, where his responsibilities covered environmental compliance, engineering, process development, operations, and project management in semiconductor fabrication plants. Hsi-An received his BS degree in Industrial Chemistry from National Tsing-Hua University. He also received MS degrees in Chemical Engineering from the University of Oklahoma and Environmental Sciences from the University of Texas at Dallas. Hsi-An is a registered chemical engineer.

SESHA 2015 Symposium Abstract

III-V’s: Managing the transition into HVM Si fabs

CZERNIAK, Dr. MICHAEL; VAN GOMPEL, Dr. JOSEPH
(Edwards, San Jose, CA)

Utilising the high electron mobility of III-V materials in the channels of next-generation silicon transistors will be necessary to meet the requirements of higher speeds and lower power consumption. However the challenges of working with these materials in the context of a silicon fab will have to be addressed, especially gas flammability and toxicity. This paper discusses how experience learned in the manufacture of LEDs can be applied to III-V channels in Si as it transitions from a R+D to HVM context, with a particular focus on safety and equipment uptime.

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SESHA 2015 Speaker Biography

Dr Michael R. Czerniak
Environmental Business Developt. Mgr., Edwards, San Jose, CA

Following a first degree In Physics and Doctorate in Electrical Engineering, Mike started his career in the semiconductor business with Philips, firstly at their R+D centre in the UK, then at their fab at Nijmegen, Holland, in both cases working on III-V applications. This was followed by a marketing role in composite materials, then marketing roles with 2 UHV OEMs before joining Edwards 20 years ago where he currently holds the position of Environmental Business bevelopment Manager.

SESHA 2015 Symposium Abstract

Will you dominate your next response?

Harris, Scott
(UL, Franklin, TN)

Failure to dominate will cost you leadership and control of your response, destroy your credibility in the media and community and add zeros to the cost of everything you do. It’s not about overpowering or outmaneuvering the response agencies. You can’t. It is all about your ability to understand, manage and execute. A former U.S. EPA Federal On-Scene Coordinator details specific steps for dominating your next response using first-hand accounts from nationally significant responses including Space Shuttle Columbia, Hurricane Katrina search and rescue, Deepwater Horizon, Enbridge Pipeline, Murphy Oil and a multi-fatality chlorine derailment near San Antonio, TX. We will focus on the critical role of planning and preparedness, coordination with multiple agencies and operating in a NIMS/ICS environment to address unique and complex environmental, responder safety and public health implications.

SESHA 2015 Speaker Biography

Scott Harris, PhD
Director, EHS Advisory Services, UL, Franklin, TN

Dr. Scott Harris is a Course Director and Advisory Board member for the North Carolina Occupational Safety and Health Education and Research Center at UNC – Chapel Hill and a member of the ASSE Oil and Gas Practice Specialty. A former U.S. EPA Federal On-Scene Coordinator, Scott led and participated in nationally significant response efforts including Space Shuttle Columbia, Hurricane Katrina New Orleans water search and rescue, Murphy Oil, Enbridge Pipeline and Deepwater Horizon. Currently the Director of EHS Advisory Services for UL Workplace Health & Safety, Dr. Harris received his PhD in Environmental Science, with a specialization in Disaster and Emergency Management, from Oklahoma State University and holds degrees in Public Health and Geology from Western Kentucky University.

SESHA 2015 Symposium Abstract

The Latest & Greatest – New Methods and Technologies for Emissions Testing

Nunn, III, Arthur; Mirabella , Erick ; Crosby, Kevin
(Montrose Environmental Group, Inc. Portland, OR, Phoenix, AZ, Antioch, CA )

This presentation will provide operators and managers hands on information on how the newest emerging technologies are changing source testing. FTIR, 3D flows, and new methods for TSP, HCl and Hg CEMS are changing some of the ways that sources are tested. New method limitations and insights will be shared to assist managers in selecting the very best test method for your source as well as tips on how to communicate your needs to both the source test company and your regulator.

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SESHA 2015 Speaker Biography

Arthur B. Nunn, III
Client Account Manager, Business Development, Montrose Environmental Group, Inc. Portland, OR, Phoenix, AZ, Antioch, CA

Arthur B. Nunn, III Client Account Manager Montrose Environmental Group, Inc. 5075 Hollins Road Roanoke, VA 24019 Art Nunn has been working in the air quality testing business for more than 35 years. He has a B.S. in Chemistry from the Virginia Military Institute, and a M.S. in Environmental Science from The George Washington University. Over the last 35 years Art has performed literally thousands of stack emissions testing projects, and has been involved in the development of a number of EPA test methodologies for a variety of pollutants ranging from trace-level organic compounds to dioxins and furans. Art’s experience includes a wide spectrum of industrial facilities including large coal-fired power plants, microelectronics manufacturing operations, waste incinerators, petrochemical plants, and cement production plants. Throughout his career, Art’s greatest strength has been that of development or refinement of stack testing procedures for air pollutant emissions.

SESHA 2015 Symposium Abstract

Monitoring Toxic semiconductor gases with a portable FTIR gas analyzer

Cornish, Jim
(not applicable)

The analytical technique of fourier transform infrared (FTIR) gas analysis has been traditionally limited to either a laboratory or a fixed/ permanent installation. Pioneered by Dr. Albert A. Michelson in the 1890’s with his development of the interferometer which involves moving a finely balanced mirror to generate an interferogram and combined with the complex computations (fourier transformation) requiring a powerful computer this analytical technique while recognized and widely used for accuracy and rapid multi-component gas analysis was disregarded as a field technique. Develops in optical engineering and the advent of ever faster and faster computer processing chips have further refined FTIR so the powerful analytical technique once reserved for the laboratory is now available for plant safety personnel, emergency responders and engineers to use a portable FTIR for various applications including further understanding the processes, tightening the controls on their processes through improved quality control, reducing losses and environmental discharges. A new generation portable FTIR gas analyzer worn on the user’s back or carried over their shoulder brings new monitoring opportunities to the semiconductor industry. Providing emergency responders with a powerful tool to identify and quantify “unknown” toxic gases within minutes of arriving at the incident site means decisions and directives can be issued so protecting people and plant in an expeditious fashion. For safety officers, one tool to check leaking cylinders from the many toxic gases sorted on site ranging from Silanes, hydrogen chloride, phosphine, arsine, PFC’s, hydrogen fluoride, SO2, ammonia, diborane and hydrogen bromide provides a powerful and time saving means to protect personnel from toxic gas exposure and prevent expensive product losses. Measuring GHG’s escaping in process ducts and plant emission stacks by moving a portable FTIR analyzer and sampling system around to the various sources provides environmental engineers a near-real time picture on how tight their controls and scavenging systems are operating. This paper presents a new generation of analytical capabilities that is available for semiconductor safety and process engineers to measure multiple toxic gases in near real-time in the their work place environment.

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SESHA 2015 Speaker Biography

Jim Cornish
Sales & Technical Support Manager, not applicable

Jim Cornish has over 25 years of experience in applying environmental instrumentation to a wide range of air, water and wastewater sampling and monitoring applications. Jim holds a BSc. In Applied Chemistry from Deakin University (Geelong, Australia). Initially being employed as a petroleum chemist for Esso Aust. Ltd and SANTOS, Jim changed continents and occupations in 1986 and for the last 5 years has specialized in applying FTIR spectroscopy to the measurement of toxic gases in the field. Jim works with Gasmet Technologies and provide recommendations and support to a wide range of clients in the fields of occupational health, emergency response, chemical/semiconductor, GHG research and combustion emissions.

SESHA 2015 Symposium Abstract

Environmental and Infrastructure Impacts of Single Wafer Wet Tools

Raley, Brian
(GLOBALFOUNDRIES, Malta, NY)

The increased usage of single wafer wet tools has resulted in significant impacts for manufacturing facilities. This impact will increase as use of single wafer wet tools increase. This presentation will give a broad outline of those challenges, explain how those challenges are novel, and information on how those challenges are being met. The issues highlighted include increased chemical usage, chemical storage challenges, increased water usage, increased waste generation, various emissions issues, and exhaust and make-up air requirements. Although some of these challenges are not new to the industry, the significant magnitude increase in chemical and water use in single wafer wet tools should be understood as a new industry challenge. One of the more novel challenges resulting from single wafer wet tool use is in regards to exhaust emissions.

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SESHA 2015 Speaker Biography

Brian K. Raley
Corporate Environmental Senior Staff Engineer, GLOBALFOUNDRIES, Malta, NY

Brian Raley is a chemical engineer and Senior Staff Engineer working in the Global Environmental, Health and Safety and Corporate Social Responsibility department at GLOBALFOUNDRIES. Brian has worked in the semiconductor industry for 20 years, 10 with GLOBALFOUNDRIES (and AMD). His current focus is on EHS implications with new technology development, emerging EHS regulations, and site environmental permitting.

SESHA 2015 Symposium Abstract

Performance and Safety Considerations for MOCVD Processes

Alabiso, Peter
(CS CLEAN SYSTEMS, Inc)

As III-V materials become established in the more mainstream Silicon CMOS device fabrication area, MOCVD, once thought a specialized niche, is becoming more of a focus for major OEMs and IDEMs as an important technology and growth area for next generation chip nodes. Performance, cost and safety are important considerations for the exhaust abatement equipment. The introduction of III-V materials is causing users to look beyond the more traditional burn/wet and wet abatement technologies. Use of organometallic precursors, such as Tri-methyl Aluminum (TMA), Tri-methyl Gallium (TMGa), Tri-methyl Indium (TMIn), and hydride gases, such as Arsine (AsH3), which are either pyrophoric, highly toxic or both, require a number of considerations for safety of personnel, plant, equipment and environment. There are also issues of downstream waste being created, which may be difficult or costly to manage. Chemisorption based dry scrubbing provides a number of advantages, including excellent removal efficiencies and improved safety over other dry adsorption/ physisorption and traditional scrubbing technologies.

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SESHA 2015 Speaker Biography

Peter Alabiso
Director of Sales, CS CLEAN SYSTEMS, Inc.

Peter Alabiso is Director of Sales for CS CLEAN SYSTEMS, Inc and has been with CS CLEAN for approximately 1 year. Prior to that he has held vacuum and exhaust abatement sales and marketing positions with ULVAC Technologies, TecHarmonic, Edwards Vacuum, and Brooks Automation. He has also managed his own consulting company, providing sales, marketing and business development expertise to small and medium sized technology companies in a variety of market areas. Peter spent his early career in technical and engineering functions at M/A-COM, in the areas of Silicon and Gallium Arsenide microwave and millimeter wave device fabrication. Peter has Bachelor of Science degree in Chemical Engineering from Tufts University and an MBA from Northeastern University.

SESHA 2015 Symposium Abstract

Fire Detection Challenges on New Generation Tools & Processing Technologies – What Works & What Does Not!!

Wyman, Matt
(KFPI, Dallas, TX)

The semiconductor industry continues to develop new process technologies to meet ever-changing demand requirements and achieve new manufacturing milestones. These new technologies have greatly increased the challenges for fire detection to be reliable against false alarms but equally be reliable to detect an actual fire. Some of these new process challenges include new heating technologies on wet tools, new chemicals (such as energetic materials & pyrophoric liquids) on ALD/CVD tools, etc. KFPI will show engineering & actual fire test data where “approved” flame detectors have failed to reliably detect actual fires and which technologies are effective and “approved” in which applications. Without the proper engineering, analysis, and testing the semiconductor industry will continue to implement fire detection solutions that provide significant fire safety risk to the fab – both to reliable operation but actual protection against fire.

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SESHA 2015 Speaker Biography

Matt Wyman
Managing Director, KFPI, Dallas, TX

Matt Wyman is the Managing Director for KFPI Inc. who specializes in fire safety solutions for the global semiconductor industry with offices throughout USA, Asia, & Europe. Matt began his career as Semiconductor Loss Prevention Specialist with FM Global over 20 years ago, and has been designing and integrating fire safety solutions for semiconductor equipment for the past 15 years. Matt currently serves as the Leader of the SEMI Standards Committee for Fire Protection, active Member of the NFPA 318 and NFPA 12 Committees, active Member of SESHA and SFPE Chapters, active participant in SEMI/Sematech Energetics Task Force, and has presented at SESHA Annual Symposium & Local Chapter Events many times in the past.

SESHA 2015 Symposium Abstract

Emission Control from Semiconductor Wafer Fabrication

Bayon, Scott
(Anguil Environmental Systems, Milwaukee, WI)

Semiconductor wafer fabrication uses a number of chemicals to etch the surface of individual silicon wafers. Many of these chemicals contain VOCs (Volatile Organic Compounds) and HAPs (Hazardous Air Pollutants) which evaporate into the airspace of the tool. To meet EPA (Environmental Protection Agency) regulations the emission laden air needs to be captured and treated before being released into the atmosphere. The fabrication process is extremely pressure sensitive. Pressure fluctuations as low as 0.10” WC can have a negative impact on production, resulting in lost product. Any air pollution control device will be connected directly to the fabrication exhaust duct header, requiring that the control device create no pressure fluctuation within the header. Historically a rotor concentrator wheel in conjunction with a thermal or catalytic recuperative oxidizer has been the technology of choice. The emission laden exhaust from the tools flows through the concentrator wheel, providing two main benefits. The first is the concentrator wheel provides no pressure fluctuation in the exhaust header. The second is it concentrates the relatively large volume, low concentration exhaust into a lower volume, higher concentration stream. This concentrated stream has historically been sent to a smaller thermal or catalytic recuperative oxidizer. While this combination of technologies is dependable and effective, these oxidizers are limited to 65% – 70% thermal efficiencies due to internal metallic heat exchangers. A newer, more fuel-efficient technology called the RTO (Regenerative Thermal Oxidizer) is now being applied in conjunction with concentrator wheels on this application where it was once thought impractical due to pressure pulse issues. The RTO is capable of 99%+ destruction efficiency and upwards of 97% thermal efficiency which dramatically reduces operating costs. However, careful consideration must be given to the design of the system, connection to the concentrator wheel and selection of heat recovery media. If selected, our paper and presentation will examine, in detail, all the benefits and potential hurdles that manufacturers should evaluate before moving to this type of treatment device. In addition, we will identify the Concentrator / RTO features that they should look for in a system. The information will be conveyed using real world examples and case studies from actual emission control projects at several semiconductor facilities.

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SESHA 2015 Speaker Biography

Scott Bayon
Director of Sales, Anguil Environmental Systems, Milwaukee, WI

As Director of Sales for Anguil Environmental Systems, Scott is responsible for technical sales and application of the company’s air pollution control systems. He has a Mechanical Engineering degree from Milwaukee School of Engineering and over ten years of experience applying Regenerative Thermal Oxidizers (RTOs), as well as Direct-Fired, Catalytic and Thermal Recuperative oxidizers for the destruction of Volatile Organic Compounds (VOCs), Hazardous Air Pollutants (HAPs) and odorous air emissions

SESHA 2015 Symposium Abstract

Recent Changes in Greenhouse Gas Emissions Determination and Reporting

Higgs, Tim
(Intel, Chandler, AZ)

The 2014 reporting year will be the first year that semiconductor facilities will calculate their greenhouse gas emissions using the revised U.S. EPA mandatory greenhouse gas electronics industry reporting rule (subpart I) that were published at the end of 2013. The revised rule establishes new default emission factors and abatement efficiencies, and adds the option of calculating emissions using stack testing. In addition, new global warming potential (GWP) values were published for some materials in late 2013, and additional GWP changes were proposed in 2014. This paper will discuss the recent changes and evaluate the pros and cons of the stack test method compared to the default emission factor method, as well as the factors to be considered when deciding which approach to use. It will also discuss expected impacts of the changes in GWP values, the new requirements for site maintenance plans, and information on measured vs. default point of use efficiency values.

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SESHA 2015 Speaker Biography

Tim Higgs
Environmental Engineer, Intel, Chandler, AZ

Tim Higgs is an environmental engineer with Intel’s corporate environmental organization. He received his B.S. degree in chemical engineering from Michigan State University in 1983 and is a registered professional engineer (chemical) in the State of Arizona. Tim has been with Intel for over 30 years in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency, climate change and carbon footprinting. He has worked with state and local regulatory agencies across the U.S. as well as in other nations on air pollution control programs, and has frequently consulted with regulatory agencies in the U.S. and elsewhere on air program matters of importance to the semiconductor industry.

SESHA 2015 Symposium Abstract

Computer based monitoring of F-GHG emissions in Semiconductor Fabs

Neuber, Dr. Andreas; McIntosh, PhD, Monique; Cayer, Maxime
(Andreas Neuber, Monique McIntosh, Maxime Cayer, Shaun Crawford, Andrew Herbert, John Dickinson,Applied Materials, Santa Clara, USA)

Regulatory compliance is an increasing issue for the semiconductor industry, see for example the US EPA Fluorinated Green House Gas (F-GHG) and N2O usage and emissions reporting regulations. Applied Materials has developed a method to help track these emission and to support compliance with new regulations. The results can then be used to compare to stack emission reports, but especially for apportioning, planning and forecasting of F-GHG and N2O emissions. Estimation of the emissions is thereby based on real time abatement operation information and gas flow monitoring. Different calculation methods can be used. The impact of this is shown. The method could be expanded into a monitoring of the SEMI S23 equivalent energy consumption per tool and for major areas of the fab as well as into the monitoring of other process resources.

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SESHA 2015 Speaker Biography

Andreas Neuber
Managing Director, Andreas Neuber, Monique McIntosh, Maxime Cayer, Shaun Crawford, Andrew Herbert, John Dickinson,Applied Materials, Santa Clara, USA

EDUCATION University of Technology Dresden, Diploma (MS)/Dipl.-Ing./PhD/Dr.-Ing Chemical Engineering PROFESSIONAL EXPERIENCE 2011 – Today Applied Materials Head, Subfab & Environmental Products, Equipment Products Group 2008 – 2011 Applied Materials, Managing Director Environmental Services 1991 – 2008 M+W Zander FE, Vice President Manufacturing Technology, Environmental engineering and contamination control consulting 1986 – 1990 University of Technology Dresden, Institute of Chemical Engineering, Research Assistant

SESHA 2015 Symposium Abstract

Effective EHS Leadership to Deliver Business Value

Wilk, P.E. , Lisa
(Capaccio Environmental Engineering, Inc.)

In addition to having strong technical knowledge and experience, successful Environmental, Health and Safety (EHS) professionals also need to be effective managers and leaders. While ISO/OHSAS and other EH&S management systems facilitate “managing” the EH&S aspects of an organization, EH&S organizational “leadership” is important for achieving strong results. EH&S professionals are often challenged with communicating across varying functional areas, and need to be able to influence up, down, and sideways through their organizations to be able to successfully implement programs and effect positive changes. Clear mechanisms for communicating, driving and measuring performance are critical. A key aspect of communication is ensuring alignment with stakeholders, as well as core business objectives. EH&S professionals need to ensure that they are effectively integrated and aligned with the core business of their organizations. Understanding the overall organizational vision, and taking a bigger picture view of EH&S within the context of this larger vision, provides a framework around which EH&S leaders can think and plan strategically to ensure the success of their organization and strong transformational EH&S leadership. By proactively preparing for anticipated stakeholder expectations, EH&S professionals can help their organizations achieve a competitive advantage. Most high tech companies recognize the need for innovation to deliver products and services more quickly, more economically, and with better results. EH&S managers also need to innovate to deliver “faster, cheaper, smarter”. Moving beyond compliance and management systems, EH&S professionals need to be thinking about and acting to transform their organizations to achieve extraordinary outcomes. As the famous business writer Peter Drucker says, “The best way to predict the future is to create it”. This presentation will provide a quick overview of the following key leadership concepts, review challenges and identify examples of ways in which EHS professionals can and are addressing these important leadership areas: Understanding & Aligning with Overall Company Vision, Strategic Thinking and Planning, Innovation, Communication, Influence & Motivation (with or without Authority), Driving and Measuring Success, and Transformational Leadership. Thoughts on what makes an effective leader and how EH&S professionals can be effective leaders to deliver value to their organizations will be presented. Discussion and sharing of leadership challenges and successes is encouraged during or after the presentation.

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SESHA 2015 Speaker Biography

Lisa F. Wilk, P.E.
President, Capaccio Environmental Engineering, Inc.

As President and CEO of Capaccio Environmental Engineering, Lisa Wilk is responsible for overall operations, retaining outstanding staff, and ensuring that customer needs are proactively addressed in a value-added manner. With a mission of helping industry and the environment prosper, Lisa leads her organization to address growing customer needs within the semiconductor and related industries. She helps customers develop and implement strategies for effective EH&S management to meet multiple stakeholder demands and achieve a competitive advantage. She is a published author of several technical articles and books, and a frequent speaker at industry seminars and conferences. Her recent presentations have focused on ISO 14001/OHSAS 18001, sustainability, strategic planning, and measuring and reporting EH&S performance to all stakeholders in a global environment. She is a registered professional engineer and holds a B.S. in Chemistry from Bates College and a B.S. in Civil/Environmental Engineering from Northeastern University.

SESHA 2015 Symposium Abstract

Influencing Others As A Leader In EH&S

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SESHA 2015 Symposium Abstract

“Process Safety Management and the Semiconductor Industry”

TESTO, JAMES; MOLL, ASHLEY
(Greystone Risk Management, (client is Globalfoundries))

James M. Testo CIH,CSP and Ashley Moll The presentation addresses the regulatory requirements for compliance with OSHA’s CFR 1910.119 Process Safety Management standard, but also defines the business drivers that support compliance along with a summary of best practices. The presentation will cover the elements of OSHA’s Process Safety Management standard and the application in the semiconductor industry. The presentation will support a management systems approach to achieve compliance and manage business risk. The message is, that a well performing process safety management program either for compliance or best practice will have a positive impact to a company’s bottom line performance.

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SESHA 2015 Speaker Biography

James M. Testo CIH,CSP
President, Greystone Risk Management, (client is Globalfoundries)

James M. Testo is a recognized leader in the development and implementation of global environmental, health and safety programs. Mr. Testo has a BS and more than 30 years of experience in successfully leading EHS programs, including implementing EHS programs at GE Silicones in Waterford as well as other GE companies. Since leaving GE, he has helped to build and sell a business focused on the development and delivery of global EHS programs where his responsibilities included managing business growth with Profit and Loss requirements required by venture capital partners. Mr. Testo’s balanced experience as a corporate EHS manager,and consultant have honed his leadership, communication and interpersonal skills. His international EHS program development and implementation experience, chemical and manufacturing business process experience, and successful business experience with his former international corporate EHS management company, make him an unparalleled Global EHS consultant.

SESHA 2015 Symposium Abstract

Conflict minerals ruling – 2014 review and what lies ahead

Pradhan-Kasmalkar*, Revati; Dennis, Tord
(WSP, San Francisco, CA)

Conflict minerals ruling – 2014 review and what lies ahead Tord Dennis, Practice Leader, Sustainability and Energy, WSP Revati Pradhan-Kasmalkar, Senior Consultant, Sustainability and Energy, WSP In response to the Conflict Minerals Ruling, around 1300+ conflict minerals reports were filed with SEC for CY2013, with only few of them going through IPSA. With CY2014 filings, there will likely be more smelters or refiners reported and companies will have to decide on ways to refine their smelter lists and reporting. This presentation will look at some practices that are being adopted across the high tech industry to enhance their CY2014 conflict minerals programs. The conflict minerals reporting itself still has some aspects of uncertainty associated with the outcome of SEC’s petition and ending of the reporting transition period. In addition, other regions such as EU are in process of coming out with their own conflict minerals laws. NGOs and the industry have been closely following this and the reported impacts from these conflict-free initiatives. With so much focus on the issue of conflict-free and responsible sourcing, companies need to anticipate what lies ahead in terms of supply chain data collection requirements as well as customer requests and position themselves for smooth transition into these responsibilities.

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SESHA 2015 Speaker Biography

Revati Pradhan-Kasmalkar
Senior Consultant, Sustainability & Energy, WSP, San Francisco, CA

Revati Pradhan-Kasmalkar is a Senior Consultant with WSP specializing in product stewardship and sustainability programs. She has worked extensively in the area of global product environmental regulations and product compliance related to RoHS, REACH, as well as responsible sourcing initiatives such as Conflict Minerals programs. Ms. Pradhan-Kasmalkar has also worked in the field of semiconductor process exhaust management, analyzing complex chemical applications for EHS requirements. She holds dual Masters Degrees in Chemical Engineering and General Engineering and has over 14 years of technical/engineering experience. Ms. Pradhan-Kasmalkar is based in San Jose, CA.

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SESHA 2015 Symposium Abstract

Product Design For Safety – Hey, They Don’t Teach This Stuff In Schools!

Fessler, Mark
(TEL, Chandler, AZ)

Product safety regulations are forever changing – it’s not a point in time activity. (e.g. “Compliance” is more than a one-time event!). It is an ongoing design review process that must be monitored, maintained, and managed consistently if an organization wants to effectively mitigate risk and stay compliant. One of the biggest problems today is when new engineering graduates are hired on to work at an semiconductor equipment manufacturer; they are ill prepared to design to the existing product safety (and environmental) regulations. Why? They just don’t teach the details of such design standards in our US engineering schools. They should, but they don’t. Yes, there are degrees you can get in Occupational Health and Safety, or even “Environmentally-specific” degrees, but a large gap still exists to prepare our current and next generation design engineers to fully comprehend the complexities of equipment design regulations. This presentation will give a brief overview of the product safety standards progression in semiconductor industry and then focus on how the current challenges for product compliance can be mitigated through focused, internal educational programs. Examples will be provided on how Tokyo Electron has addressed this problem here in the US, and review some of the key regulation changes that are are causing the biggest design concerns today.

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SESHA 2015 Speaker Biography

Mark Fessler
Product Safety Program Manager, TEL, Chandler, AZ

Mark received both his Masters of Science and Bachelor’s degrees in Mechanical Engineering and has been employed at Tokyo Electron (TEL), a major semiconductor capital equipment manufacturer for over 18 years. In his tenure at TEL, Mark has held engineering management positions both Reliability and Product Safety, and has focused in design and testing of various TEL product lines with primary focus on new R&D equipment programs. He has twice received the prestigious “TEL Outstanding Employee Award”, once for his work on the design and development of a new semiconductor wafer processing tool, and secondly for his implementation of an innovative management of change process. He has also created TEL Engineering Dept. Training courses various design for safety topics such as “Management of Change”, “Risk Assessment”, and “Functional Safety Design and Validation” courses.

SESHA 2015 Symposium Abstract

Increasing Value through Deep Integration of Product Stewardship within the Product Development Process

Castorano, Michael; Connor, Paul
(Dow Electronic Materials)

Environmental, Health, and Safety (EH&S) programs have the responsibility to minimize risks to human safety and the environment. Prompt identification and resolution of EH&S issues during the product development process is essential to good product stewardship. The Dow Electronic Materials Product Stewardship Team has developed a set of tools and processes that ensure early resolution of EH&S and commercial barriers to market. These tools allow the Product Stewardship team to foresee possible roadblocks and work to alleviate them before the product reaches the next critical step in its development process. As an added bonus early integration in the Product Development Process allows Product Stewardship to steer research and development towards more sustainable raw materials and products. Through these tools and work processes Dow Electronic Materials Product Stewardship Program is seen as not only providing value in EH&S, but business value as well.

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SESHA 2015 Speaker Biography

Michael Castorano
Product Steward Specialist, Dow Electronic Materials

Product Stewardship Specialist Dow Electronic Materials

SESHA 2015 Symposium Abstract

LESSONS LEARNED FROM RCRA AND TRI AUDITS

Sherer, P.E., Mike
(Trinity Consultants, Phoenix, AZ)

Drawing from experiences during many years of Toxic Release Inventory (TRI) reporting and Resource Conservation and Recovery Act (RCRA) audits, information has been developed to ensure that facilities are in compliance with TRI and RCRA-specific regulations. This presentation provides lessons learned that can help facilities with compliance with RCRA and TRI.

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SESHA 2015 Speaker Biography

Mike Sherer
Principal Consultant, Trinity Consultants, Phoenix, AZ

Mr. Sherer, P.E. serves as a Principal Consultant in the Trinity Phoenix, Arizona office. He has 33 years of environmental permitting and compliance experience in aerospace, chemical, semiconductor, solar, and several other industries in North America, and also has experience with several industries in Asian and European countries, as well as in Mexico. In addition to his significant experience with traditional environmental permitting and compliance, Mr. Sherer has conducted numerous environmental audits, and prepared numerous Toxic Release Inventory (TRI) reports. He also works on specifications and troubleshooting issues with air pollution abatement equipment. Mr. Sherer is a Fellow and recipient of the “Lifetime Achievement Award” with the Semiconductor Environmental, Safety, and Health Association (SESHA) where he served in many roles, including President and Regional/Chapter Liaison.

SESHA 2015 Symposium Abstract

Corporate Responsibility/Sustainability/EHS Dashboard – Measuring Success

Baycroft, John; Wilk, P.E., Lisa
(Capaccio Environmental Engineering, Inc.)

The high tech / semiconductor industry faces numerous regulatory and voluntary reporting requirements associated with corporate responsibility and sustainability. In addition to aligning programs with key stakeholder expectations, a successful sustainability program is directly related to a company’s ability to identify and measure the “right” performance indicators. Additionally, organizations need to be able to rapidly identify results and respond to key indicators. In a January 2015 benchmark survey report issued by the National Association of Environmental Managers (NAEM), 91% of EHS Managers said that one of their top responsibilities is “reporting to meet internal and external requirements”. Programs need to identify the appropriate trends, leading process metric indicators, and result metrics to monitor and achieve objectives. Additionally, the collection, management, analysis and reporting of this data presents several challenges. Similar information may need to be presented in multiple venues and format, yet must be consistent. Trends must be visible and real-time access to information is necessary for ready-response. Effective and efficient systems need to be in place for planning, reporting, and action. This presentation will review case study examples of specific mechanisms for effectively and efficiently addressing these requirements. This presentation will provide examples of key indicators used by leading high tech /semiconductor companies, and identify important considerations for identifying and tracking metrics. Additionally, the presentation will demonstrate examples of how a unified data management system application using readily available technology can integrate with multiple existing information sources to simplify data collection, validation, management, and real-time reporting. A successful program has its roots in data management. Many companies utilize e-mail, Excel, and Access for data acquisition and reporting. While these are powerful tools, they can cause many risks if not properly controlled and documented. Due to the increasing availability of internal or external cloud or web-based database solutions in the form of custom applications or software suites, many of these risks can be reduced if not abated all together. With the increasing visibility of EH&S performance information to multiple stakeholders, it is imperative that the data be consistent, readily accessible, valid and verifiable. This data is the basis for reports to regulatory agencies, customers, non-governmental organizations, employees and company management. Be on the cutting edge, and learn how your organization can potentially improve the effectiveness of its measurements and tracking to ensure successful results.

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SESHA 2015 Speaker Biography

John Baycroft
Sr Engineer, Environmental & Tech Solutions, Capaccio Environmental Engineering, Inc.

John Baycroft is a Senior Environmental and Technology Solutions Engineer at Capaccio Environmental Engineering, Inc. He has a B.S. in Environmental Engineering from Suffolk University in Boston. John provides CAPACCIO clients with a variety of engineering and environmental management tasks including air and water permit applications, air reporting requirements such as source registration, federal and state mandatory greenhouse gas reports, and sampling plans. He also develops customized database solutions for tracking daily, monthly and annual usage for calculating emissions. With his combined expertise in EH&S and software, mobile, and web development, he develops customized applications to help clients more effectively track their EH&S technical data and information. Recent projects included creating web-based risk assessment and lockout/tagout applications, chemical tracking and reporting, and metrics reporting tools. John applies current technology and innovation to bring value for EH&S implementation and management.

SESHA 2015 Symposium Abstract

Lessons learned during the evaluation of a pneumatic/electrical safety function

Rivera, Kalysha
(TEL FSI, Chaska, MN)

Per NFPA 79, Section 9.2: Where control circuits perform safety related functions, they shall meet the safety performance requirements determined by the risk assessment of the machine and the applicable functional safety standards. This is in alignment with other international design requirements for industrial equipment (e.g. IEC 60204-1, ISO 13850, SEMI S2, etc.). ISO 13849-1 and -2 are the primary functional safety standards to be followed when verifying safety interlocks in semiconductor wafer processing equipment. The problem is that these standards are complex and not readily understood even by third party auditors. There is a need for information sharing. This presentation will go over a real life example from a semiconductor capital equipment manufacturer and it will discuss the lessons learned as well as the foreseeable mistakes that may be made if you are not mindful to the small details required by the standards. I will also discuss some BKMs that were created to help minimize errors.

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SESHA 2015 Speaker Biography

Kalysha Rivera
Product Safety Engineer, TEL FSI, Chaska, MN

Kalysha Rivera has currently worked the past year as a Product Safety Engineer at Tokyo Electron subsidiary, TEL FSI, Inc. She is responsible for supporting engineering designs on four different wafer processing equipment (ORION, ANTARES, ZETA, MERCURY). She previously worked as a Quality Engineer at a circuit board manufacturer, EI Microcircuits. She graduated with a bachelors degree in Manufacturing Engineer in the Fall 2014.

SESHA 2015 Symposium Abstract

Partnership Across Disciplines: Improved EHS Efficiency Through Collaboration of Industrial Hygienists and Environmental Engineers

Marsalla, P.E. , Joy
(Intel Corporation, Hillsboro, OR)

While semiconductor companies drive to meet Moore’s Law through groundbreaking research practices, Environmental, Health and Safety professionals must assess new types of hazards, complete regulatory reviews and examine chemical data, often in a resource-scarce environment. Given the immense breadth and depth of knowledge required of semiconductor EHS professionals such as Industrial Hygienists and Environmental Engineers, the roles and responsibilities of these two specialties are often kept rather isolated. However, there is a unique opportunity to be had through partnership across disciplines. To be effective with these conflicting pressures of enlarged scope and limited resources, collaborative and multi-disciplinary developments within EHS can lead to more proactive and thorough Industrial Hygiene and Environmental assessments. For example, at Intel Corporation, new chemistries which are brought into our facilities must be reviewed by EHS, which is completed by both Industrial Hygienists and Environmental Engineers at each of the sites throughout the corporation. In this practice, the increased standardization, increased communication and greater visibility across disciplines to new chemicals, tools, and technologies, Intel is utilizing individuals who are cross-trained in Industrial Hygiene and Environmental Engineering to act as a leading indicator for EHS needs and often, a coordinator for the more discipline-specific investigations. This presentation will discuss basic philosophies and training of Industrial Hygienists and Environmental Engineers, will investigate opportunities for streamlining and sharing data across disciplines, and then will discuss examples of some EHS cooperative efforts in place at Intel Corporation beginning with the incoming chemical review, while including hazard and exposure assessments, regulatory chemical classification, and other preemptive EHS evaluations.

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SESHA 2015 Speaker Biography

Joy Marsalla
Technology Development Environmental Engineer, Intel Corporation, Hillsboro, OR

Joy Marsalla, PE, LEED GA, MSE – Intel Corporation, Corporate Services, Oregon Environmental Health & Safety, Environmental Engineer. 3 years EHS experience in semiconductor industry leading research and development chemical review at Ronler Acres facility as well as high volume chemical review for Fab chemicals. Responsibilities also include support for air, wastewater and waste projections and modelling. Focus on chemical regulations, chemical classification, and chemical use. Education: Masters of Science in Engineering, Environmental Engineering from Arizona State University and BSE, Civil & Environmental Engineering and minor in Sustainability.

SESHA 2015 Symposium — PDC4

Semconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test Methodologies

Mike Sherer
Trinity Consultants, Phoenix, AZ

The electronic industry greenhouse gas (GHG) reporting rule (40 CFR Part 98 Subpart I) was revised on November 13, 2013. Many items were changed that could affect compliance with Subpart I reporting. This PDC will review wafer fab GHG reporting using 40 CFR Subparts A, C and I. In addition, EPA test protocol for GHG destruction or removal efficiency (DRE) testing including additions provided in 40 CFR Part 98 Subpart I Appendix A, and using Site Maintenance Plans for the ability to use GHG DREs will be discussed. Stack testing will be mentioned but not included in much detail. This PDC will be half-day in length.

SESHA 2015 Symposium — PDC5

ISO 13849-1 Safety Circuits and SEMI S2 Interlocks Contrasts and Comparisons

Salus Engineering International

ISO 13849-1 “Safety of Machinery – Safety related parts of control systems – Part 1 General principles of Design” is becoming a more prominent standard in international compliance. At first reading it appears to be a totally different approach to safety circuits, than that which is taken by SEMI S2. Which leads to be question if a company designing semiconductor equipment seeks to comply with this document do they need to engage in an additional major effort on top of their already substantial resources committed to design of SEMI S2 compliant interlocks? This question is best answer by a careful comparison of these two sets of requirements. When this is done it reveals there is much more similarity than originally thought. This in turn leads to a cost effective means of meeting both sets of requirements. This is the objective of this course. It first explains the 13849-1 requirements in detail. Subsequently it then over lays the SEMI S2 interlock requirements onto 13849-1 to explore the common ground between the two sets of requirements. This leads to a cost effective means of implementing both. Anyone who has attempted to deal with these sets of requirements should be find this course very useful.