Exhaust Optimization for Flammable Gas Use

Peterson, Susan (Earth Tech, San Jose, CA)

Reduced cost of ownership and less significant environmental impact can be realized by minimizing the safety exhaust required on semiconductor manufacturing equipment. Use of toxic and flammable gases or liquids presents a special challenge for optimization. Guiding principles are not available in determining how much exhaust is “safe” with regard to flammables, let alone “optimized.”. This presentation will explore approaches to ensuring safe and efficient exhaust flow on equipment that uses both toxic and flammable gases or liquids.

Back to SESHA 23rd Annual Symposium (2001)



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