Laser Safety in Semiconductor Applications

Jamali, Jay
(Enviro Safetech, San Jose, CA, USA)

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Semiconductor tools containing lasers are becoming common place. This presentation will cover the following laser safety issues: OSHA, FDA and new ANSI Z136.1 regulatory requirements, laser classes 1-4, types of laser tools used in the semiconductor industry, personal protective equipment selection, written programs, training requirements, labeling, temporary laser control areas, engineering controls, administrative controls, laser safety officer (LSO) requirements, and medical surveillance.

Back to SESHA 24th Annual Symposium (2002)