Hybrid Gas Abatement Strategies for Advanced Materials

Peter Alabiso
(CS CLEAN SOLUTIONS Inc)

The new era in Artificial Intelligence has created a demand for advanced materials and devices, which do not lend themselves well to traditional exhaust gas abatement methods and products. In particular, chemistries used for Phase Change Memory (PCRAM) create significant challenges. Oftentimes, these materials are best abated using a “hybrid” approach, where 2 different abatement technologies are used in conjunction to provide the necessary personnel, plant and environmental safety. This talk will provide insight into various process applications and review different strategies which may be employed to maximize uptime while providing the required safe operation.

Back to SESHA 42nd Annual Symposium (2020)

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