Equipment Fire Risk Assessment: Issues Arising From The First Year of Implementation of SEMI S14-0200

Brown, Alastair (Rushbrook Consultants, Glasgow, Scotland)

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The breakthrough that took place in February 2000 when S14-0200 was published was significant; with a requirement being introduced for the first time that all equipment being built to SEMI Standards should have a fire risk assessment completed. The guidelines are strong on hazard identification, and provide a method for categorising risk, however they only provide limited guidance on what is required to complete an adequate risk assessment. Due to a small number of fire engineers available with sufficient knowledge and expertise to complete the work, initial assessments have set the standard for others to follow. Using his experience of a wide range of semiconductor equipment and facility fire risk assessment the author examines some of the issues arising from the implementation of S14-0200, both from fire engineering and risk assessment perspectives and considers some of the anomalies that the standard has introduced. The paper will discuss issues of interest to experienced third party assessors and to product safety and design engineers with an interest in fire risk assessment and the S2 and S14 assessment process.

Back to SESHA 23rd Annual Symposium (2001)



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